[Scan]
initial_time=2016-02-16T00:23:43
final_time=2016-02-16T00:24:02
ip_count=19
run=1030
dataset=3
scan=207
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.81713E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-5.85592E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=3.95536E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.63727E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=7.68733E-10
mult1=-1.1402E-8
mult2=-3.99013E-9
rf_tmon=-1.83875E-3
rf_agc=3.57309E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.79837E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63249E0
bslens_imon=2.67114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19821E1
lens5a_imon=1.96469E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05248E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.00829E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.0206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.22208E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01071E0
lens1_imon=1.55721E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=3.00685E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.59482E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=2.98342E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=3.5466E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11033E1
os_restr1_imon=2.90161E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15438E1
os_ea1_imon=1.86339E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.06739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=1.26316E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93568E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=3.26417E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.24256E-10
tplens_vset=1.4E-1
tplens_vmon=1.64444E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26867E1
iondef3_imon=1.52236E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.28008E1
iondef2_imon=1.58436E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.96204E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=2.00074E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33303E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74363E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.10604E-1
os_ea2_imon=-3.31791E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62759E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.18737E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10691E1
os_restr2_imon=2.88035E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23109E2
cs_ionfoca_imon=6.31695E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02194E1
cs_anode2_imon=2.28029E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7394E1
iondef1_imon=1.11752E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68522E1
iondef4_imon=1.10612E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.80374E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.68524E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-2.03206E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0203E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.53647E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=8.01007E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.36621E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.28187E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64217E0
defgridb_imon=6.31214E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33989E1
os_fil1_imon=5.09457E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.69543E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65925E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3083E1
cs_fil1_imon=1.00717E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63285E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65609E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.15753E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99049E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22499E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.85411E-1
