[Scan]
initial_time=2016-02-16T00:33:04
final_time=2016-02-16T00:33:23
ip_count=19
run=1030
dataset=3
scan=228
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.81282E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.36239E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=4.07887E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.67944E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=7.80988E-10
mult1=-9.33385E-9
mult2=-2.61547E-9
rf_tmon=-4.81032E-3
rf_agc=3.30142E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=3.96717E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62631E0
bslens_imon=2.37823E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19932E1
lens5a_imon=2.01104E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05399E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53783E1
cs_ef1b_imon=3.03673E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02118E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04635E1
cs_ea1_imon=2.20814E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03423E0
lens1_imon=1.48137E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.9707E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04345E1
cs_ea2_imon=1.58242E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8444E1
cs_ef1a_imon=3.01554E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=4.01771E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.111E1
os_restr1_imon=2.88348E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14807E1
os_ea1_imon=1.85009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63317E1
os_ef1bup_imon=3.08713E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25442E0
cs_ionrep_imon=1.27929E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91838E2
cs_nozzle_imon=1.93608E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01693E1
cs_anode1_imon=3.25567E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=7.07757E-10
tplens_vset=1.4E-1
tplens_vmon=1.67851E0
tplens_imon=-1.28111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26172E1
iondef3_imon=1.52611E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.5859E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98711E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.09603E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.266E0
ionrepsh_imon=1.96063E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33895E1
lens5b_imon=2.22308E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.69491E-1
os_ea2_imon=-6.00875E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00859E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71136E1
cs_ef2a_imon=3.17887E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6274E0
os_ef2alow_imon=-2.40777E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44523E-1
os_ef2bup_imon=-5.35826E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10579E1
os_restr2_imon=2.87791E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.30172E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01902E1
cs_anode2_imon=2.27809E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72968E1
iondef1_imon=1.14129E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67729E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.91815E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=3.08287E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11566E0
cs_ionaccel_imon=-1.98379E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47369E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56144E1
einzel_imon=7.63919E-6
window_vset=0.0E0
window_vmon=2.09577E-1
window_imon=-9.6554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.38997E-4
mask2_vset=0.0E0
mask2_vmon=-1.86379E1
mask2_imon=-4.44252E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.92626E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.4593E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.19973E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.82703E0
defgridb_imon=6.58097E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33955E1
os_fil1_imon=4.89528E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52489E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65975E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30815E1
cs_fil1_imon=1.00772E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62812E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65838E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.08338E-2
os_fil2_imon=-2.4375E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.39285E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99458E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30026E-1
