[Scan]
initial_time=2016-02-16T00:28:09
final_time=2016-02-16T00:28:29
ip_count=19
run=1030
dataset=3
scan=217
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.78497E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.22733E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=3.78048E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.61462E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.09109E-10
mult1=-1.06815E-8
mult2=-2.87024E-9
rf_tmon=-3.51844E-3
rf_agc=3.40229E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.93662E-3
ql5_imon=4.31478E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67498E0
bslens_imon=2.68414E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19602E1
lens5a_imon=1.95611E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.05121E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5365E1
cs_ef1b_imon=3.03013E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05156E1
cs_ea1_imon=2.22865E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03365E0
lens1_imon=1.53699E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6429E1
os_ef1alow_imon=2.98183E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03986E1
cs_ea2_imon=1.6005E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84058E1
cs_ef1a_imon=3.00789E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.97253E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1117E1
os_restr1_imon=2.87826E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15549E1
os_ea1_imon=1.89006E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63583E1
os_ef1bup_imon=3.07878E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29555E0
cs_ionrep_imon=1.25461E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93462E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=3.26193E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=7.38275E-10
tplens_vset=1.4E-1
tplens_vmon=1.58234E0
tplens_imon=-4.79207E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26703E1
iondef3_imon=1.50942E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26172E1
iondef2_imon=1.59702E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98805E-4
ql6_vset=1.0E-1
ql6_vmon=9.26733E-2
ql6_imon=4.02701E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2828E0
ionrepsh_imon=1.97349E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.18276E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74617E1
cs_ef2b_imon=3.1396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.61959E-1
os_ea2_imon=-6.25208E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.0089E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70904E1
cs_ef2a_imon=3.18374E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61581E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42206E-1
os_ef2bup_imon=-5.16365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=2.86818E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.341E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01769E1
cs_anode2_imon=2.27357E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72738E1
iondef1_imon=1.11417E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67752E1
iondef4_imon=1.07773E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.89475E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.87843E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09423E0
cs_ionaccel_imon=-1.91428E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56116E1
einzel_imon=7.7921E-6
window_vset=0.0E0
window_vmon=2.18265E-1
window_imon=-1.01072E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39338E-4
mask2_vset=0.0E0
mask2_vmon=-1.86634E1
mask2_imon=-7.63976E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.64816E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.99463E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.18582E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52831E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33975E1
os_fil1_imon=4.91845E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.47855E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65625E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30811E1
cs_fil1_imon=1.00915E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62858E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65908E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22019E-2
os_fil2_imon=-2.2927E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.00275E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.39854E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32399E-1
