[Scan]
initial_time=2016-02-16T00:27:16
final_time=2016-02-16T00:27:35
ip_count=19
run=1030
dataset=3
scan=215
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.75706E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.59247E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=4.01092E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.63355E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=7.90358E-10
mult1=-9.84219E-9
mult2=-2.86828E-9
rf_tmon=-3.7367E-3
rf_agc=3.4135E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.19962E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=2.00421E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04902E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.04334E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02309E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04805E1
cs_ea1_imon=2.20242E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02121E0
lens1_imon=1.38233E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6411E1
os_ef1alow_imon=2.98947E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.57806E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83717E1
cs_ef1a_imon=2.96862E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.88598E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11593E1
os_restr1_imon=2.88104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15465E1
os_ea1_imon=1.90334E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63392E1
os_ef1bup_imon=3.10346E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26272E0
cs_ionrep_imon=1.26837E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=3.24733E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=7.35164E-10
tplens_vset=1.4E-1
tplens_vmon=1.62138E0
tplens_imon=-3.59057E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.51613E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27074E1
iondef2_imon=1.57346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98629E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=3.97563E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23617E0
ionrepsh_imon=1.99536E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34023E1
lens5b_imon=2.20312E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74698E1
cs_ef2b_imon=3.11145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45136E-1
os_ea2_imon=-5.18331E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06155E2
lens4b_imon=2.00725E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71165E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61929E0
os_ef2alow_imon=-2.28961E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41627E-1
os_ef2bup_imon=-5.33741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10706E1
os_restr2_imon=2.86019E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.32618E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.27739E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73546E1
iondef1_imon=1.08679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67848E1
iondef4_imon=1.07287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.90794E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=3.10659E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12782E0
cs_ionaccel_imon=-1.94904E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.4739E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=1.55131E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.3923E-4
mask2_vset=0.0E0
mask2_vmon=-1.85973E1
mask2_imon=-5.31134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.50905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.70914E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31106E0
defgridb_imon=6.30565E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3397E1
os_fil1_imon=4.75048E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61756E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66029E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30793E1
cs_fil1_imon=1.00777E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62673E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6548E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00265E-2
os_fil2_imon=-2.28112E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.75572E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80907E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.46612E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22467E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=1.99061E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.02271E-1