cs_fil2_imon=-2.39696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.58196E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22469E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06701E-1
res40_imon=-2.70317E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2398E4	1.4E1	1.47E2	4.1E1	-7.30918E-2	-8.80025E1	-3.09944E-4	-8.79998E1	2.38419E-4	5.53131E-3	9.35316E-2	2.73003E1	-3.26512E1	-3.26518E1	2.68076E1	1.73677E-7	2.51814E-3	2.51814E-3	6.31269E-3	1.99061E-1
2.0E0	6.368E3	3.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80023E1	-1.43051E-4	-8.80001E1	5.72205E-4	5.126E-3	9.34839E-2	2.73147E1	-3.26723E1	-3.2605E1	2.6786E1	1.73605E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.98937E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80025E1	-2.14577E-4	-8.79999E1	3.57628E-4	5.24521E-3	9.31263E-2	2.72567E1	-3.26797E1	-3.26236E1	2.67698E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99456E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80023E1	-2.14577E-4	-8.79997E1	2.38419E-5	5.38826E-3	9.31025E-2	2.72853E1	-3.26663E1	-3.26134E1	2.67793E1	1.7368E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.9911E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80025E1	4.76837E-5	-8.8E1	1.90735E-4	5.43594E-3	9.29832E-2	2.72977E1	-3.26562E1	-3.26363E1	2.68099E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98937E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80024E1	-3.57628E-4	-8.79999E1	1.66893E-4	5.48363E-3	9.32932E-2	2.73134E1	-3.26877E1	-3.26203E1	2.67951E1	1.73605E-7	2.51752E-3	2.51752E-3	6.32273E-3	1.99337E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80025E1	-5.00679E-4	-8.79999E1	2.14577E-4	5.50747E-3	9.30548E-2	2.73093E1	-3.26945E1	-3.26422E1	2.6801E1	1.73684E-7	2.51527E-3	2.51527E-3	6.29581E-3	1.98917E-1
8.0E0	1.0E0	1.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80022E1	-4.05312E-4	-8.80001E1	2.6226E-4	5.60284E-3	9.34601E-2	2.72943E1	-3.26949E1	-3.26437E1	2.68007E1	1.7368E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.98764E-1
1.2E1	3.25E2	1.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80025E1	-2.6226E-4	-8.8E1	3.8147E-4	5.43594E-3	9.32693E-2	2.73444E1	-3.26379E1	-3.26048E1	2.67976E1	1.73676E-7	2.50852E-3	2.50852E-3	6.31779E-3	1.99611E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80024E1	-1.43051E-4	-8.8E1	3.09944E-4	5.62668E-3	9.30548E-2	2.73393E1	-3.26543E1	-3.26056E1	2.67607E1	1.73684E-7	2.5199E-3	2.5199E-3	6.34231E-3	1.98186E-1
1.4E1	7.6E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80025E1	-3.8147E-4	-8.79999E1	5.24521E-4	5.29289E-3	9.31025E-2	2.73424E1	-3.2645E1	-3.25985E1	2.67938E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00151E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80023E1	-4.52995E-4	-8.80002E1	7.15256E-5	5.67436E-3	9.32217E-2	2.73151E1	-3.26508E1	-3.26697E1	2.68178E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98592E-1
1.6E1	3.258E3	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80022E1	7.15256E-5	-8.80003E1	9.53674E-5	5.98431E-3	9.28164E-2	2.7332E1	-3.26793E1	-3.26358E1	2.68088E1	1.73605E-7	2.52428E-3	2.52428E-3	6.28552E-3	1.99803E-1
1.7E1	4.4209E4	2.3E1	6.87E2	4.7E2	-7.32464E-2	-8.80024E1	-6.67572E-4	-8.80001E1	-9.53674E-5	5.79357E-3	9.32932E-2	2.72895E1	-3.26783E1	-3.25767E1	2.67698E1	1.73755E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.99456E-1
1.8E1	1.97118E5	1.01E2	7.27E2	5.0E2	-7.26282E-2	-8.80026E1	-1.19209E-4	-8.79998E1	1.90735E-4	5.67436E-3	9.31263E-2	2.72528E1	-3.26561E1	-3.26008E1	2.67752E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98075E-1
1.9E1	2.547E3	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80025E1	-4.76837E-4	-8.79999E1	1.19209E-4	5.45979E-3	9.33409E-2	2.72835E1	-3.26591E1	-3.26296E1	2.67884E1	1.73605E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.97731E-1
2.0E1	3.46E2	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80022E1	-4.76837E-4	-8.79999E1	2.14577E-4	5.62668E-3	9.33409E-2	2.73098E1	-3.26626E1	-3.26236E1	2.6804E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98075E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80024E1	-7.15256E-4	-8.79995E1	1.90735E-4	5.67436E-3	9.31025E-2	2.72909E1	-3.26378E1	-3.26331E1	2.6719E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9883E-1
2.2E1	5.5E1	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80023E1	-6.67572E-4	-8.79999E1	2.38419E-5	5.34058E-3	9.32932E-2	2.72843E1	-3.26664E1	-3.26346E1	2.68113E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.9911E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80024E1	-7.15256E-4	-8.8E1	3.8147E-4	5.84126E-3	9.32932E-2	2.72968E1	-3.26679E1	-3.26172E1	2.67729E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00325E-1