[Scan]
initial_time=2016-02-16T00:31:15
final_time=2016-02-16T00:31:35
ip_count=19
run=1030
dataset=3
scan=224
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.78128E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.37086E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=3.28922E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.5311E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=7.91943E-10
mult1=-1.07511E-8
mult2=-2.83175E-9
rf_tmon=-4.17267E-3
rf_agc=3.32978E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=3.70693E-10
bslens_vset=-6.2E0
bslens_vmon=-6.59009E0
bslens_imon=2.38293E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.199E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05291E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53349E1
cs_ef1b_imon=3.02214E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.01769E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04573E1
cs_ea1_imon=2.22288E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07241E0
lens1_imon=1.54279E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64481E1
os_ef1alow_imon=3.00407E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03918E1
cs_ea2_imon=1.56169E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.99538E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=3.76284E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1106E1
os_restr1_imon=2.87687E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1489E1
os_ea1_imon=1.86291E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63409E1
os_ef1bup_imon=3.09408E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27088E0
cs_ionrep_imon=1.30589E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02186E1
cs_anode1_imon=3.26019E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.67052E-10
tplens_vset=1.4E-1
tplens_vmon=1.59077E0
tplens_imon=-3.45831E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26591E1
iondef3_imon=1.4787E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26707E1
iondef2_imon=1.60028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.985E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.82698E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3039E0
ionrepsh_imon=2.00635E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33851E1
lens5b_imon=2.22117E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74362E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.20882E-1
os_ea2_imon=-8.64944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06027E2
lens4b_imon=2.00606E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71449E1
cs_ef2a_imon=3.19486E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64709E0
os_ef2alow_imon=-2.69969E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.21934E-1
os_ef2bup_imon=-5.28528E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10782E1
os_restr2_imon=2.87027E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30304E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01943E1
cs_anode2_imon=2.29199E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73143E1
iondef1_imon=1.12113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.09581E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.81571E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=3.34489E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12319E0
cs_ionaccel_imon=-1.89691E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56046E1
einzel_imon=7.75387E-6
window_vset=0.0E0
window_vmon=2.28112E-1
window_imon=-1.05242E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39056E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-7.43124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.15057E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.92859E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.19497E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.80632E0
defgridb_imon=6.17382E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33992E1
os_fil1_imon=5.34706E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.92454E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6612E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30828E1
cs_fil1_imon=1.00831E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66062E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99021E-2
os_fil2_imon=-2.47225E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.27701E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96844E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31774E-1
