[Scan]
initial_time=2016-02-16T00:21:03
final_time=2016-02-16T00:21:23
ip_count=19
run=1030
dataset=3
scan=201
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.80234E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.6715E-10
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=4.0158E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.63871E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=7.48956E-10
mult1=-1.14742E-8
mult2=-2.76253E-9
rf_tmon=-3.53308E-3
rf_agc=3.42649E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.03786E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62669E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2009E1
lens5a_imon=2.01624E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53314E1
cs_ef1b_imon=3.01345E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02309E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05136E1
cs_ea1_imon=2.22188E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0395E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64591E1
os_ef1alow_imon=2.9992E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.56674E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84E1
cs_ef1a_imon=2.9926E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.22263E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10816E1
os_restr1_imon=2.85741E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=1.91148E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63606E1
os_ef1bup_imon=3.10902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25918E0
cs_ionrep_imon=1.25421E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93278E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02209E1
cs_anode1_imon=3.27583E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=7.14624E-10
tplens_vset=1.4E-1
tplens_vmon=1.6084E0
tplens_imon=1.96596E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26458E1
iondef3_imon=1.49135E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.57099E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98838E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.94821E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30991E0
ionrepsh_imon=1.98899E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74478E1
cs_ef2b_imon=3.09998E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.60474E-1
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00747E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71101E1
cs_ef2a_imon=3.18721E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61581E0
os_ef2alow_imon=-2.30699E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.24251E-1
os_ef2bup_imon=-5.16712E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10289E1
os_restr2_imon=2.87027E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01531E1
cs_anode2_imon=2.31214E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.11015E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.08642E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.90347E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.0818E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14983E0
cs_ionaccel_imon=-1.7996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56179E1
einzel_imon=7.46542E-6
window_vset=0.0E0
window_vmon=2.19423E-1
window_imon=-7.74401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.85956E1
mask2_imon=-7.11847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.48781E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93761E3
defgrida_imon=6.65605E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=6.91443E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27268E0
defgridb_imon=6.27026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33991E1
os_fil1_imon=5.75251E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.58281E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65781E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30771E1
cs_fil1_imon=1.00751E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63768E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6549E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.33324E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.01458E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96093E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31649E-1
cs_fil2_imon=-2.44909E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22375E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.26371E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.69835E-1
