[Scan]
initial_time=2016-02-16T00:19:43
final_time=2016-02-16T00:20:03
ip_count=19
run=1030
dataset=3
scan=198
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.78405E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.00088E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=3.76153E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.70993E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=7.60984E-10
mult1=-9.25445E-9
mult2=-2.72396E-9
rf_tmon=-4.33796E-3
rf_agc=3.39711E-2
counter1=2
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=3.83866E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63554E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20355E1
lens5a_imon=2.02686E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=3.02631E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.0256E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=2.2102E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02829E0
lens1_imon=1.48144E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=3.00757E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0415E1
cs_ea2_imon=1.53807E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.99964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=3.89981E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11778E1
os_restr1_imon=2.89224E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15311E1
os_ea1_imon=1.92917E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=1.24147E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91825E2
cs_nozzle_imon=1.93682E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.2357E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=7.25377E-10
tplens_vset=1.4E-1
tplens_vmon=1.63376E0
tplens_imon=-3.69675E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26364E1
iondef3_imon=1.52108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26376E1
iondef2_imon=1.56709E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98594E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.09734E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29398E0
ionrepsh_imon=2.00456E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33085E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.51035E-1
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.19029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.57894E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.33153E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.87674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23106E2
cs_ionfoca_imon=6.33184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02055E1
cs_anode2_imon=2.2911E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73296E1
iondef1_imon=1.04786E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.87566E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.01266E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09951E0
cs_ionaccel_imon=-1.93475E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.92931E-6
window_vset=0.0E0
window_vmon=2.4197E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.3898E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-3.45401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=8.48946E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93678E3
defgrida_imon=6.38706E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.67894E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64474E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33972E1
os_fil1_imon=4.84229E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.58732E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6594E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30835E1
cs_fil1_imon=1.00892E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62516E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65653E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.19978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8078E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22453E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.98491E-1
chamber_ion_pmon=1.73975E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.16065E-1
res40_imon=-2.67717E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2314E4	1.4E1	1.47E2	4.1E1	-7.37874E-2	-8.80025E1	-4.52995E-4	-8.80001E1	2.14577E-4	5.50747E-3	9.30548E-2	2.73134E1	-3.26018E1	-3.26838E1	2.67578E1	1.73755E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.00151E-1
