[Scan]
initial_time=2016-02-16T00:21:56
final_time=2016-02-16T00:22:16
ip_count=19
run=1030
dataset=3
scan=203
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.86505E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-5.86319E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=4.0077E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.66538E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=7.79796E-10
mult1=-9.94858E-9
mult2=-2.8526E-9
rf_tmon=-4.3443E-3
rf_agc=3.31498E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=4.09889E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19647E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04881E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53294E1
cs_ef1b_imon=3.03515E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02425E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=2.21657E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04481E0
lens1_imon=1.50975E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65378E1
os_ef1alow_imon=2.98172E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04121E1
cs_ea2_imon=1.56108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83931E1
cs_ef1a_imon=3.02135E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.11272E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11294E1
os_restr1_imon=2.88406E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14775E1
os_ea1_imon=1.88812E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63768E1
os_ef1bup_imon=3.08045E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=1.24713E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93678E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01868E1
cs_anode1_imon=3.26551E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=7.32052E-10
tplens_vset=1.4E-1
tplens_vmon=1.58775E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.47224E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26667E1
iondef2_imon=1.59789E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98636E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.59213E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28336E0
ionrepsh_imon=1.9805E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34183E1
lens5b_imon=2.21339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7436E1
cs_ef2b_imon=3.10238E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54575E-1
os_ea2_imon=-4.12148E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71317E1
cs_ef2a_imon=3.18766E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60921E0
os_ef2alow_imon=-2.48164E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.68723E-1
os_ef2bup_imon=-5.33716E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=2.87309E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23099E2
cs_ionfoca_imon=6.3276E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.26908E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72992E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.08158E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71792E1
olens3_imon=1.90846E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.83E-1
olens1_imon=3.35717E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10478E0
cs_ionaccel_imon=-1.71026E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47042E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56299E1
einzel_imon=7.83292E-6
window_vset=0.0E0
window_vmon=1.86556E-1
window_imon=-8.57491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39155E-4
mask2_vset=0.0E0
mask2_vmon=-1.8655E1
mask2_imon=-5.99185E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.7233E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.16573E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33173E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33981E1
os_fil1_imon=4.98132E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68233E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6601E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3072E1
cs_fil1_imon=1.00724E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62431E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65391E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00265E-2
os_fil2_imon=-2.57915E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29551E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87614E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31749E-1
