[Scan]
initial_time=2016-02-16T00:16:10
final_time=2016-02-16T00:16:30
ip_count=19
run=1030
dataset=3
scan=190
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.80556E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.7565E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=3.64864E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.57701E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=7.77268E-10
mult1=-1.021E-8
mult2=-2.85834E-9
rf_tmon=-4.45234E-3
rf_agc=3.44271E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=3.80993E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62433E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20226E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53256E1
cs_ef1b_imon=3.04469E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.19038E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02239E0
lens1_imon=1.53099E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65089E1
os_ef1alow_imon=2.96684E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0346E1
cs_ea2_imon=1.56886E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84718E1
cs_ef1a_imon=3.03928E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.63207E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=2.86665E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15241E1
os_ea1_imon=1.89874E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.11641E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.24748E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9183E2
cs_nozzle_imon=1.93519E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=3.20939E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=7.28023E-10
tplens_vset=1.4E-1
tplens_vmon=1.65972E0
tplens_imon=-1.07759E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26188E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.59116E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.95572E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23145E0
ionrepsh_imon=2.0166E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.18366E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74339E1
cs_ef2b_imon=3.13839E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.76401E-1
os_ea2_imon=-3.90912E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56212E0
os_ef2alow_imon=-2.342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64388E-1
os_ef2bup_imon=-4.95127E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10403E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23106E2
cs_ionfoca_imon=6.33397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01557E1
cs_anode2_imon=2.24677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.12325E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67818E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.89191E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=2.93708E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16798E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02032E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56886E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.859E1
mask2_imon=-4.64331E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.23297E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.85072E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.42056E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33943E1
os_fil1_imon=4.67411E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.25695E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6595E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30809E1
cs_fil1_imon=1.00811E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62053E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65319E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35886E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8521E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.82097E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22302E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.44896E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2299E4	1.2E1	1.47E2	4.1E1	-7.36328E-2	-8.80026E1	-3.8147E-4	-8.8E1	4.76837E-4	5.74589E-3	9.32455E-2	2.73334E1	-3.26543E1	-3.26726E1	2.67758E1	1.73753E-7	2.50668E-3	2.50668E-3	6.3074E-3	1.98661E-1
2.0E0	6.615E3	7.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80025E1	-7.62939E-4	-8.79996E1	5.24521E-4	5.72205E-3	9.31501E-2	2.7318E1	-3.26842E1	-3.26211E1	2.67463E1	1.73605E-7	2.52061E-3	2.52061E-3	6.36144E-3	1.9883E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80024E1	-3.8147E-4	-8.79997E1	2.38419E-4	5.76973E-3	9.30071E-2	2.73081E1	-3.26549E1	-3.26386E1	2.6804E1	1.73681E-7	2.52139E-3	2.52139E-3	6.28511E-3	2.01352E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80022E1	-7.62939E-4	-8.79999E1	9.53674E-5	5.57899E-3	9.30786E-2	2.72839E1	-3.26443E1	-3.26042E1	2.6807E1	1.7368E-7	2.52099E-3	2.52099E-3	6.3514E-3	2.00325E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80023E1	-7.15256E-4	-8.79996E1	-2.38419E-5	5.6982E-3	9.29832E-2	2.73195E1	-3.26236E1	-3.26669E1	2.6798E1	1.73605E-7	2.50775E-3	2.50775E-3	6.25382E-3	2.01047E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80021E1	-9.77516E-4	-8.80001E1	-9.53674E-5	5.74589E-3	9.32455E-2	2.73163E1	-3.2652E1	-3.26349E1	2.68221E1	1.73755E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80023E1	-5.24521E-4	-8.8E1	2.86102E-4	5.8651E-3	9.31978E-2	2.73467E1	-3.2626E1	-3.27136E1	2.67896E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00847E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80024E1	-7.62939E-4	-8.79997E1	1.90735E-4	6.05583E-3	9.3174E-2	2.72573E1	-3.26956E1	-3.26024E1	2.67944E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.00673E-1
1.2E1	2.94E2	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80025E1	-1.04904E-3	-8.79997E1	3.57628E-4	6.29425E-3	9.29594E-2	2.73347E1	-3.26431E1	-3.26004E1	2.6796E1	1.73679E-7	2.52599E-3	2.52599E-3	6.36144E-3	2.00192E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.8002E1	-9.53674E-4	-8.79995E1	4.05312E-4	5.55515E-3	9.32693E-2	2.73188E1	-3.27034E1	-3.26341E1	2.67907E1	1.73605E-7	2.51162E-3	2.51162E-3	6.29703E-3	1.98955E-1
1.4E1	7.12E2	1.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80021E1	-9.53674E-4	-8.79998E1	6.67572E-4	5.62668E-3	9.30548E-2	2.7311E1	-3.26313E1	-3.26396E1	2.67955E1	1.73683E-7	2.51611E-3	2.51611E-3	6.28468E-3	1.98088E-1
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80027E1	-6.19888E-4	-8.79998E1	6.19888E-4	5.57899E-3	9.26971E-2	2.73308E1	-3.27625E1	-3.25648E1	2.68143E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3957E-3	1.97731E-1
1.6E1	3.2E3	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80029E1	-8.10623E-4	-8.79997E1	2.6226E-4	5.38826E-3	9.31978E-2	2.73399E1	-3.26089E1	-3.26773E1	2.68023E1	1.73228E-7	2.51771E-3	2.51771E-3	6.35692E-3	1.97903E-1
1.7E1	4.4041E4	2.1E1	6.87E2	4.7E2	-7.35556E-2	-8.80028E1	-1.12057E-3	-8.80001E1	3.33786E-4	5.36442E-3	9.30548E-2	2.736E1	-3.27658E1	-3.26514E1	2.6825E1	1.73309E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.98322E-1
1.8E1	1.99462E5	1.24E2	7.27E2	5.0E2	-7.3401E-2	-8.80022E1	-7.86781E-4	-8.80001E1	3.57628E-4	5.55515E-3	9.30786E-2	2.73219E1	-3.2641E1	-3.26194E1	2.6828E1	1.73605E-7	2.5199E-3	2.5199E-3	6.2474E-3	1.99283E-1
1.9E1	2.501E3	1.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80023E1	-6.91414E-4	-8.80003E1	5.24521E-4	5.43594E-3	9.30309E-2	2.72909E1	-3.2685E1	-3.2672E1	2.68059E1	1.73753E-7	2.51525E-3	2.51525E-3	6.23784E-3	2.00705E-1
2.0E1	4.12E2	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80023E1	-8.82149E-4	-8.80004E1	3.8147E-4	5.6982E-3	9.27687E-2	2.73068E1	-3.26753E1	-3.26538E1	2.68198E1	1.73605E-7	2.52169E-3	2.52169E-3	6.2645E-3	2.00363E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80024E1	-6.67572E-4	-8.80002E1	1.43051E-4	5.67436E-3	9.28402E-2	2.72932E1	-3.26872E1	-3.26248E1	2.68331E1	1.73605E-7	2.51814E-3	2.51814E-3	6.31798E-3	1.99729E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80023E1	-8.58307E-4	-8.80003E1	2.86102E-4	6.07967E-3	9.29594E-2	2.72803E1	-3.2626E1	-3.26307E1	2.67944E1	1.73683E-7	2.52293E-3	2.52293E-3	6.37607E-3	1.99883E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80021E1	-6.91414E-4	-8.80002E1	4.29153E-4	5.36442E-3	9.3174E-2	2.73069E1	-3.26795E1	-3.26188E1	2.67818E1	1.73605E-7	2.51417E-3	2.51417E-3	6.34518E-3	1.9968E-1