[Scan]
initial_time=2016-02-16T00:19:17
final_time=2016-02-16T00:19:36
ip_count=19
run=1030
dataset=3
scan=197
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79912E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.83637E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=4.28307E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.65962E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.04532E-10
mult1=-1.02581E-8
mult2=-2.81442E-9
rf_tmon=-4.77679E-3
rf_agc=3.33516E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.23646E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62256E0
bslens_imon=2.70253E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20456E1
lens5a_imon=2.00244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12437E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.05983E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.0205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=2.22082E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04245E0
lens1_imon=1.63009E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65017E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03472E1
cs_ea2_imon=1.59505E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8404E1
cs_ef1a_imon=3.00937E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.79097E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=2.87855E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15919E1
os_ea1_imon=1.92351E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63443E1
os_ef1bup_imon=3.10632E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20668E0
cs_ionrep_imon=1.25739E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02109E1
cs_anode1_imon=3.25372E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=7.35962E-10
tplens_vset=1.4E-1
tplens_vmon=1.54587E0
tplens_imon=-4.05069E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2599E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.5678E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98689E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=3.96216E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22024E0
ionrepsh_imon=1.97342E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34124E1
lens5b_imon=2.20808E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74195E1
cs_ef2b_imon=3.10379E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.00304E-1
os_ea2_imon=-5.8204E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61077E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64388E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=2.8735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.28973E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01629E1
cs_anode2_imon=2.2911E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.07188E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.91849E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.83047E-1
olens1_imon=3.3958E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.04128E-1
window_imon=-1.1635E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86458E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92594E3
multa_neg_imon=7.8099E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=7.32854E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.32854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.9164E0
defgridb_imon=6.37644E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33984E1
os_fil1_imon=4.87233E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.42514E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65646E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=1.0084E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62558E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65729E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02798E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23872E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.14823E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-1.99323E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22449E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.39408E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.85721E-1
