[Scan]
initial_time=2016-02-16T00:21:30
final_time=2016-02-16T00:21:49
ip_count=19
run=1030
dataset=3
scan=202
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.92706E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.71036E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=3.66795E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.63676E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=7.70772E-10
mult1=-9.83176E-9
mult2=-2.8008E-9
rf_tmon=-6.34777E-3
rf_agc=3.19178E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=3.93009E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63436E0
bslens_imon=2.58219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.9858E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.04874E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.05478E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05265E1
cs_ea1_imon=2.20489E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99231E0
lens1_imon=1.29385E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63821E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04321E1
cs_ea2_imon=1.56568E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84773E1
cs_ef1a_imon=3.03099E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.01819E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10739E1
os_restr1_imon=2.85476E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=1.90794E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64038E1
os_ef1bup_imon=3.10848E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=1.25881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01437E1
cs_anode1_imon=3.23606E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=7.82168E-10
tplens_vset=1.4E-1
tplens_vmon=1.64733E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26744E1
iondef3_imon=1.50551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26527E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.9848E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.17757E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=2.00102E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.20702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74952E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.42777E-1
os_ea2_imon=-4.617E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70477E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.68946E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.18737E-1
os_ef2bup_imon=-5.49186E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=2.88503E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23018E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.28822E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73515E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6797E1
iondef4_imon=1.11296E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.90945E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=3.1327E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.03704E0
cs_ionaccel_imon=-2.15459E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02134E2
cs_ionfocb_imon=1.47641E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.44277E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-7.63461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82577E2
mask1_imon=2.38832E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-4.355E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.63647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.9746E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50164E3
multb_neg_imon=7.51613E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52958E0
defgridb_imon=6.19593E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33981E1
os_fil1_imon=5.61715E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.41312E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66067E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30796E1
cs_fil1_imon=1.00756E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62288E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65487E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07863E-2
os_fil2_imon=-2.2395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.86051E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.92929E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.92425E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22381E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.2557E-3
inlet_lpb_pmon=1.98465E-1
