[Scan]
initial_time=2016-02-16T00:28:36
final_time=2016-02-16T00:28:55
ip_count=19
run=1030
dataset=3
scan=218
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.75884E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.2325E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=3.76654E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.71351E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=7.53438E-10
mult1=-1.1178E-8
mult2=-2.78401E-9
rf_tmon=-3.66592E-3
rf_agc=3.32029E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.85618E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.31064E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19292E1
lens5a_imon=1.96324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.05536E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53334E1
cs_ef1b_imon=3.03352E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=2.18711E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05578E0
lens1_imon=1.61849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04105E1
cs_ea2_imon=1.60888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.98991E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.84927E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=2.89657E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15366E1
os_ea1_imon=1.86375E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63948E1
os_ef1bup_imon=3.05586E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22086E0
cs_ionrep_imon=1.23901E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93781E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=3.27138E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=7.22575E-10
tplens_vset=1.4E-1
tplens_vmon=1.60478E0
tplens_imon=-1.29913E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2685E1
iondef2_imon=1.60455E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03018E2
lens6_imon=2.98602E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.9922E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=1.97334E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74045E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.68547E-1
os_ea2_imon=-5.08433E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.21444E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59816E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.13331E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=2.87566E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29243E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02079E1
cs_anode2_imon=2.28569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73287E1
iondef1_imon=1.12257E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.90619E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=2.89488E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.71491E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02014E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56856E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.58788E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.38821E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.60992E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.41668E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.22059E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47976E0
defgridb_imon=6.5032E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33947E1
os_fil1_imon=6.10368E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85761E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66308E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30769E1
cs_fil1_imon=1.00262E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62732E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65641E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.3356E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73269E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73827E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.34975E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2233E4	9.0E0	1.47E2	4.1E1	-7.26282E-2	-8.8002E1	-5.00679E-4	-8.79996E1	0.0E0	5.48363E-3	9.31263E-2	2.72784E1	-3.26845E1	-3.26231E1	2.67572E1	1.7368E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.00151E-1
2.0E0	6.416E3	3.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80021E1	-2.38419E-4	-8.80001E1	7.15256E-5	5.19753E-3	9.29832E-2	2.7332E1	-3.26499E1	-3.26346E1	2.67842E1	1.73605E-7	2.51709E-3	2.51709E-3	6.32858E-3	2.00735E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80023E1	-9.53674E-5	-8.80002E1	1.19209E-4	5.55515E-3	9.31263E-2	2.73228E1	-3.26655E1	-3.2603E1	2.6813E1	1.73835E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80021E1	-5.00679E-4	-8.8E1	-1.43051E-4	6.00815E-3	9.29117E-2	2.73057E1	-3.26543E1	-3.26002E1	2.67674E1	1.73605E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.01047E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80023E1	-2.6226E-4	-8.80001E1	1.43051E-4	5.55515E-3	9.32217E-2	2.73195E1	-3.26609E1	-3.26314E1	2.67842E1	1.73605E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.8002E1	-1.66893E-4	-8.80001E1	1.19209E-4	5.53131E-3	9.27925E-2	2.72962E1	-3.26508E1	-3.2639E1	2.67872E1	1.73755E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80021E1	0.0E0	-8.79999E1	-2.38419E-5	5.76973E-3	9.29356E-2	2.72877E1	-3.2623E1	-3.26212E1	2.6814E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.00705E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.8002E1	-2.14577E-4	-8.79998E1	3.33786E-4	5.55515E-3	9.2864E-2	2.72624E1	-3.26579E1	-3.26831E1	2.67938E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00673E-1
1.2E1	2.78E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80021E1	-3.57628E-4	-8.8E1	3.57628E-4	5.74589E-3	9.2864E-2	2.72827E1	-3.26425E1	-3.25782E1	2.6816E1	1.73755E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.00499E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80022E1	-2.86102E-4	-8.79998E1	-7.15256E-5	5.55515E-3	9.31978E-2	2.73141E1	-3.26422E1	-3.25725E1	2.67559E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00876E-1
1.4E1	7.75E2	1.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80021E1	-4.05312E-4	-8.79999E1	-4.76837E-5	5.29289E-3	9.28879E-2	2.72709E1	-3.26404E1	-3.26476E1	2.67704E1	1.7368E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99803E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80024E1	-3.8147E-4	-8.80001E1	0.0E0	5.53131E-3	9.26495E-2	2.7298E1	-3.26815E1	-3.26514E1	2.683E1	1.7368E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.9911E-1
1.6E1	3.339E3	1.0E0	6.47E2	4.41E2	-7.286E-2	-8.80025E1	-4.76837E-4	-8.79999E1	1.90735E-4	5.26905E-3	9.28164E-2	2.72839E1	-3.26437E1	-3.26803E1	2.67699E1	1.73679E-7	2.52599E-3	2.52599E-3	6.3074E-3	1.9934E-1
1.7E1	4.3262E4	2.3E1	6.87E2	4.7E2	-7.29374E-2	-8.80026E1	-1.43051E-4	-8.80003E1	9.53674E-5	5.29289E-3	9.28164E-2	2.73526E1	-3.26693E1	-3.26524E1	2.67794E1	1.73679E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.99E-1
1.8E1	1.97178E5	1.01E2	7.27E2	5.0E2	-7.26282E-2	-8.80021E1	-2.86102E-4	-8.8E1	-7.15256E-5	5.36442E-3	9.31263E-2	2.73171E1	-3.26801E1	-3.262E1	2.67866E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9911E-1
1.9E1	2.435E3	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80022E1	-3.57628E-4	-8.79998E1	1.90735E-4	5.38826E-3	9.32217E-2	2.72949E1	-3.2632E1	-3.26867E1	2.67908E1	1.7368E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.98592E-1
2.0E1	3.66E2	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80021E1	-5.72205E-4	-8.80002E1	1.90735E-4	5.34058E-3	9.33409E-2	2.73327E1	-3.26645E1	-3.26122E1	2.67644E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80021E1	-2.6226E-4	-8.80001E1	9.53674E-5	5.14984E-3	9.3317E-2	2.73363E1	-3.26554E1	-3.2614E1	2.68148E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99456E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80022E1	-2.6226E-4	-8.79998E1	2.38419E-5	5.26905E-3	9.32217E-2	2.72744E1	-3.26785E1	-3.26632E1	2.68308E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.00325E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80022E1	-9.29832E-4	-8.79998E1	2.38419E-5	5.48363E-3	9.31978E-2	2.73287E1	-3.2685E1	-3.26296E1	2.68262E1	1.73827E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00021E-1