[Scan]
initial_time=2016-02-16T00:23:16
final_time=2016-02-16T00:23:36
ip_count=19
run=1030
dataset=3
scan=206
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.78806E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.57089E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=3.85737E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.68245E-9
ql4_vset=
ql4_vmon=-1.90735E-4
ql4_imon=7.82681E-10
mult1=-8.54292E-9
mult2=-2.49211E-9
rf_tmon=-6.49889E-3
rf_agc=3.11858E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=3.84903E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67419E0
bslens_imon=2.51722E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19755E1
lens5a_imon=1.99383E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05163E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.05226E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02147E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04939E1
cs_ea1_imon=2.22578E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02335E0
lens1_imon=1.29973E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64538E1
os_ef1alow_imon=2.98544E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03723E1
cs_ea2_imon=1.57711E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84108E1
cs_ef1a_imon=3.01333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.5553E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11356E1
os_restr1_imon=2.8677E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15135E1
os_ea1_imon=1.89254E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.09248E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2587E0
cs_ionrep_imon=1.26795E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93522E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01945E1
cs_anode1_imon=3.22806E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.48825E-10
tplens_vset=1.4E-1
tplens_vmon=1.57159E0
tplens_imon=-4.25886E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.48968E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2697E1
iondef2_imon=1.60087E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98319E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.3987E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27079E0
ionrepsh_imon=1.99218E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33723E1
lens5b_imon=2.19873E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74193E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.95258E-1
os_ea2_imon=-4.25886E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00593E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71285E1
cs_ef2a_imon=3.21898E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62759E0
os_ef2alow_imon=-2.57157E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52555E-1
os_ef2bup_imon=-5.24103E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=2.87873E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.31842E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01372E1
cs_anode2_imon=2.28483E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72837E1
iondef1_imon=1.11024E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.09119E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.90952E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=3.97944E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12041E0
cs_ionaccel_imon=-1.82879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47181E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56292E1
einzel_imon=7.51269E-6
window_vset=0.0E0
window_vmon=2.06411E-1
window_imon=-8.29774E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86474E1
mask2_imon=-4.69737E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92567E3
multa_neg_imon=7.46969E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.80651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.33112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32658E0
defgridb_imon=6.36768E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33984E1
os_fil1_imon=4.79064E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68282E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65768E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30849E1
cs_fil1_imon=1.00761E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63269E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65635E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02583E-2
os_fil2_imon=-2.48036E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.55107E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.05094E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33847E-1