res40_imon=-2.54331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2307E4	1.3E1	1.47E2	4.1E1	-7.43285E-2	-8.80027E1	-4.76837E-4	-8.79999E1	4.76837E-5	6.10352E-3	9.29594E-2	2.7367E1	-3.26537E1	-3.26419E1	2.68406E1	1.73753E-7	2.50989E-3	2.50989E-3	6.39408E-3	1.9934E-1
2.0E0	6.484E3	9.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80029E1	-6.91414E-4	-8.8E1	-1.19209E-4	5.62668E-3	9.32455E-2	2.73277E1	-3.26627E1	-3.26597E1	2.67686E1	1.73605E-7	2.51443E-3	2.51443E-3	6.26371E-3	1.9911E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.80024E1	-4.76837E-4	-8.79999E1	1.19209E-4	5.48363E-3	9.32693E-2	2.72961E1	-3.26404E1	-3.2629E1	2.6771E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.00151E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.47923E-2	-8.80024E1	-4.05312E-4	-8.79998E1	3.09944E-4	5.84126E-3	9.29117E-2	2.73145E1	-3.26791E1	-3.26331E1	2.68154E1	1.7368E-7	2.5188E-3	2.5188E-3	6.39014E-3	2.00673E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.48695E-2	-8.80026E1	-7.39098E-4	-8.79998E1	-2.14577E-4	5.67436E-3	9.31025E-2	2.72979E1	-3.26957E1	-3.26062E1	2.6798E1	1.73679E-7	2.51417E-3	2.51417E-3	6.23252E-3	2.00021E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.80023E1	-1.90735E-4	-8.79998E1	3.09944E-4	5.84126E-3	9.31978E-2	2.72998E1	-3.26927E1	-3.26142E1	2.67662E1	1.73755E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.47923E-2	-8.80023E1	-4.29153E-4	-8.79997E1	-9.53674E-5	5.60284E-3	9.28879E-2	2.73027E1	-3.26189E1	-3.26502E1	2.67671E1	1.73605E-7	2.50898E-3	2.50898E-3	6.36244E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.45602E-2	-8.80025E1	-7.15256E-4	-8.8E1	1.66893E-4	5.19753E-3	9.31263E-2	2.73063E1	-3.2675E1	-3.26389E1	2.67599E1	1.73679E-7	2.50882E-3	2.50882E-3	6.2645E-3	1.9917E-1
1.2E1	3.17E2	0.0E0	4.85E2	3.23E2	-7.51788E-2	-8.80022E1	-8.34465E-4	-8.79996E1	1.90735E-4	5.19753E-3	9.29356E-2	2.72709E1	-3.2698E1	-3.25995E1	2.67899E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98075E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.50241E-2	-8.80026E1	-7.86781E-4	-8.79997E1	2.14577E-4	5.36442E-3	9.3174E-2	2.73363E1	-3.26132E1	-3.26352E1	2.67806E1	1.73827E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.98322E-1
1.4E1	7.06E2	1.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80028E1	-8.10623E-4	-8.79997E1	5.96046E-4	5.67436E-3	9.2864E-2	2.72927E1	-3.26366E1	-3.27528E1	2.67938E1	1.73718E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.97817E-1
1.5E1	8.3E1	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80023E1	-7.39098E-4	-8.79997E1	3.33786E-4	5.29289E-3	9.30309E-2	2.73141E1	-3.26663E1	-3.26128E1	2.67704E1					
1.6E1	3.35E3	0.0E0	6.47E2	4.41E2	-7.44831E-2	-8.80023E1	-6.19888E-4	-8.80001E1	2.86102E-4	5.07832E-3	9.32217E-2	2.72947E1	-3.26915E1	-3.2566E1	2.67565E1	1.73681E-7	2.52027E-3	2.52027E-3	6.29624E-3	1.97994E-1
1.7E1	4.3678E4	1.7E1	6.87E2	4.7E2	-7.25507E-2	-8.80023E1	-7.39098E-4	-8.80003E1	2.86102E-4	5.24521E-3	9.29832E-2	2.72979E1	-3.2641E1	-3.26194E1	2.68238E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.9911E-1
1.8E1	1.98388E5	1.26E2	7.27E2	5.0E2	-7.25507E-2	-8.80023E1	-6.19888E-4	-8.80001E1	4.76837E-4	5.57899E-3	9.32693E-2	2.73153E1	-3.26476E1	-3.26404E1	2.67896E1	1.73755E-7	2.51552E-3	2.51552E-3	6.3514E-3	2.00151E-1
1.9E1	2.487E3	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80023E1	-7.86781E-4	-8.80002E1	2.38419E-4	5.43594E-3	9.30548E-2	2.73063E1	-3.26691E1	-3.26508E1	2.68208E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00325E-1
2.0E1	3.93E2	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80023E1	-5.00679E-4	-8.80002E1	3.09944E-4	5.19753E-3	9.31025E-2	2.72721E1	-3.26396E1	-3.26278E1	2.68304E1	1.7368E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9963E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80024E1	-5.96046E-4	-8.8E1	1.90735E-4	5.17368E-3	9.31501E-2	2.72865E1	-3.26885E1	-3.25954E1	2.6792E1	1.73605E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.9985E-1
2.2E1	4.8E1	0.0E0	8.89E2	6.17E2	-7.45602E-2	-8.80023E1	-7.39098E-4	-8.80001E1	1.19209E-4	5.4121E-3	9.3174E-2	2.72302E1	-3.26337E1	-3.27169E1	2.68053E1	1.73605E-7	2.52169E-3	2.52169E-3	6.35059E-3	1.9934E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80023E1	-1.19209E-4	-8.79998E1	3.09944E-4	5.24521E-3	9.34124E-2	2.73069E1	-3.26549E1	-3.26458E1	2.67902E1	1.73605E-7	2.51116E-3	2.51116E-3	6.26371E-3	1.9963E-1