res40_imon=-2.48423E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2374E4	9.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80023E1	-4.52995E-4	-8.79996E1	1.43051E-4	5.96046E-3	9.3174E-2	2.72871E1	-3.26457E1	-3.26301E1	2.68082E1	1.73605E-7	2.51603E-3	2.51603E-3	6.31798E-3	1.98894E-1
2.0E0	6.314E3	7.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80026E1	-5.00679E-4	-8.79996E1	2.6226E-4	5.48363E-3	9.33409E-2	2.73357E1	-3.2634E1	-3.26187E1	2.68113E1	1.73605E-7	2.52131E-3	2.52131E-3	6.2863E-3	1.99394E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80026E1	-8.10623E-4	-8.79999E1	3.57628E-4	5.76973E-3	9.32217E-2	2.72961E1	-3.26939E1	-3.26314E1	2.68172E1	1.73681E-7	2.51136E-3	2.51136E-3	6.29624E-3	1.98872E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80027E1	-7.15256E-4	-8.79999E1	3.57628E-4	5.65052E-3	9.3317E-2	2.72962E1	-3.26714E1	-3.26325E1	2.6792E1	1.73755E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.01022E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80025E1	-7.39098E-4	-8.8E1	1.19209E-4	5.36442E-3	9.30786E-2	2.73339E1	-3.26314E1	-3.26567E1	2.67926E1	1.73753E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9917E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80025E1	-8.82149E-4	-8.79996E1	3.8147E-4	5.14984E-3	9.30786E-2	2.72787E1	-3.26735E1	-3.26266E1	2.67746E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80026E1	-5.96046E-4	-8.8E1	4.52995E-4	5.19753E-3	9.3317E-2	2.73175E1	-3.25936E1	-3.26921E1	2.68514E1	1.7368E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.97731E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13143E-2	-8.80027E1	-8.34465E-4	-8.8E1	2.14577E-4	5.26905E-3	9.30071E-2	2.72883E1	-3.26314E1	-3.26248E1	2.6792E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.97478E-1
1.2E1	2.82E2	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80028E1	-5.96046E-4	-8.80001E1	4.76837E-5	5.55515E-3	9.28164E-2	2.73075E1	-3.26536E1	-3.26338E1	2.67692E1	1.73831E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.97216E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80025E1	-4.05312E-4	-8.80001E1	4.52995E-4	5.57899E-3	9.29832E-2	2.73682E1	-3.26526E1	-3.25953E1	2.68022E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3514E-3	1.98937E-1
1.4E1	7.84E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80026E1	-5.48363E-4	-8.8E1	2.38419E-4	5.19753E-3	9.30309E-2	2.73034E1	-3.2638E1	-3.26744E1	2.67931E1	1.73827E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.98322E-1
1.5E1	8.8E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80024E1	-4.05312E-4	-8.80003E1	5.00679E-4	5.24521E-3	9.29594E-2	2.73293E1	-3.26884E1	-3.26394E1	2.67421E1	1.73676E-7	2.5199E-3	2.5199E-3	6.323E-3	1.99611E-1
1.6E1	3.302E3	1.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80021E1	-4.05312E-4	-8.80001E1	2.6226E-4	5.48363E-3	9.27925E-2	2.73091E1	-3.26727E1	-3.25981E1	2.68024E1	1.73605E-7	2.52222E-3	2.52222E-3	6.32483E-3	1.99466E-1
1.7E1	4.3506E4	3.3E1	6.87E2	4.7E2	-7.19325E-2	-8.80023E1	-5.48363E-4	-8.80002E1	4.05312E-4	5.4121E-3	9.31263E-2	2.72474E1	-3.26705E1	-3.26843E1	2.68394E1	1.73676E-7	2.52093E-3	2.52093E-3	6.31779E-3	1.99447E-1
1.8E1	1.96935E5	1.05E2	7.27E2	5.0E2	-7.23964E-2	-8.80022E1	-4.76837E-4	-8.80001E1	2.86102E-4	5.34058E-3	9.31025E-2	2.73315E1	-3.26488E1	-3.2626E1	2.67914E1	1.73605E-7	2.5147E-3	2.5147E-3	6.34099E-3	1.99754E-1
1.9E1	2.506E3	1.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80025E1	-6.19888E-4	-8.79997E1	6.4373E-4	5.93662E-3	9.31025E-2	2.72973E1	-3.27203E1	-3.25677E1	2.67764E1	1.73529E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.99283E-1
2.0E1	4.08E2	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.80024E1	-6.4373E-4	-8.79997E1	3.33786E-4	5.48363E-3	9.29594E-2	2.73111E1	-3.26621E1	-3.26128E1	2.6816E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9934E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80023E1	-8.34465E-4	-8.80003E1	0.0E0	5.22137E-3	9.29832E-2	2.7298E1	-3.2672E1	-3.26301E1	2.68036E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99803E-1
2.2E1	6.4E1	0.0E0	8.89E2	6.17E2	-7.13143E-2	-8.80024E1	-9.05991E-4	-8.80004E1	-4.76837E-5	5.34058E-3	9.29117E-2	2.72987E1	-3.26718E1	-3.26254E1	2.68041E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9934E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80026E1	-8.82149E-4	-8.80002E1	2.38419E-5	5.29289E-3	9.30548E-2	2.73546E1	-3.27074E1	-3.26178E1	2.67848E1	1.73605E-7	2.52131E-3	2.52131E-3	6.33388E-3	1.99061E-1