cs_fil2_imon=-2.26413E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06594E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22424E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.37979E-1
res40_imon=-2.60401E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=243
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2077E4	1.1E1	1.47E2	4.1E1	-7.27053E-2	-8.80025E1	-9.53674E-4	-8.8E1	3.57628E-4	5.67436E-3	9.32932E-2	2.73159E1	-3.26616E1	-3.2605E1	2.67608E1	1.73672E-7	2.51203E-3	2.51203E-3	6.33211E-3	1.99751E-1
2.0E0	6.567E3	4.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80021E1	-9.53674E-4	-8.80003E1	1.90735E-4	5.60284E-3	9.30309E-2	2.72947E1	-3.26793E1	-3.26021E1	2.67866E1	1.73605E-7	2.51793E-3	2.51793E-3	6.37285E-3	1.99221E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80018E1	-9.05991E-4	-8.8E1	3.8147E-4	5.31673E-3	9.26971E-2	2.73263E1	-3.26915E1	-3.26231E1	2.6774E1	1.73605E-7	2.51581E-3	2.51581E-3	6.39738E-3	1.99401E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.8002E1	-6.67572E-4	-8.79998E1	1.90735E-4	5.38826E-3	9.28879E-2	2.72859E1	-3.2641E1	-3.26254E1	2.68053E1	1.73679E-7	2.51701E-3	2.51701E-3	6.29655E-3	2.00689E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80021E1	-5.72205E-4	-8.80001E1	0.0E0	5.24521E-3	9.29117E-2	2.72703E1	-3.26272E1	-3.26422E1	2.68034E1					
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.8002E1	-3.57628E-4	-8.79998E1	1.90735E-4	5.84126E-3	9.27448E-2	2.73219E1	-3.26469E1	-3.26393E1	2.68004E1	1.73677E-7	2.51287E-3	2.51287E-3	6.27052E-3	2.00399E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80021E1	-4.05312E-4	-8.79998E1	2.86102E-4	5.29289E-3	9.28402E-2	2.73105E1	-3.26693E1	-3.26014E1	2.68138E1	1.73677E-7	2.51393E-3	2.51393E-3	6.35514E-3	2.00903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.8002E1	-3.57628E-4	-8.79998E1	-1.90735E-4	5.48363E-3	9.32932E-2	2.73033E1	-3.26428E1	-3.26915E1	2.67926E1	1.7368E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.99803E-1
1.2E1	3.25E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80025E1	-7.15256E-4	-8.79998E1	-3.33786E-4	5.4121E-3	9.3174E-2	2.73131E1	-3.26554E1	-3.26168E1	2.68088E1	1.7368E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.00151E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80025E1	-5.72205E-4	-8.8E1	-9.53674E-5	5.17368E-3	9.2864E-2	2.7352E1	-3.26693E1	-3.26669E1	2.67836E1	1.73758E-7	2.51581E-3	2.51581E-3	6.32418E-3	1.99401E-1
1.4E1	7.57E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80024E1	-9.05991E-4	-8.8E1	7.15256E-5	5.74589E-3	9.32217E-2	2.73393E1	-3.26454E1	-3.26841E1	2.67856E1	1.73755E-7	2.5199E-3	2.5199E-3	6.24198E-3	1.98937E-1
1.5E1	7.7E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80025E1	-6.67572E-4	-8.80001E1	2.38419E-5	5.67436E-3	9.30309E-2	2.73484E1	-3.26489E1	-3.26406E1	2.67895E1	1.73676E-7	2.51783E-3	2.51783E-3	6.34907E-3	1.99447E-1
1.6E1	3.352E3	2.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80024E1	-2.38419E-4	-8.80006E1	4.76837E-5	5.4121E-3	9.3317E-2	2.73279E1	-3.26693E1	-3.26807E1	2.68587E1	1.73684E-7	2.51411E-3	2.51411E-3	6.28423E-3	1.991E-1
1.7E1	4.3774E4	2.3E1	6.87E2	4.7E2	-7.3401E-2	-8.80024E1	-5.24521E-4	-8.80002E1	3.09944E-4	5.38826E-3	9.29356E-2	2.73529E1	-3.26944E1	-3.26119E1	2.67775E1	1.7368E-7	2.51225E-3	2.51225E-3	6.34037E-3	1.98419E-1
1.8E1	1.97565E5	1.08E2	7.27E2	5.0E2	-7.30918E-2	-8.80022E1	-5.00679E-4	-8.8E1	7.15256E-5	5.6982E-3	9.31978E-2	2.73351E1	-3.26681E1	-3.26194E1	2.6792E1	1.73753E-7	2.52276E-3	2.52276E-3	6.29128E-3	1.97647E-1
1.9E1	2.503E3	1.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80023E1	-4.29153E-4	-8.80001E1	5.48363E-4	5.57899E-3	9.30309E-2	2.72935E1	-3.26591E1	-3.25985E1	2.67427E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3514E-3	1.96191E-1
2.0E1	3.88E2	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80024E1	-6.19888E-4	-8.80003E1	1.90735E-4	5.43594E-3	9.32693E-2	2.72679E1	-3.26944E1	-3.26136E1	2.67856E1	1.73605E-7	2.50898E-3	2.50898E-3	6.28006E-3	1.97216E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80023E1	-4.29153E-4	-8.8E1	1.90735E-4	5.36442E-3	9.30786E-2	2.73243E1	-3.2641E1	-3.26218E1	2.67956E1	1.73755E-7	2.51334E-3	2.51334E-3	6.36797E-3	1.97388E-1
2.2E1	5.3E1	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80023E1	-6.67572E-4	-8.80002E1	1.19209E-4	5.34058E-3	9.29117E-2	2.7326E1	-3.26851E1	-3.26532E1	2.68172E1	1.73605E-7	2.51417E-3	2.51417E-3	6.28592E-3	1.97815E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80023E1	-6.91414E-4	-8.8E1	-1.90735E-4	5.29289E-3	9.31263E-2	2.72837E1	-3.2697E1	-3.26236E1	2.68256E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9951E-1