res40_imon=-2.73123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2232E4	1.4E1	1.47E2	4.1E1	-7.31692E-2	-8.80022E1	-8.34465E-4	-8.80001E1	2.6226E-4	5.26905E-3	9.33886E-2	2.72981E1	-3.26729E1	-3.25768E1	2.68012E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.98937E-1
2.0E0	6.582E3	5.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80021E1	-4.05312E-4	-8.8E1	4.76837E-5	5.38826E-3	9.34362E-2	2.72984E1	-3.26701E1	-3.26548E1	2.6816E1	1.73753E-7	2.52169E-3	2.52169E-3	6.35059E-3	1.9917E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80023E1	-5.24521E-4	-8.79999E1	9.53674E-5	5.10216E-3	9.32693E-2	2.73039E1	-3.26524E1	-3.26567E1	2.681E1	1.73605E-7	2.52139E-3	2.52139E-3	6.27954E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80021E1	-3.8147E-4	-8.79998E1	-1.43051E-4	5.22137E-3	9.29117E-2	2.72919E1	-3.26549E1	-3.26458E1	2.67968E1	1.7368E-7	2.51552E-3	2.51552E-3	6.38459E-3	1.9911E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80019E1	-4.76837E-4	-8.80002E1	5.48363E-4	5.65052E-3	9.30309E-2	2.72945E1	-3.26455E1	-3.25877E1	2.67956E1	1.73605E-7	2.51847E-3	2.51847E-3	6.26985E-3	1.9951E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80023E1	-3.57628E-4	-8.80002E1	3.33786E-4	5.43594E-3	9.33647E-2	2.73105E1	-3.26494E1	-3.25882E1	2.68052E1	1.7368E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80023E1	-4.76837E-4	-8.80001E1	3.57628E-4	5.65052E-3	9.30786E-2	2.73033E1	-3.26368E1	-3.26122E1	2.67986E1	1.73605E-7	2.51116E-3	2.51116E-3	6.3957E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80024E1	-4.52995E-4	-8.8E1	1.43051E-4	5.65052E-3	9.33409E-2	2.72823E1	-3.26753E1	-3.2614E1	2.67986E1	1.7368E-7	2.52538E-3	2.52538E-3	6.32936E-3	1.99803E-1
1.2E1	3.2E2	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80022E1	-3.33786E-4	-8.80003E1	1.43051E-4	5.74589E-3	9.31501E-2	2.72757E1	-3.26777E1	-3.25876E1	2.68274E1	1.7368E-7	2.51771E-3	2.51771E-3	6.23114E-3	1.98592E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80022E1	-5.48363E-4	-8.80005E1	1.90735E-4	5.65052E-3	9.2864E-2	2.73195E1	-3.26398E1	-3.26116E1	2.6816E1	1.73605E-7	2.51443E-3	2.51443E-3	6.26916E-3	1.99283E-1
1.4E1	7.76E2	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80021E1	-4.76837E-4	-8.80002E1	4.76837E-4	5.6982E-3	9.29117E-2	2.72486E1	-3.26008E1	-3.2626E1	2.67595E1	1.7368E-7	2.51116E-3	2.51116E-3	6.29645E-3	1.99977E-1
1.5E1	8.0E1	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80022E1	-2.6226E-4	-8.8E1	1.66893E-4	5.96046E-3	9.27925E-2	2.72943E1	-3.26272E1	-3.26404E1	2.67842E1	1.73753E-7	2.51847E-3	2.51847E-3	6.38318E-3	2.00192E-1
1.6E1	3.324E3	3.0E0	6.47E2	4.41E2	-7.48695E-2	-8.80024E1	-3.57628E-4	-8.80002E1	2.38419E-5	5.96046E-3	9.31263E-2	2.72219E1	-3.25824E1	-3.27587E1	2.68232E1	1.73681E-7	2.52027E-3	2.52027E-3	6.38041E-3	2.00818E-1
1.7E1	4.3777E4	1.9E1	6.87E2	4.7E2	-7.40967E-2	-8.80023E1	-5.24521E-4	-8.80001E1	2.14577E-4	5.88894E-3	9.30786E-2	2.73147E1	-3.26663E1	-3.26356E1	2.67674E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00534E-1
1.8E1	1.99099E5	1.13E2	7.27E2	5.0E2	-7.31692E-2	-8.80023E1	-5.96046E-4	-8.80001E1	1.43051E-4	5.57899E-3	9.32455E-2	2.73003E1	-3.265E1	-3.26428E1	2.67896E1	1.73605E-7	2.50898E-3	2.50898E-3	6.24198E-3	2.00673E-1
1.9E1	2.515E3	3.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80023E1	-5.72205E-4	-8.80004E1	4.52995E-4	5.62668E-3	9.29832E-2	2.72715E1	-3.26561E1	-3.26374E1	2.67662E1	1.7368E-7	2.52757E-3	2.52757E-3	6.30192E-3	1.99977E-1
2.0E1	3.83E2	3.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80027E1	-3.33786E-4	-8.80005E1	1.90735E-4	5.45979E-3	9.31263E-2	2.72889E1	-3.26663E1	-3.26302E1	2.67636E1	1.7368E-7	2.5188E-3	2.5188E-3	6.34588E-3	1.99977E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80025E1	-2.86102E-4	-8.80003E1	4.76837E-4	5.4121E-3	9.29117E-2	2.72797E1	-3.26514E1	-3.26349E1	2.67776E1	1.73679E-7	2.51376E-3	2.51376E-3	6.29113E-3	2.0043E-1
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80026E1	-4.05312E-4	-8.79998E1	3.57628E-4	5.88894E-3	9.28402E-2	2.72585E1	-3.26897E1	-3.2662E1	2.68388E1					
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80028E1	-2.6226E-4	-8.79999E1	3.09944E-4	5.55515E-3	9.30309E-2	2.7394E1	-3.28008E1	-3.26867E1	2.68522E1	1.73679E-7	2.52169E-3	2.52169E-3	6.33977E-3	2.00021E-1