[Scan]
initial_time=2016-02-16T00:17:30
final_time=2016-02-16T00:17:50
ip_count=19
run=1030
dataset=3
scan=193
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.78088E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.76961E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=3.88074E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.64698E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=7.89189E-10
mult1=-1.04744E-8
mult2=-2.80665E-9
rf_tmon=-2.96551E-3
rf_agc=3.48614E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.00794E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62669E0
bslens_imon=2.35921E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=2.00456E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.534E1
cs_ef1b_imon=3.03784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04567E2
lens23_imon=1.02595E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05531E1
cs_ea1_imon=2.23852E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99349E0
lens1_imon=1.75043E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.5632E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84604E1
cs_ef1a_imon=3.01045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.17054E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=2.87278E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15099E1
os_ea1_imon=1.90865E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22083E0
cs_ionrep_imon=1.24465E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91846E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.25372E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=7.81405E-10
tplens_vset=1.4E-1
tplens_vmon=1.62669E0
tplens_imon=5.50537E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.5048E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26654E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98664E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.45712E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24384E0
ionrepsh_imon=1.98545E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.19817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.50445E-1
os_ea2_imon=-6.28052E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00867E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63239E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.15133E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=2.86053E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23119E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.27308E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.14166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67625E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89767E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.28112E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47533E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.89484E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.88257E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.06662E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.19593E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33967E1
os_fil1_imon=4.73418E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.50322E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65751E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=1.00662E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63039E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65561E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.24551E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.83939E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.02168E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22375E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35692E-3
inlet_lpb_pmon=1.98419E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18757E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2093E4	1.5E1	1.47E2	4.1E1	-7.31692E-2	-8.80024E1	-5.96046E-4	-8.80001E1	2.38419E-4	5.24521E-3	9.30786E-2	2.73222E1	-3.2662E1	-3.26756E1	2.68136E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.97984E-1
2.0E0	6.596E3	5.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80027E1	-8.82149E-4	-8.8E1	2.14577E-4	5.31673E-3	9.31978E-2	2.73249E1	-3.26837E1	-3.25743E1	2.67902E1	1.73679E-7	2.52384E-3	2.52384E-3	6.35059E-3	1.9731E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80027E1	-6.91414E-4	-8.8E1	2.14577E-4	5.14984E-3	9.29356E-2	2.72745E1	-3.26326E1	-3.26759E1	2.67827E1	1.73605E-7	2.51225E-3	2.51225E-3	6.29098E-3	1.97559E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80026E1	-4.52995E-4	-8.80004E1	3.57628E-4	5.31673E-3	9.34362E-2	2.72986E1	-3.26537E1	-3.26195E1	2.6795E1	1.7368E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.98764E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80026E1	-5.00679E-4	-8.8E1	3.09944E-4	5.38826E-3	9.33886E-2	2.73099E1	-3.26494E1	-3.26603E1	2.6786E1	1.73716E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80026E1	-9.29832E-4	-8.80003E1	6.19888E-4	5.19753E-3	9.31978E-2	2.72998E1	-3.26762E1	-3.26054E1	2.67891E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80025E1	-6.67572E-4	-8.80003E1	4.76837E-4	5.26905E-3	9.31978E-2	2.72853E1	-3.2653E1	-3.2611E1	2.678E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80023E1	-4.76837E-4	-8.80003E1	5.00679E-4	5.6982E-3	9.32217E-2	2.73033E1	-3.26585E1	-3.26178E1	2.67878E1	1.73455E-7	2.51484E-3	2.51484E-3	6.30469E-3	1.99569E-1
1.2E1	3.11E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80025E1	-6.67572E-4	-8.8E1	4.05312E-4	5.38826E-3	9.32932E-2	2.72684E1	-3.26867E1	-3.26146E1	2.67998E1					
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80024E1	-9.29832E-4	-8.79999E1	7.15256E-5	5.6982E-3	9.3317E-2	2.73051E1	-3.26518E1	-3.26428E1	2.67986E1	1.7368E-7	2.51552E-3	2.51552E-3	6.3514E-3	2.00325E-1
1.4E1	7.97E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80022E1	-9.29832E-4	-8.79999E1	5.72205E-4	5.81741E-3	9.30309E-2	2.72538E1	-3.26803E1	-3.26119E1	2.68058E1	1.73755E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.99456E-1
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80025E1	-4.76837E-4	-8.80002E1	4.29153E-4	5.38826E-3	9.30309E-2	2.73145E1	-3.26644E1	-3.26331E1	2.68065E1	1.73605E-7	2.51739E-3	2.51739E-3	6.35601E-3	1.9968E-1
1.6E1	3.345E3	2.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80023E1	-8.58307E-4	-8.79999E1	5.72205E-4	5.29289E-3	9.30548E-2	2.73492E1	-3.2645E1	-3.26297E1	2.67857E1	1.73605E-7	2.51096E-3	2.51096E-3	6.2645E-3	1.9985E-1
1.7E1	4.4015E4	3.1E1	6.87E2	4.7E2	-7.30918E-2	-8.80022E1	-6.4373E-4	-8.79999E1	2.14577E-4	5.55515E-3	9.31263E-2	2.72915E1	-3.2695E1	-3.26614E1	2.68041E1	1.73681E-7	2.51804E-3	2.51804E-3	6.38041E-3	2.0064E-1
1.8E1	1.98328E5	1.08E2	7.27E2	5.0E2	-7.26282E-2	-8.80023E1	-8.34465E-4	-8.79998E1	3.33786E-4	5.24521E-3	9.34124E-2	2.73051E1	-3.26188E1	-3.26512E1	2.68052E1	1.73605E-7	2.51538E-3	2.51538E-3	6.28572E-3	1.98456E-1
1.9E1	2.554E3	1.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80023E1	-7.39098E-4	-8.8E1	1.90735E-4	5.22137E-3	9.3174E-2	2.73198E1	-3.26396E1	-3.26425E1	2.67523E1					
2.0E1	3.82E2	3.0E0	8.08E2	5.58E2	-7.27053E-2	-8.8002E1	-5.96046E-4	-8.80001E1	5.48363E-4	5.53131E-3	9.30071E-2	2.72709E1	-3.26675E1	-3.262E1	2.68484E1	1.73605E-7	2.51203E-3	2.51203E-3	6.3723E-3	1.97478E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80022E1	-5.96046E-4	-8.80001E1	2.86102E-4	5.26905E-3	9.3174E-2	2.73081E1	-3.26789E1	-3.26338E1	2.67806E1	1.73831E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.97731E-1
2.2E1	5.6E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80023E1	-4.76837E-4	-8.80005E1	4.05312E-4	5.53131E-3	9.32217E-2	2.73207E1	-3.27095E1	-3.26272E1	2.67937E1	1.73605E-7	2.51334E-3	2.51334E-3	6.25284E-3	1.98419E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80023E1	-6.91414E-4	-8.80002E1	2.86102E-4	5.48363E-3	9.31978E-2	2.73045E1	-3.26654E1	-3.26092E1	2.67625E1	1.73605E-7	2.51334E-3	2.51334E-3	6.35692E-3	1.98419E-1