res40_imon=-2.68798E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2004E4	1.2E1	1.47E2	4.1E1	-7.39421E-2	-8.80023E1	-1.43051E-4	-8.80004E1	9.53674E-5	5.62668E-3	9.28402E-2	2.72933E1	-3.2685E1	-3.25865E1	2.68395E1	1.73605E-7	2.52099E-3	2.52099E-3	6.28006E-3	1.98937E-1
2.0E0	6.533E3	5.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80024E1	-2.6226E-4	-8.80004E1	-2.6226E-4	5.34058E-3	9.29356E-2	2.72622E1	-3.26627E1	-3.26566E1	2.68021E1	1.73605E-7	2.51417E-3	2.51417E-3	6.35601E-3	2.00363E-1
3.0E0	9.0E0	1.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80022E1	-9.53674E-5	-8.80002E1	-4.76837E-5	5.36442E-3	9.31025E-2	2.73057E1	-3.26738E1	-3.26284E1	2.68024E1	1.73605E-7	2.51581E-3	2.51581E-3	6.38041E-3	2.0064E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80025E1	-4.52995E-4	-8.80001E1	3.09944E-4	5.76973E-3	9.31501E-2	2.73167E1	-3.26695E1	-3.26492E1	2.68034E1	1.73605E-7	2.51814E-3	2.51814E-3	6.28103E-3	2.00064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80025E1	-2.86102E-4	-8.80001E1	4.05312E-4	5.45979E-3	9.34362E-2	2.73093E1	-3.26356E1	-3.26741E1	2.6813E1	1.73605E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.00192E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80024E1	-2.14577E-4	-8.79998E1	2.14577E-4	5.60284E-3	9.29594E-2	2.72775E1	-3.26735E1	-3.26428E1	2.68011E1	1.7368E-7	2.51771E-3	2.51771E-3	6.3514E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80026E1	4.76837E-5	-8.79996E1	3.09944E-4	5.62668E-3	9.32932E-2	2.72757E1	-3.26374E1	-3.2647E1	2.6852E1	1.73718E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80026E1	-3.33786E-4	-8.79999E1	7.15256E-4	5.31673E-3	9.30786E-2	2.72865E1	-3.26518E1	-3.2614E1	2.68082E1					
1.2E1	3.01E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80024E1	-5.00679E-4	-8.8E1	4.29153E-4	5.19753E-3	9.30786E-2	2.73021E1	-3.26561E1	-3.26344E1	2.67938E1	1.73755E-7	2.52099E-3	2.52099E-3	6.25827E-3	2.00151E-1
1.3E1	1.9E1	1.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80024E1	-3.33786E-4	-8.80001E1	1.90735E-4	5.19753E-3	9.31501E-2	2.73051E1	-3.26556E1	-3.26294E1	2.68261E1	1.73679E-7	2.50775E-3	2.50775E-3	6.25916E-3	1.9934E-1
1.4E1	7.8E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80024E1	-3.09944E-4	-8.79998E1	1.43051E-4	5.60284E-3	9.33647E-2	2.7297E1	-3.26634E1	-3.26491E1	2.67845E1	1.73605E-7	2.51814E-3	2.51814E-3	6.33919E-3	1.98727E-1
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80024E1	-1.66893E-4	-8.79997E1	0.0E0	5.53131E-3	9.30309E-2	2.73099E1	-3.26627E1	-3.26206E1	2.67662E1	1.73683E-7	2.51725E-3	2.51725E-3	6.39335E-3	2.00064E-1
1.6E1	3.356E3	4.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80022E1	-4.29153E-4	-8.80001E1	-1.19209E-4	5.60284E-3	9.33647E-2	2.72981E1	-3.26741E1	-3.26162E1	2.67619E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3957E-3	1.99977E-1
1.7E1	4.4344E4	2.1E1	6.87E2	4.7E2	-7.30146E-2	-8.80024E1	-3.57628E-4	-8.8E1	1.19209E-4	5.53131E-3	9.3627E-2	2.73394E1	-3.26659E1	-3.26011E1	2.6797E1	1.73676E-7	2.51679E-3	2.51679E-3	6.40155E-3	2.006E-1
1.8E1	1.9894E5	1.14E2	7.27E2	5.0E2	-7.23964E-2	-8.80024E1	4.76837E-5	-8.80001E1	-4.76837E-5	5.31673E-3	9.34601E-2	2.73253E1	-3.26548E1	-3.26493E1	2.67583E1	1.73605E-7	2.51758E-3	2.51758E-3	6.3657E-3	2.0057E-1
1.9E1	2.559E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80025E1	-3.57628E-4	-8.79998E1	1.43051E-4	5.6982E-3	9.32932E-2	2.73275E1	-3.27233E1	-3.26313E1	2.68058E1	1.7368E-7	2.51662E-3	2.51662E-3	6.37905E-3	1.98937E-1
2.0E1	4.06E2	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80026E1	-2.38419E-4	-8.79999E1	-4.76837E-5	5.96046E-3	9.32693E-2	2.73316E1	-3.26349E1	-3.26307E1	2.68184E1	1.7368E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80026E1	-2.6226E-4	-8.79999E1	2.38419E-4	5.55515E-3	9.31978E-2	2.73308E1	-3.26505E1	-3.26315E1	2.67788E1	1.73753E-7	2.51632E-3	2.51632E-3	6.33977E-3	1.98491E-1
2.2E1	5.5E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80024E1	-7.15256E-4	-8.80001E1	2.86102E-4	5.53131E-3	9.30786E-2	2.73068E1	-3.26585E1	-3.25988E1	2.67734E1	1.73605E-7	2.51007E-3	2.51007E-3	6.37351E-3	1.9911E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80025E1	-9.53674E-5	-8.80003E1	3.09944E-4	5.24521E-3	9.30548E-2	2.72883E1	-3.26651E1	-3.2599E1	2.68184E1	1.73605E-7	2.51632E-3	2.51632E-3	6.39408E-3	1.9951E-1