cs_fil2_imon=-2.27532E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27523E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22561E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00847E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.45508E-1
res40_imon=-2.54331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2222E4	1.4E1	1.47E2	4.1E1	-7.31692E-2	-8.80023E1	-1.00136E-3	-8.79999E1	2.38419E-4	5.36442E-3	9.30786E-2	2.73243E1	-3.26711E1	-3.2635E1	2.67649E1	1.73605E-7	2.52025E-3	2.52025E-3	6.31798E-3	1.99729E-1
2.0E0	6.446E3	0.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80023E1	-7.39098E-4	-8.79998E1	7.15256E-5	5.24521E-3	9.28402E-2	2.72558E1	-3.26735E1	-3.26374E1	2.67957E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99283E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80026E1	-1.00136E-3	-8.80001E1	2.86102E-4	5.55515E-3	9.31025E-2	2.73784E1	-3.26567E1	-3.26518E1	2.67914E1	1.73681E-7	2.51248E-3	2.51248E-3	6.3074E-3	2.00108E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80027E1	-4.76837E-4	-8.79999E1	5.48363E-4	5.88894E-3	9.30786E-2	2.73033E1	-3.27115E1	-3.25924E1	2.6801E1	1.73605E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9917E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80024E1	-6.91414E-4	-8.79998E1	1.90735E-4	5.81741E-3	9.32217E-2	2.73688E1	-3.26645E1	-3.2599E1	2.67848E1	1.73605E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80025E1	-8.10623E-4	-8.80001E1	3.33786E-4	5.53131E-3	9.30548E-2	2.72853E1	-3.26993E1	-3.2638E1	2.681E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
7.0E0	2.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80023E1	-6.4373E-4	-8.80001E1	4.05312E-4	5.67436E-3	9.30786E-2	2.72957E1	-3.26549E1	-3.26301E1	2.68012E1	1.73755E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9963E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80023E1	-5.96046E-4	-8.80001E1	5.48363E-4	5.72205E-3	9.28879E-2	2.72769E1	-3.26494E1	-3.2584E1	2.67878E1	1.73605E-7	2.51096E-3	2.51096E-3	6.3074E-3	1.98491E-1
1.2E1	3.35E2	1.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80025E1	-6.19888E-4	-8.79999E1	1.66893E-4	5.81741E-3	9.31501E-2	2.72937E1	-3.26705E1	-3.26278E1	2.6795E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98937E-1
1.3E1	2.6E1	1.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80023E1	-8.58307E-4	-8.80001E1	3.57628E-4	5.6982E-3	9.31263E-2	2.72702E1	-3.259E1	-3.26795E1	2.6807E1	1.73605E-7	2.51225E-3	2.51225E-3	6.29098E-3	1.9963E-1
1.4E1	6.93E2	1.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80024E1	-5.00679E-4	-8.80001E1	2.86102E-4	5.84126E-3	9.30548E-2	2.72727E1	-3.26762E1	-3.26567E1	2.68274E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98764E-1
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80023E1	-5.00679E-4	-8.79999E1	4.05312E-4	5.34058E-3	9.28402E-2	2.73111E1	-3.26813E1	-3.2641E1	2.67848E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9911E-1
1.6E1	3.299E3	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80022E1	-5.00679E-4	-8.79999E1	5.00679E-4	5.55515E-3	9.31263E-2	2.73003E1	-3.26104E1	-3.26128E1	2.67595E1	1.73679E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.99E-1
1.7E1	4.3916E4	1.6E1	6.87E2	4.7E2	-7.39421E-2	-8.8002E1	-2.38419E-4	-8.79999E1	3.8147E-4	5.57899E-3	9.29832E-2	2.73187E1	-3.26531E1	-3.26042E1	2.6789E1	1.7368E-7	2.51443E-3	2.51443E-3	6.28006E-3	1.98419E-1
1.8E1	1.96873E5	1.0E2	7.27E2	5.0E2	-7.40192E-2	-8.80023E1	-3.57628E-4	-8.79999E1	4.76837E-4	5.03063E-3	9.29594E-2	2.73189E1	-3.26434E1	-3.26573E1	2.67532E1	1.73679E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.97815E-1
1.9E1	2.58E3	2.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80027E1	-6.91414E-4	-8.8E1	1.19209E-4	5.48363E-3	9.27448E-2	2.72867E1	-3.26995E1	-3.26119E1	2.67533E1	1.7368E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.98937E-1
2.0E1	3.97E2	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80025E1	-7.39098E-4	-8.79999E1	3.09944E-4	5.36442E-3	9.3174E-2	2.73157E1	-3.26697E1	-3.26231E1	2.67943E1	1.73605E-7	2.52027E-3	2.52027E-3	6.32978E-3	1.98344E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80025E1	-3.09944E-4	-8.8E1	2.86102E-4	5.65052E-3	9.25064E-2	2.73305E1	-3.2649E1	-3.2616E1	2.68226E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9934E-1
2.2E1	4.8E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80021E1	-5.24521E-4	-8.79999E1	1.19209E-4	5.67436E-3	9.29117E-2	2.72943E1	-3.2641E1	-3.26609E1	2.68346E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00705E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80021E1	-5.48363E-4	-8.80001E1	1.19209E-4	5.93662E-3	9.26733E-2	2.72738E1	-3.26172E1	-3.26703E1	2.67752E1	1.73605E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00847E-1