cs_fil2_imon=-2.32556E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30724E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22449E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.37645E-1
res40_imon=-2.45687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2101E4	1.1E1	1.47E2	4.1E1	-7.37103E-2	-8.80025E1	-1.38283E-3	-8.80001E1	2.38419E-5	5.36442E-3	9.27925E-2	2.72997E1	-3.26494E1	-3.26398E1	2.68118E1					
2.0E0	6.616E3	9.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80023E1	-5.24521E-4	-8.80001E1	9.53674E-5	5.74589E-3	9.2864E-2	2.73236E1	-3.26576E1	-3.26197E1	2.68044E1	1.7368E-7	2.51334E-3	2.51334E-3	6.34588E-3	1.9911E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80024E1	-6.91414E-4	-8.80001E1	2.38419E-5	5.55515E-3	9.2864E-2	2.72927E1	-3.2652E1	-3.25782E1	2.6748E1	1.73658E-7	2.51343E-3	2.51343E-3	6.29573E-3	2.00682E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80023E1	-4.05312E-4	-8.79998E1	2.38419E-4	5.4121E-3	9.29832E-2	2.72672E1	-3.26416E1	-3.26494E1	2.68052E1	1.73823E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.00231E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80024E1	-7.15256E-4	-8.80001E1	4.76837E-5	5.29289E-3	9.26733E-2	2.73387E1	-3.2647E1	-3.26416E1	2.67505E1	1.73605E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.01197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80024E1	-7.15256E-4	-8.80001E1	1.19209E-4	5.26905E-3	9.26733E-2	2.73387E1	-3.26402E1	-3.26531E1	2.68166E1	1.73605E-7	2.51552E-3	2.51552E-3	6.36797E-3	2.01022E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80025E1	-6.91414E-4	-8.79999E1	1.19209E-4	5.60284E-3	9.28402E-2	2.72919E1	-3.26567E1	-3.26182E1	2.6783E1	1.73605E-7	2.5188E-3	2.5188E-3	6.26371E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80025E1	-8.58307E-4	-8.79999E1	0.0E0	5.53131E-3	9.32932E-2	2.73039E1	-3.26759E1	-3.26116E1	2.68472E1	1.73605E-7	2.51334E-3	2.51334E-3	6.23114E-3	1.99803E-1
1.2E1	3.2E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80026E1	-6.67572E-4	-8.79998E1	-7.15256E-5	5.22137E-3	9.30548E-2	2.7288E1	-3.26664E1	-3.25819E1	2.6813E1	1.73605E-7	2.5131E-3	2.5131E-3	6.2752E-3	2.00534E-1
1.3E1	2.8E1	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80024E1	-5.96046E-4	-8.79999E1	1.43051E-4	5.50747E-3	9.3317E-2	2.73003E1	-3.26278E1	-3.26224E1	2.68082E1	1.73605E-7	2.51581E-3	2.51581E-3	6.23523E-3	1.9852E-1
1.4E1	7.63E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80026E1	-4.76837E-4	-8.80001E1	1.43051E-4	5.38826E-3	9.30071E-2	2.72945E1	-3.26077E1	-3.27587E1	2.6783E1	1.7368E-7	2.52099E-3	2.52099E-3	6.26371E-3	2.00499E-1
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80023E1	-5.96046E-4	-8.8E1	2.6226E-4	5.60284E-3	9.30071E-2	2.73045E1	-3.26144E1	-3.2604E1	2.67794E1	1.73605E-7	2.51334E-3	2.51334E-3	6.28006E-3	2.00325E-1
1.6E1	3.351E3	4.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80022E1	-5.72205E-4	-8.8E1	2.86102E-4	5.79357E-3	9.31978E-2	2.73039E1	-3.26838E1	-3.26136E1	2.68047E1	1.73605E-7	2.51552E-3	2.51552E-3	6.23656E-3	1.9963E-1
1.7E1	4.3867E4	1.9E1	6.87E2	4.7E2	-7.37874E-2	-8.80023E1	-4.05312E-4	-8.79999E1	-4.76837E-5	5.4121E-3	9.2864E-2	2.73357E1	-3.26897E1	-3.26452E1	2.67649E1	1.73605E-7	2.51417E-3	2.51417E-3	6.26985E-3	2.00021E-1
1.8E1	1.98885E5	8.3E1	7.27E2	5.0E2	-7.34782E-2	-8.80022E1	-4.05312E-4	-8.8E1	2.38419E-4	5.60284E-3	9.32455E-2	2.73387E1	-3.26921E1	-3.25688E1	2.68328E1	1.73831E-7	2.5188E-3	2.5188E-3	6.39014E-3	1.98937E-1
1.9E1	2.58E3	2.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80027E1	-6.67572E-4	-8.80004E1	9.53674E-5	5.48363E-3	9.33647E-2	2.73333E1	-3.26663E1	-3.2626E1	2.67848E1	1.73827E-7	2.51096E-3	2.51096E-3	6.33436E-3	1.9934E-1
2.0E1	3.62E2	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80025E1	-4.29153E-4	-8.79999E1	2.14577E-4	5.22137E-3	9.31263E-2	2.7311E1	-3.2649E1	-3.26231E1	2.68111E1	1.7368E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.98592E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80023E1	-5.96046E-4	-8.79999E1	2.38419E-5	5.38826E-3	9.30548E-2	2.72745E1	-3.2632E1	-3.26254E1	2.67814E1	1.73753E-7	2.51525E-3	2.51525E-3	6.24316E-3	1.98491E-1
2.2E1	4.4E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80025E1	-8.34465E-4	-8.79998E1	9.53674E-5	5.19753E-3	9.32455E-2	2.73357E1	-3.26164E1	-3.26909E1	2.67978E1	1.7368E-7	2.5188E-3	2.5188E-3	6.37905E-3	2.00151E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80028E1	-3.09944E-4	-8.80001E1	2.38419E-5	5.53131E-3	9.32217E-2	2.72992E1	-3.26667E1	-3.26242E1	2.67962E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.99283E-1