[Scan]
initial_time=2016-02-16T00:24:09
final_time=2016-02-16T00:24:29
ip_count=19
run=1030
dataset=3
scan=208
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.42513E-2
qbias_imon=-3.7675E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.72169E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=3.84295E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.56003E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=7.8783E-10
mult1=-8.44723E-9
mult2=-2.55667E-9
rf_tmon=-7.84832E-3
rf_agc=3.02003E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.08888E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61961E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19488E1
lens5a_imon=1.97589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12545E2
lens4a_imon=2.05238E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=3.04473E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02486E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.051E1
cs_ea1_imon=2.19746E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03124E0
lens1_imon=1.58054E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04333E1
cs_ea2_imon=1.55824E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=3.03083E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=4.06528E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.86853E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15164E1
os_ea1_imon=1.89661E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63884E1
os_ef1bup_imon=3.11875E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22142E0
cs_ionrep_imon=1.24182E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93647E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02192E1
cs_anode1_imon=3.22057E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=7.17938E-10
tplens_vset=1.4E-1
tplens_vmon=1.65028E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25735E1
iondef3_imon=1.50834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26437E1
iondef2_imon=1.59505E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98813E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.34566E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=1.97766E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33852E1
lens5b_imon=2.19675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74455E1
cs_ef2b_imon=3.14481E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.239E-1
os_ea2_imon=-6.91762E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00771E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71229E1
cs_ef2a_imon=3.17435E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59322E0
os_ef2alow_imon=-2.22011E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67112E-1
os_ef2bup_imon=-5.00031E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10405E1
os_restr2_imon=2.86645E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0167E1
cs_anode2_imon=2.28469E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73275E1
iondef1_imon=1.11865E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67547E1
iondef4_imon=1.11283E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.89408E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=3.07918E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12087E0
cs_ionaccel_imon=-2.08805E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47535E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56672E1
einzel_imon=7.69479E-6
window_vset=0.0E0
window_vmon=2.20582E-1
window_imon=-9.09936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39011E-4
mask2_vset=0.0E0
mask2_vmon=-1.85649E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.44534E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.80471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50186E3
multb_neg_imon=6.73038E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.68903E0
defgridb_imon=6.31627E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33998E1
os_fil1_imon=5.544E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.43222E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66057E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=1.00748E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6247E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65276E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.57651E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35028E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.93056E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.51859E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36211E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22388E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28056E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.46291E-1
