[Scan]
initial_time=2016-02-16T00:33:57
final_time=2016-02-16T00:34:16
ip_count=19
run=1030
dataset=3
scan=230
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.81582E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.59723E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=4.40896E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.66199E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.01635E-10
mult1=-1.1402E-8
mult2=-2.59685E-9
rf_tmon=-5.75013E-3
rf_agc=3.22761E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=3.9767E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61902E0
bslens_imon=2.34151E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20267E1
lens5a_imon=2.02261E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12555E2
lens4a_imon=2.05351E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=3.0191E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.01976E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.20666E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10557E0
lens1_imon=1.77875E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03673E1
cs_ea2_imon=1.54373E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.02379E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.02045E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=2.89008E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15081E1
os_ea1_imon=1.89697E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26744E0
cs_ionrep_imon=1.26766E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93261E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.23642E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.8094E-10
tplens_vset=1.4E-1
tplens_vmon=1.5848E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.52816E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.59293E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=4.00007E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21788E0
ionrepsh_imon=1.99855E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74225E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.53395E-1
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.20651E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65162E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34354E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.86918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23113E2
cs_ionfoca_imon=6.34105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.29038E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.08786E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67848E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.90207E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.65436E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0929E0
cs_ionaccel_imon=-2.11855E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56105E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=1.6088E-1
window_imon=-1.05178E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86572E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=8.01872E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93757E3
defgrida_imon=6.78701E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42918E0
defgridb_imon=6.30211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33951E1
os_fil1_imon=5.03451E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.87563E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6594E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=1.00632E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63027E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65807E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04064E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8812E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22404E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.11549E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=233
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2526E4	1.5E1	1.47E2	4.1E1	-7.30918E-2	-8.8002E1	-8.34465E-4	-8.80003E1	7.15256E-5	5.38826E-3	9.30786E-2	2.7344E1	-3.26703E1	-3.25959E1	2.67984E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9917E-1
2.0E0	6.533E3	8.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80019E1	-1.00136E-3	-8.80005E1	2.38419E-5	5.57899E-3	9.32217E-2	2.73129E1	-3.26909E1	-3.26452E1	2.68046E1	1.73827E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9934E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80019E1	-4.76837E-4	-8.80001E1	1.19209E-4	5.36442E-3	9.3174E-2	2.72919E1	-3.26621E1	-3.26188E1	2.68064E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00499E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80017E1	-3.33786E-4	-8.80002E1	7.15256E-5	5.62668E-3	9.31978E-2	2.73518E1	-3.2659E1	-3.26516E1	2.68041E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99977E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80021E1	-2.6226E-4	-8.80003E1	7.15256E-5	5.34058E-3	9.30786E-2	2.72864E1	-3.26934E1	-3.26335E1	2.6802E1	1.73605E-7	2.51472E-3	2.51472E-3	6.323E-3	1.9994E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80024E1	-3.33786E-4	-8.80003E1	9.53674E-5	5.48363E-3	9.29832E-2	2.72909E1	-3.27163E1	-3.26349E1	2.67816E1	1.73761E-7	2.52521E-3	2.52521E-3	6.3074E-3	1.98625E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80024E1	-1.90735E-4	-8.80002E1	1.66893E-4	5.36442E-3	9.31501E-2	2.73021E1	-3.26639E1	-3.26164E1	2.67746E1	1.73605E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80023E1	-1.66893E-4	-8.80002E1	1.43051E-4	5.74589E-3	9.30309E-2	2.72976E1	-3.26596E1	-3.25924E1	2.68198E1	1.73605E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.99456E-1
1.2E1	3.18E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80021E1	-2.14577E-4	-8.80002E1	1.19209E-4	5.65052E-3	9.30309E-2	2.73021E1	-3.26428E1	-3.26266E1	2.68022E1	1.73677E-7	2.51287E-3	2.51287E-3	6.31798E-3	1.99729E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80021E1	-5.00679E-4	-8.80004E1	2.38419E-5	5.50747E-3	9.31025E-2	2.72793E1	-3.26038E1	-3.26164E1	2.67956E1	1.73605E-7	2.51662E-3	2.51662E-3	6.34037E-3	1.98247E-1
1.4E1	7.52E2	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80021E1	-7.15256E-5	-8.80004E1	2.14577E-4	5.6982E-3	9.30309E-2	2.73529E1	-3.26815E1	-3.26207E1	2.67818E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99283E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80026E1	-3.09944E-4	-8.8E1	9.53674E-5	5.43594E-3	9.28879E-2	2.72824E1	-3.26658E1	-3.26609E1	2.67764E1	1.73901E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9883E-1
1.6E1	3.365E3	3.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80025E1	-4.76837E-4	-8.80001E1	1.43051E-4	5.34058E-3	9.30786E-2	2.72961E1	-3.26428E1	-3.26915E1	2.6798E1	1.73835E-7	2.51693E-3	2.51693E-3	6.32978E-3	1.99048E-1
1.7E1	4.3648E4	2.1E1	6.87E2	4.7E2	-7.41738E-2	-8.80025E1	-3.33786E-4	-8.80003E1	-2.38419E-5	5.38826E-3	9.29356E-2	2.72793E1	-3.26543E1	-3.26338E1	2.6804E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.98937E-1
1.8E1	1.97594E5	1.06E2	7.27E2	5.0E2	-7.39421E-2	-8.80025E1	-6.67572E-4	-8.79994E1	3.8147E-4	5.55515E-3	9.31263E-2	2.72943E1	-3.26813E1	-3.26086E1	2.67764E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98937E-1
1.9E1	2.464E3	2.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80026E1	-4.05312E-4	-8.79999E1	-4.76837E-5	5.74589E-3	9.29832E-2	2.72809E1	-3.26862E1	-3.25995E1	2.67848E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.9963E-1
2.0E1	4.17E2	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80024E1	-5.48363E-4	-8.8E1	2.38419E-5	5.29289E-3	9.30548E-2	2.7288E1	-3.26384E1	-3.25959E1	2.67694E1	1.73605E-7	2.51954E-3	2.51954E-3	6.29128E-3	1.98491E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.46377E-2	-8.80025E1	-4.76837E-4	-8.80002E1	1.43051E-4	5.07832E-3	9.31501E-2	2.72991E1	-3.26771E1	-3.26374E1	2.68013E1	1.73753E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.99E-1
2.2E1	5.3E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80025E1	-5.72205E-4	-8.79999E1	-1.19209E-4	4.93526E-3	9.28879E-2	2.72986E1	-3.26467E1	-3.26349E1	2.68053E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.9963E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80024E1	-6.19888E-4	-8.8E1	2.86102E-4	5.10216E-3	9.2864E-2	2.73027E1	-3.26729E1	-3.26326E1	2.67848E1	1.73679E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00021E-1