cs_fil2_imon=-2.47225E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.33493E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22426E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.00533E-1
res40_imon=-2.48423E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2666E4	1.4E1	1.47E2	4.1E1	-7.31692E-2	-8.80018E1	-3.09944E-4	-8.80001E1	2.14577E-4	4.91142E-3	9.31978E-2	2.73039E1	-3.26476E1	-3.26374E1	2.67956E1	1.73676E-7	2.52197E-3	2.52197E-3	6.30221E-3	2.006E-1
2.0E0	6.536E3	5.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80019E1	-4.76837E-4	-8.8E1	4.29153E-4	5.60284E-3	9.30548E-2	2.73159E1	-3.26344E1	-3.26248E1	2.68094E1	1.73753E-7	2.51203E-3	2.51203E-3	6.33977E-3	2.00021E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.8002E1	-5.24521E-4	-8.79998E1	0.0E0	5.65052E-3	9.33647E-2	2.72769E1	-3.26609E1	-3.26639E1	2.67601E1	1.73758E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.0153E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80019E1	-4.76837E-4	-8.79997E1	2.38419E-4	5.4121E-3	9.31025E-2	2.73257E1	-3.26614E1	-3.25989E1	2.67972E1	1.73827E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.8002E1	-5.48363E-4	-8.79999E1	0.0E0	5.57899E-3	9.34839E-2	2.72522E1	-3.262E1	-3.26657E1	2.67902E1	1.73605E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.00021E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.80021E1	-5.96046E-4	-8.79998E1	-2.38419E-5	5.55515E-3	9.29832E-2	2.72991E1	-3.26873E1	-3.25954E1	2.67728E1	1.73605E-7	2.51804E-3	2.51804E-3	6.28511E-3	1.99224E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80021E1	-6.91414E-4	-8.80001E1	3.09944E-4	5.62668E-3	9.31025E-2	2.72931E1	-3.26603E1	-3.26717E1	2.68076E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.9917E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80019E1	-6.19888E-4	-8.79998E1	2.14577E-4	5.79357E-3	9.29832E-2	2.72976E1	-3.26428E1	-3.26127E1	2.68151E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.9963E-1
1.2E1	3.15E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.8002E1	-5.00679E-4	-8.79998E1	9.53674E-5	5.6982E-3	9.3317E-2	2.72702E1	-3.26547E1	-3.26173E1	2.6792E1	1.73677E-7	2.51814E-3	2.51814E-3	6.31798E-3	1.99562E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80018E1	-6.67572E-4	-8.79999E1	9.53674E-5	5.50747E-3	9.33647E-2	2.73027E1	-3.26732E1	-3.26242E1	2.6795E1	1.73684E-7	2.51411E-3	2.51411E-3	6.29581E-3	1.991E-1
1.4E1	7.89E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80021E1	-5.48363E-4	-8.79995E1	-9.53674E-5	5.55515E-3	9.34362E-2	2.72787E1	-3.26765E1	-3.26158E1	2.67319E1	1.73605E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9917E-1
1.5E1	7.3E1	1.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80021E1	-5.24521E-4	-8.80001E1	2.38419E-5	5.24521E-3	9.32455E-2	2.72913E1	-3.26314E1	-3.26092E1	2.68238E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98419E-1
1.6E1	3.31E3	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80022E1	-6.67572E-4	-8.8E1	7.15256E-5	5.34058E-3	9.31025E-2	2.72877E1	-3.26524E1	-3.26194E1	2.67734E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.97731E-1
1.7E1	4.3464E4	2.9E1	6.87E2	4.7E2	-7.26282E-2	-8.80021E1	-8.34465E-4	-8.8E1	-2.38419E-5	5.74589E-3	9.3317E-2	2.72921E1	-3.27027E1	-3.26083E1	2.67575E1	1.73605E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.98153E-1
1.8E1	1.97009E5	1.08E2	7.27E2	5.0E2	-7.24736E-2	-8.80023E1	-5.48363E-4	-8.79997E1	-2.14577E-4	5.31673E-3	9.34124E-2	2.72756E1	-3.26579E1	-3.26411E1	2.67581E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99456E-1
1.9E1	2.548E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80022E1	-7.39098E-4	-8.79995E1	4.76837E-5	5.126E-3	9.32693E-2	2.73554E1	-3.27132E1	-3.26101E1	2.67521E1	1.7375E-7	2.50972E-3	2.50972E-3	6.3074E-3	1.99562E-1
2.0E1	3.92E2	1.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80025E1	-5.72205E-4	-8.8E1	0.0E0	5.43594E-3	9.35316E-2	2.7278E1	-3.26413E1	-3.26502E1	2.67671E1	1.73605E-7	2.51838E-3	2.51838E-3	6.29603E-3	1.99343E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80025E1	-7.39098E-4	-8.79999E1	2.38419E-4	5.10216E-3	9.33409E-2	2.73116E1	-3.2672E1	-3.26431E1	2.67644E1	1.73679E-7	2.51203E-3	2.51203E-3	6.32896E-3	1.9968E-1
2.2E1	5.8E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80025E1	-7.86781E-4	-8.8E1	9.53674E-5	5.22137E-3	9.34601E-2	2.72827E1	-3.26738E1	-3.26567E1	2.68226E1	1.73982E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.98937E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80023E1	-7.15256E-4	-8.80003E1	7.15256E-5	4.95911E-3	9.34124E-2	2.73143E1	-3.26707E1	-3.26591E1	2.67968E1	1.73679E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.9968E-1