res40_imon=-2.64061E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2269E4	1.3E1	1.47E2	4.1E1	-7.30146E-2	-8.80023E1	-3.57628E-4	-8.80002E1	2.38419E-4	5.29289E-3	9.31263E-2	2.72898E1	-3.27198E1	-3.25723E1	2.678E1	1.73605E-7	2.51739E-3	2.51739E-3	6.25382E-3	1.98322E-1
2.0E0	6.534E3	2.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80023E1	-2.14577E-4	-8.80001E1	9.53674E-5	4.95911E-3	9.32217E-2	2.72873E1	-3.26554E1	-3.26168E1	2.67758E1	1.73605E-7	2.51525E-3	2.51525E-3	6.34518E-3	1.9934E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80023E1	-5.96046E-4	-8.79999E1	2.14577E-4	5.6982E-3	9.31025E-2	2.73353E1	-3.26937E1	-3.264E1	2.67937E1	1.73681E-7	2.5147E-3	2.5147E-3	6.28511E-3	1.99224E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80021E1	-5.48363E-4	-8.79999E1	2.86102E-4	5.45979E-3	9.30071E-2	2.73039E1	-3.26497E1	-3.25986E1	2.67932E1	1.73605E-7	2.51041E-3	2.51041E-3	6.36893E-3	1.9966E-1
5.0E0	1.0E0	1.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80022E1	-3.09944E-4	-8.80003E1	3.33786E-4	5.38826E-3	9.2864E-2	2.72779E1	-3.26654E1	-3.26254E1	2.68123E1	1.73605E-7	2.52179E-3	2.52179E-3	6.27901E-3	1.98446E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80023E1	-2.86102E-4	-8.80001E1	4.29153E-4	5.36442E-3	9.27925E-2	2.73068E1	-3.26521E1	-3.25936E1	2.68053E1	1.73605E-7	2.51709E-3	2.51709E-3	6.22341E-3	1.99729E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.8002E1	-3.33786E-4	-8.80002E1	3.57628E-4	5.53131E-3	9.29594E-2	2.73121E1	-3.2689E1	-3.26298E1	2.68257E1	1.73677E-7	2.51287E-3	2.51287E-3	6.31269E-3	1.98727E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80022E1	-4.76837E-4	-8.8E1	4.76837E-4	5.17368E-3	9.32217E-2	2.73222E1	-3.26508E1	-3.2626E1	2.67577E1	1.73605E-7	2.51384E-3	2.51384E-3	6.37032E-3	1.98984E-1
1.2E1	3.19E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80023E1	-5.24521E-4	-8.80003E1	1.43051E-4	5.36442E-3	9.33409E-2	2.73405E1	-3.26596E1	-3.2616E1	2.67692E1	1.73605E-7	2.51552E-3	2.51552E-3	6.36244E-3	1.99456E-1
1.3E1	2.0E1	1.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80026E1	-5.96046E-4	-8.80001E1	4.05312E-4	5.43594E-3	9.30548E-2	2.73027E1	-3.26891E1	-3.26669E1	2.67966E1	1.73679E-7	2.51954E-3	2.51954E-3	6.35059E-3	1.99E-1
1.4E1	7.55E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80025E1	-4.76837E-4	-8.79998E1	2.14577E-4	5.72205E-3	9.32932E-2	2.73315E1	-3.26627E1	-3.26567E1	2.6798E1	1.73605E-7	2.51771E-3	2.51771E-3	6.38459E-3	1.98419E-1
1.5E1	6.3E1	1.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80027E1	-4.76837E-5	-8.80001E1	1.19209E-4	5.60284E-3	9.31263E-2	2.72931E1	-3.26056E1	-3.26777E1	2.67986E1	1.73605E-7	2.51096E-3	2.51096E-3	6.3723E-3	1.99E-1
1.6E1	3.288E3	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80025E1	-6.19888E-4	-8.79997E1	9.53674E-5	5.36442E-3	9.28402E-2	2.73213E1	-3.26699E1	-3.26032E1	2.67481E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98764E-1
1.7E1	4.3939E4	2.2E1	6.87E2	4.7E2	-7.3401E-2	-8.80027E1	-5.72205E-4	-8.79999E1	1.43051E-4	5.43594E-3	9.30548E-2	2.73057E1	-3.26987E1	-3.26176E1	2.67009E1	1.73605E-7	2.51804E-3	2.51804E-3	6.26844E-3	1.98344E-1
1.8E1	1.96877E5	1.15E2	7.27E2	5.0E2	-7.17007E-2	-8.80025E1	-4.52995E-4	-8.8E1	2.38419E-5	5.10216E-3	9.30071E-2	2.73357E1	-3.26993E1	-3.262E1	2.67746E1	1.7368E-7	2.51771E-3	2.51771E-3	6.25827E-3	1.98419E-1
1.9E1	2.507E3	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80025E1	-5.24521E-4	-8.80001E1	2.38419E-4	5.43594E-3	9.30786E-2	2.72538E1	-3.26496E1	-3.26296E1	2.67677E1	1.73605E-7	2.51771E-3	2.51771E-3	6.36244E-3	1.98075E-1
2.0E1	3.89E2	1.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80024E1	-3.33786E-4	-8.80001E1	2.38419E-4	5.55515E-3	9.30786E-2	2.72853E1	-3.26428E1	-3.25828E1	2.67956E1	1.73605E-7	2.51632E-3	2.51632E-3	6.35059E-3	1.97815E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80024E1	-5.48363E-4	-8.80002E1	1.19209E-4	5.60284E-3	9.29356E-2	2.73529E1	-3.26862E1	-3.26272E1	2.6792E1	1.73679E-7	2.52169E-3	2.52169E-3	6.23784E-3	1.9934E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80025E1	-2.6226E-4	-8.8E1	1.19209E-4	5.57899E-3	9.29117E-2	2.7321E1	-3.26732E1	-3.26933E1	2.6789E1	1.73605E-7	2.51662E-3	2.51662E-3	6.36244E-3	1.99283E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.42513E-2	-8.80025E1	-4.52995E-4	-8.80001E1	-4.76837E-5	5.126E-3	9.30071E-2	2.73275E1	-3.26437E1	-3.25735E1	2.67547E1	1.73605E-7	2.5131E-3	2.5131E-3	6.28056E-3	2.00705E-1