chamber_ion_pmon=1.73676E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.2147E-1
res40_imon=-2.89701E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2055E4	8.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80024E1	-3.8147E-4	-8.80001E1	1.43051E-4	5.19753E-3	9.29356E-2	2.73261E1	-3.265E1	-3.26374E1	2.67722E1	1.73753E-7	2.51525E-3	2.51525E-3	6.33977E-3	1.9917E-1
2.0E0	6.646E3	4.0E0	3.16E2	1.6E2	-7.43285E-2	-8.80025E1	-5.48363E-4	-8.8E1	3.09944E-4	5.17368E-3	9.2864E-2	2.73057E1	-3.26356E1	-3.26242E1	2.68124E1	1.7368E-7	2.5199E-3	2.5199E-3	6.26371E-3	1.98419E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.80024E1	-4.76837E-4	-8.8E1	1.66893E-4	5.4121E-3	9.2721E-2	2.72986E1	-3.2652E1	-3.25888E1	2.68226E1	1.73831E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.46377E-2	-8.80024E1	-3.8147E-4	-8.80001E1	3.8147E-4	5.45979E-3	9.29594E-2	2.72921E1	-3.26714E1	-3.25894E1	2.67984E1	1.73755E-7	2.51662E-3	2.51662E-3	6.38459E-3	1.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.46377E-2	-8.80024E1	-1.90735E-4	-8.79999E1	2.14577E-4	5.74589E-3	9.29356E-2	2.73009E1	-3.26512E1	-3.26543E1	2.67764E1	1.73679E-7	2.52276E-3	2.52276E-3	6.32356E-3	1.9968E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.80024E1	-2.38419E-4	-8.80002E1	4.76837E-5	5.57899E-3	9.29117E-2	2.72654E1	-3.26404E1	-3.25809E1	2.67992E1	1.7368E-7	2.51662E-3	2.51662E-3	6.26916E-3	2.00847E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.48695E-2	-8.80022E1	-3.57628E-4	-8.80003E1	1.90735E-4	5.57899E-3	9.28164E-2	2.73598E1	-3.26711E1	-3.26254E1	2.68785E1	1.73605E-7	2.51203E-3	2.51203E-3	6.28056E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.48695E-2	-8.8002E1	-2.38419E-4	-8.79998E1	-9.53674E-5	5.43594E-3	9.27687E-2	2.72853E1	-3.27011E1	-3.26296E1	2.67662E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00325E-1
1.2E1	3.03E2	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80019E1	-2.38419E-4	-8.79999E1	2.38419E-4	5.4121E-3	9.31025E-2	2.72935E1	-3.26631E1	-3.25918E1	2.68244E1	1.7368E-7	2.52318E-3	2.52318E-3	6.35692E-3	2.00673E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.80021E1	-3.8147E-4	-8.80001E1	1.19209E-4	5.45979E-3	9.30071E-2	2.73252E1	-3.26738E1	-3.2629E1	2.68617E1	1.73605E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.00363E-1
1.4E1	7.79E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80022E1	-6.4373E-4	-8.80001E1	4.52995E-4	5.6982E-3	9.30309E-2	2.74108E1	-3.27726E1	-3.26122E1	2.67989E1	1.73679E-7	2.51417E-3	2.51417E-3	6.38318E-3	1.9968E-1
1.5E1	7.4E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80023E1	-3.57628E-4	-8.80001E1	1.90735E-4	5.43594E-3	9.31263E-2	2.73273E1	-3.26332E1	-3.26212E1	2.67998E1	1.73679E-7	2.5131E-3	2.5131E-3	6.3723E-3	1.98661E-1
1.6E1	3.216E3	1.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80022E1	-2.86102E-4	-8.80001E1	1.43051E-4	5.67436E-3	9.32455E-2	2.72662E1	-3.26555E1	-3.26048E1	2.68448E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98937E-1
1.7E1	4.3938E4	1.9E1	6.87E2	4.7E2	-7.30918E-2	-8.8002E1	-3.8147E-4	-8.80003E1	-4.76837E-5	5.93662E-3	9.30071E-2	2.73143E1	-3.26689E1	-3.26113E1	2.67668E1	1.73679E-7	2.51739E-3	2.51739E-3	6.28592E-3	1.99E-1
1.8E1	1.98095E5	1.19E2	7.27E2	5.0E2	-7.24736E-2	-8.80021E1	-3.8147E-4	-8.80001E1	2.6226E-4	5.24521E-3	9.31978E-2	2.72903E1	-3.27104E1	-3.25735E1	2.68202E1	1.73681E-7	2.52473E-3	2.52473E-3	6.24075E-3	1.98872E-1
1.9E1	2.557E3	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80022E1	-2.6226E-4	-8.80001E1	1.43051E-4	5.10216E-3	9.31978E-2	2.72678E1	-3.26759E1	-3.26098E1	2.6807E1	1.73605E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.9917E-1
2.0E1	3.9E2	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80022E1	-5.24521E-4	-8.79998E1	2.6226E-4	5.4121E-3	9.32693E-2	2.73476E1	-3.26756E1	-3.26354E1	2.67716E1	1.7368E-7	2.52318E-3	2.52318E-3	6.40126E-3	1.98937E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80021E1	-4.76837E-4	-8.80001E1	2.86102E-4	5.43594E-3	9.31501E-2	2.72498E1	-3.27263E1	-3.26086E1	2.68157E1	1.73679E-7	2.51632E-3	2.51632E-3	6.35601E-3	1.98661E-1
2.2E1	5.6E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80022E1	-6.67572E-4	-8.80001E1	2.6226E-4	5.62668E-3	9.31263E-2	2.73292E1	-3.26797E1	-3.26506E1	2.68024E1	1.73605E-7	2.51662E-3	2.51662E-3	6.26916E-3	1.98937E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80022E1	-2.38419E-4	-8.8E1	3.33786E-4	5.26905E-3	9.31025E-2	2.73515E1	-3.26527E1	-3.26744E1	2.6797E1	1.73676E-7	2.5199E-3	2.5199E-3	6.2557E-3	1.98465E-1