[Scan]
initial_time=2016-02-16T00:29:29
final_time=2016-02-16T00:29:48
ip_count=19
run=1030
dataset=3
scan=220
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.78104E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.16705E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=3.70359E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.74731E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=7.30014E-10
mult1=-1.39624E-8
mult2=-2.8621E-9
rf_tmon=-3.47229E-3
rf_agc=3.41062E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.83794E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19508E1
lens5a_imon=2.02092E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04808E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.03316E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04679E2
lens23_imon=1.02528E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=2.21559E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04316E0
lens1_imon=1.41301E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03546E1
cs_ea2_imon=1.56057E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.99531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.96454E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=2.90161E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1566E1
os_ea1_imon=1.88718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.26965E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=3.25804E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=7.34317E-10
tplens_vset=1.4E-1
tplens_vmon=1.59277E0
tplens_imon=-3.73979E-9
iondef3_vset=-3.249E1
iondef3_vmon=-3.26082E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26667E1
iondef2_imon=1.60852E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.058E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=2.01624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33285E1
lens5b_imon=2.19468E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.00991E-1
os_ea2_imon=-4.07495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00324E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70957E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62098E0
os_ef2alow_imon=-2.75285E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36757E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=2.87458E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.32163E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02145E1
cs_anode2_imon=2.2893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67822E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89636E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=2.59042E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.22148E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39322E-4
mask2_vset=0.0E0
mask2_vmon=-1.86206E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.13407E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.48878E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.3035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55495E0
defgridb_imon=6.29051E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33979E1
os_fil1_imon=4.46388E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.04382E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66116E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30831E1
cs_fil1_imon=1.0107E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63315E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65947E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.47899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95182E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22618E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31242E-3
inlet_lpb_pmon=1.9923E-1
chamber_ion_pmon=1.73674E-7
chamber_cvt_pmon=2.51223E-3
foreline_cvt_pmon=2.51223E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82117E-1
res40_imon=-2.60509E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2527E4	1.4E1	1.47E2	4.1E1	-7.07733E-2	-8.80025E1	-3.09944E-4	-8.79998E1	2.86102E-4	5.31673E-3	9.30309E-2	2.73028E1	-3.26973E1	-3.26011E1	2.67955E1	1.73605E-7	2.51804E-3	2.51804E-3	6.29624E-3	1.99048E-1
2.0E0	6.48E3	3.0E0	3.16E2	1.6E2	-7.13143E-2	-8.80026E1	-3.8147E-4	-8.79997E1	9.53674E-5	5.45979E-3	9.3317E-2	2.73112E1	-3.26842E1	-3.26248E1	2.68022E1	1.73605E-7	2.51182E-3	2.51182E-3	6.3074E-3	1.98894E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80027E1	-4.76837E-4	-8.79998E1	4.76837E-5	5.65052E-3	9.31263E-2	2.73629E1	-3.26856E1	-3.25953E1	2.67776E1	1.73758E-7	2.51136E-3	2.51136E-3	6.31858E-3	1.99577E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80027E1	-1.90735E-4	-8.80002E1	-4.76837E-5	6.1512E-3	9.33409E-2	2.72949E1	-3.26494E1	-3.26254E1	2.68082E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80025E1	-4.05312E-4	-8.80002E1	-4.76837E-5	5.65052E-3	9.29832E-2	2.72966E1	-3.26375E1	-3.2627E1	2.67772E1	1.73679E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80023E1	-4.76837E-4	-8.79998E1	7.15256E-5	5.53131E-3	9.3174E-2	2.73183E1	-3.26717E1	-3.26326E1	2.6804E1	1.73668E-7	2.51682E-3	2.51682E-3	6.3074E-3	1.99624E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80024E1	-9.29832E-4	-8.80001E1	-1.43051E-4	5.34058E-3	9.26256E-2	2.73057E1	-3.26645E1	-3.26266E1	2.68184E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9883E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80025E1	-6.19888E-4	-8.80001E1	-2.38419E-5	4.98295E-3	9.29117E-2	2.72823E1	-3.26723E1	-3.25749E1	2.67962E1	1.73758E-7	2.5225E-3	2.5225E-3	6.32418E-3	1.99401E-1
1.2E1	3.43E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80023E1	-1.09673E-3	-8.8E1	-2.14577E-4	5.38826E-3	9.2721E-2	2.7285E1	-3.26608E1	-3.26119E1	2.67463E1	1.7368E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99456E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80022E1	-5.72205E-4	-8.80001E1	-1.66893E-4	5.10216E-3	9.26256E-2	2.72799E1	-3.25954E1	-3.26002E1	2.68238E1	1.73679E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00021E-1
1.4E1	7.28E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80023E1	-8.10623E-4	-8.79999E1	-1.19209E-4	5.4121E-3	9.29117E-2	2.73246E1	-3.26567E1	-3.26608E1	2.6783E1	1.73605E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.98661E-1
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80024E1	-4.05312E-4	-8.79998E1	-2.38419E-5	5.14984E-3	9.2864E-2	2.73189E1	-3.26837E1	-3.2599E1	2.67827E1	1.73718E-7	2.51771E-3	2.51771E-3	6.31014E-3	1.9937E-1
1.6E1	3.352E3	1.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80025E1	-4.52995E-4	-8.79998E1	-9.53674E-5	5.19753E-3	9.29832E-2	2.72853E1	-3.26464E1	-3.2641E1	2.67631E1					
1.7E1	4.3696E4	2.5E1	6.87E2	4.7E2	-7.27828E-2	-8.80023E1	-5.96046E-4	-8.80003E1	9.53674E-5	5.53131E-3	9.2721E-2	2.73039E1	-3.26655E1	-3.26354E1	2.68244E1	1.73605E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00363E-1
1.8E1	1.97845E5	1.19E2	7.27E2	5.0E2	-7.35556E-2	-8.80024E1	-2.6226E-4	-8.8E1	9.53674E-5	5.36442E-3	9.2721E-2	2.73308E1	-3.2667E1	-3.26187E1	2.6813E1	1.73831E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.01372E-1
1.9E1	2.457E3	2.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80023E1	-7.62939E-4	-8.80001E1	1.43051E-4	5.34058E-3	9.29594E-2	2.72612E1	-3.26651E1	-3.26194E1	2.681E1	1.7368E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.00151E-1
2.0E1	3.84E2	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80024E1	-7.15256E-4	-8.79999E1	-2.38419E-5	5.65052E-3	9.30786E-2	2.73147E1	-3.26494E1	-3.26639E1	2.67795E1	1.73605E-7	2.51581E-3	2.51581E-3	6.29624E-3	1.99931E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80023E1	-7.15256E-4	-8.79999E1	-2.38419E-5	5.4121E-3	9.30309E-2	2.72949E1	-3.26807E1	-3.26398E1	2.67943E1	1.7368E-7	2.5188E-3	2.5188E-3	6.28006E-3	1.99803E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80024E1	-8.82149E-4	-8.80002E1	-4.76837E-5	5.00679E-3	9.27448E-2	2.73319E1	-3.26557E1	-3.26249E1	2.68104E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98419E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80025E1	-5.00679E-4	-8.80002E1	2.38419E-5	5.48363E-3	9.31263E-2	2.73051E1	-3.26667E1	-3.26082E1	2.67822E1	1.73674E-7	2.51223E-3	2.51223E-3	6.31242E-3	1.9923E-1