[Scan]
initial_time=2016-02-16T00:25:29
final_time=2016-02-16T00:25:49
ip_count=19
run=1030
dataset=3
scan=211
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.82709E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.57864E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=3.6298E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.54792E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=7.6431E-10
mult1=-1.02341E-8
mult2=-2.75254E-9
rf_tmon=-4.03176E-3
rf_agc=3.4397E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=4.11248E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6025E0
bslens_imon=2.59989E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19512E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12541E2
lens4a_imon=2.05259E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.03465E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04569E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.19569E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04481E0
lens1_imon=1.69734E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.99017E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.58727E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83392E1
cs_ef1a_imon=3.0058E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=4.3093E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11349E1
os_restr1_imon=2.88591E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=1.87219E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63114E1
os_ef1bup_imon=3.09998E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=1.24571E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93232E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=3.23204E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=8.00574E-10
tplens_vset=1.4E-1
tplens_vmon=1.57005E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.5363E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.61487E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.26841E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26154E0
ionrepsh_imon=2.00881E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34248E1
lens5b_imon=2.19711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.11805E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49266E-1
os_ea2_imon=-5.46646E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.17713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62913E0
os_ef2alow_imon=-2.43905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.21354E-1
os_ef2bup_imon=-5.18102E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10741E1
os_restr2_imon=2.86923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.33149E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02064E1
cs_anode2_imon=2.29199E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72666E1
iondef1_imon=1.11157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.89E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=2.97046E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14462E0
cs_ionaccel_imon=-1.98031E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47278E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.2174E-1
window_imon=-1.0559E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39154E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-6.8752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.6754E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.65251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.03123E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.80124E0
defgridb_imon=6.24194E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33991E1
os_fil1_imon=5.1733E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.32217E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65933E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30859E1
cs_fil1_imon=1.00776E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62592E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65512E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.11662E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.5973E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.01282E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.2232E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.00275E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22547E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19444E-1
res40_imon=-2.56068E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=196
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.1698E4	1.3E1	1.47E2	4.1E1	-7.37103E-2	-8.8002E1	-5.24521E-4	-8.80003E1	4.76837E-5	5.34058E-3	9.3174E-2	2.73159E1	-3.26729E1	-3.26314E1	2.68004E1	1.73677E-7	2.52025E-3	2.52025E-3	6.32328E-3	1.98894E-1
2.0E0	6.501E3	8.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80022E1	-3.09944E-4	-8.8E1	2.38419E-5	5.19753E-3	9.28164E-2	2.73033E1	-3.26708E1	-3.26313E1	2.68202E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99283E-1
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.8002E1	-3.8147E-4	-8.80002E1	-4.76837E-5	5.65052E-3	9.32693E-2	2.72907E1	-3.26825E1	-3.26362E1	2.67962E1	1.73831E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98419E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80022E1	-5.96046E-4	-8.80003E1	2.86102E-4	5.34058E-3	9.32455E-2	2.73063E1	-3.26703E1	-3.26579E1	2.6768E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80022E1	-2.86102E-4	-8.80001E1	4.05312E-4	5.72205E-3	9.29356E-2	2.72991E1	-3.26687E1	-3.26332E1	2.68012E1	1.73827E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.8002E1	-5.48363E-4	-8.79999E1	2.14577E-4	5.24521E-3	9.33886E-2	2.73027E1	-3.26639E1	-3.26386E1	2.6822E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.9934E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80019E1	-6.67572E-4	-8.79998E1	9.53674E-5	5.38826E-3	9.30548E-2	2.72721E1	-3.26856E1	-3.26478E1	2.67884E1	1.73605E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.8002E1	-2.6226E-4	-8.79999E1	0.0E0	5.24521E-3	9.28402E-2	2.7285E1	-3.2662E1	-3.26219E1	2.68076E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99283E-1
1.2E1	3.12E2	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80022E1	-5.48363E-4	-8.79999E1	-2.14577E-4	5.48363E-3	9.30548E-2	2.73027E1	-3.26455E1	-3.26148E1	2.67926E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9934E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80021E1	-5.72205E-4	-8.8E1	3.33786E-4	5.48363E-3	9.35793E-2	2.72961E1	-3.26134E1	-3.2653E1	2.67662E1	1.73605E-7	2.51525E-3	2.51525E-3	6.35601E-3	1.98491E-1
1.4E1	8.01E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80023E1	-3.8147E-4	-8.80001E1	1.90735E-4	5.81741E-3	9.31978E-2	2.72847E1	-3.26699E1	-3.26482E1	2.67968E1	1.73906E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.9963E-1
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80024E1	-2.6226E-4	-8.79999E1	-1.90735E-4	5.19753E-3	9.30786E-2	2.73134E1	-3.26637E1	-3.26233E1	2.67843E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9985E-1
1.6E1	3.26E3	3.0E0	6.47E2	4.41E2	-7.286E-2	-8.80025E1	-1.90735E-4	-8.79997E1	1.19209E-4	5.31673E-3	9.31025E-2	2.72763E1	-3.26801E1	-3.2608E1	2.67734E1	1.73721E-7	2.51371E-3	2.51371E-3	6.32151E-3	2.00534E-1
1.7E1	4.4338E4	1.7E1	6.87E2	4.7E2	-7.37874E-2	-8.80023E1	-1.43051E-4	-8.8E1	3.33786E-4	5.38826E-3	9.3317E-2	2.72689E1	-3.26331E1	-3.26246E1	2.68179E1	1.73679E-7	2.51954E-3	2.51954E-3	6.29128E-3	1.98661E-1
1.8E1	1.98211E5	1.34E2	7.27E2	5.0E2	-7.34782E-2	-8.80024E1	-1.43051E-4	-8.80004E1	1.66893E-4	5.84126E-3	9.3317E-2	2.72691E1	-3.26461E1	-3.26319E1	2.68382E1	1.73664E-7	2.5122E-3	2.5122E-3	6.3074E-3	2.00779E-1
1.9E1	2.481E3	2.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80022E1	-5.00679E-4	-8.8E1	9.53674E-5	5.84126E-3	9.30786E-2	2.72991E1	-3.2647E1	-3.25888E1	2.68016E1	1.7368E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99283E-1
2.0E1	3.91E2	1.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80023E1	-3.09944E-4	-8.80002E1	2.38419E-5	5.24521E-3	9.31263E-2	2.73165E1	-3.26597E1	-3.26488E1	2.67962E1	1.73605E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00363E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80023E1	-5.24521E-4	-8.79999E1	1.66893E-4	5.36442E-3	9.31501E-2	2.73116E1	-3.2626E1	-3.26242E1	2.67511E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9911E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80022E1	-6.19888E-4	-8.80001E1	4.29153E-4	5.26905E-3	9.30786E-2	2.73009E1	-3.27113E1	-3.2605E1	2.67868E1	1.73755E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.9911E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80022E1	-3.33786E-4	-8.79998E1	2.6226E-4	5.45979E-3	9.3174E-2	2.72666E1	-3.26855E1	-3.26302E1	2.6813E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9968E-1