2.0E0	6.641E3	5.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80027E1	-4.29153E-4	-8.80001E1	5.24521E-4	5.67436E-3	9.26495E-2	2.72919E1	-3.27179E1	-3.259E1	2.67698E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.9951E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80026E1	-4.29153E-4	-8.8E1	0.0E0	5.26905E-3	9.28164E-2	2.73177E1	-3.26957E1	-3.2608E1	2.67812E1	1.73605E-7	2.51225E-3	2.51225E-3	6.26916E-3	1.98937E-1
4.0E0	0.0E0	1.0E0	6.55E2	3.98E2	-7.47149E-2	-8.80023E1	-6.4373E-4	-8.80002E1	2.38419E-4	5.53131E-3	9.2864E-2	2.7254E1	-3.26975E1	-3.26116E1	2.67992E1	1.73753E-7	2.52384E-3	2.52384E-3	6.28592E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.44831E-2	-8.80023E1	-6.4373E-4	-8.8E1	2.38419E-4	5.74589E-3	9.35316E-2	2.73493E1	-3.26779E1	-3.26331E1	2.68012E1	1.73605E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.98075E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80026E1	-4.05312E-4	-8.80003E1	4.76837E-5	6.1512E-3	9.36031E-2	2.72474E1	-3.27354E1	-3.26326E1	2.67901E1	1.73679E-7	2.51954E-3	2.51954E-3	6.34518E-3	1.98322E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80025E1	-2.86102E-4	-8.80002E1	2.38419E-5	5.79357E-3	9.32455E-2	2.73231E1	-3.26549E1	-3.262E1	2.67816E1	1.73605E-7	2.51804E-3	2.51804E-3	6.26289E-3	1.97119E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80026E1	-3.09944E-4	-8.8E1	2.38419E-5	5.57899E-3	9.2864E-2	2.73122E1	-3.26927E1	-3.2606E1	2.68112E1	1.73753E-7	2.51417E-3	2.51417E-3	6.36144E-3	1.97815E-1
1.2E1	3.3E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80025E1	-1.43051E-4	-8.80002E1	2.38419E-5	5.60284E-3	9.31263E-2	2.72903E1	-3.26838E1	-3.25747E1	2.67902E1	1.73755E-7	2.5188E-3	2.5188E-3	6.34588E-3	1.98592E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80026E1	-3.33786E-4	-8.80003E1	1.66893E-4	5.43594E-3	9.31978E-2	2.73135E1	-3.26765E1	-3.26398E1	2.6789E1	1.73605E-7	2.51739E-3	2.51739E-3	6.25382E-3	1.9985E-1
1.4E1	8.16E2	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80024E1	-8.10623E-4	-8.80001E1	7.15256E-5	5.88894E-3	9.31978E-2	2.73123E1	-3.26837E1	-3.2635E1	2.6807E1	1.73605E-7	2.51443E-3	2.51443E-3	6.34588E-3	2.00673E-1
1.5E1	8.0E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80023E1	-5.96046E-4	-8.8E1	1.90735E-4	5.76973E-3	9.33647E-2	2.73405E1	-3.26332E1	-3.26615E1	2.67723E1	1.7368E-7	2.50789E-3	2.50789E-3	6.29098E-3	2.00847E-1
1.6E1	3.305E3	2.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80023E1	-7.15256E-4	-8.79999E1	2.38419E-4	5.81741E-3	9.33886E-2	2.73163E1	-3.26431E1	-3.26124E1	2.6801E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00192E-1
1.7E1	4.4479E4	1.8E1	6.87E2	4.7E2	-7.34782E-2	-8.80024E1	-1.19209E-4	-8.79999E1	7.15256E-5	5.4121E-3	9.33409E-2	2.73057E1	-3.26873E1	-3.2623E1	2.68028E1	1.73755E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.00325E-1
1.8E1	1.99699E5	1.14E2	7.27E2	5.0E2	-7.33239E-2	-8.80025E1	-4.29153E-4	-8.8E1	1.43051E-4	5.45979E-3	9.30071E-2	2.72668E1	-3.2639E1	-3.26862E1	2.67746E1	1.73679E-7	2.51525E-3	2.51525E-3	6.35059E-3	2.00021E-1
1.9E1	2.577E3	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80025E1	-2.86102E-4	-8.80001E1	2.38419E-5	5.57899E-3	9.31978E-2	2.72967E1	-3.26735E1	-3.26374E1	2.67715E1	1.73679E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.9968E-1
2.0E1	3.62E2	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80026E1	-2.6226E-4	-8.80002E1	1.90735E-4	5.45979E-3	9.31025E-2	2.72915E1	-3.26296E1	-3.2649E1	2.67752E1	1.73681E-7	2.51136E-3	2.51136E-3	6.35223E-3	1.99224E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80025E1	-4.29153E-4	-8.80001E1	2.6226E-4	5.48363E-3	9.31978E-2	2.73628E1	-3.26675E1	-3.26404E1	2.68118E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9883E-1
2.2E1	5.8E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80024E1	-4.29153E-4	-8.8E1	-9.53674E-5	5.4121E-3	9.31263E-2	2.73045E1	-3.26313E1	-3.26602E1	2.6813E1	1.73755E-7	2.51443E-3	2.51443E-3	6.34588E-3	1.99283E-1
2.3E1	2.0E0	1.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80023E1	-2.86102E-4	-8.8E1	1.90735E-4	5.14984E-3	9.31263E-2	2.73296E1	-3.26376E1	-3.26364E1	2.68166E1	1.73975E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.98491E-1