[Scan]
initial_time=2016-02-16T00:34:23
final_time=2016-02-16T00:34:43
ip_count=19
run=1030
dataset=3
scan=231
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.82581E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.4131E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=3.96812E-10
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-1.66159E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=7.54535E-10
mult1=-1.01979E-8
mult2=-2.76452E-9
rf_tmon=-3.61119E-3
rf_agc=3.33756E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=4.06921E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.28901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19358E1
lens5a_imon=1.96324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12619E2
lens4a_imon=2.05525E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.03244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.20081E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01552E0
lens1_imon=1.7735E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.99748E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04195E1
cs_ea2_imon=1.55949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=3.01478E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=3.82042E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11051E1
os_restr1_imon=2.87855E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15486E1
os_ea1_imon=1.86447E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20403E0
cs_ionrep_imon=1.26424E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93708E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.24327E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=7.68828E-10
tplens_vset=1.4E-1
tplens_vmon=1.64324E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.52092E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.59518E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98483E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=4.18079E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24549E0
ionrepsh_imon=1.97118E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33393E1
lens5b_imon=2.20946E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.76958E-1
os_ea2_imon=-2.45272E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59455E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60784E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.87314E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.2929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.11428E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67698E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.91442E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.26538E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-2.01043E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86194E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.61353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.36261E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.69787E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.77149E0
defgridb_imon=6.69066E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3397E1
os_fil1_imon=5.03451E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.35306E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65873E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30843E1
cs_fil1_imon=1.00756E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63057E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6576E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0995E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41892E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88479E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.9911E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.53906E-1
res40_imon=-2.67717E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2291E4	6.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80019E1	-8.34465E-4	-8.80004E1	7.15256E-5	5.05447E-3	9.33886E-2	2.72648E1	-3.25954E1	-3.26356E1	2.68046E1	1.73605E-7	2.51225E-3	2.51225E-3	6.28552E-3	1.97903E-1
2.0E0	6.42E3	1.0E1	3.16E2	1.6E2	-7.24736E-2	-8.80022E1	-8.34465E-4	-8.79999E1	2.38419E-4	5.126E-3	9.33409E-2	2.7318E1	-3.26793E1	-3.26009E1	2.68244E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98247E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80018E1	-8.10623E-4	-8.8E1	0.0E0	5.50747E-3	9.32455E-2	2.73793E1	-3.26828E1	-3.25959E1	2.67836E1	1.73681E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.98169E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80019E1	-8.82149E-4	-8.79997E1	2.14577E-4	5.38826E-3	9.32693E-2	2.73063E1	-3.26831E1	-3.26368E1	2.67899E1	1.7375E-7	2.51814E-3	2.51814E-3	6.31269E-3	1.99896E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80023E1	-3.57628E-4	-8.8E1	1.66893E-4	5.19753E-3	9.32455E-2	2.73099E1	-3.262E1	-3.26488E1	2.67858E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80021E1	-9.05991E-4	-8.79999E1	2.38419E-4	5.53131E-3	9.3174E-2	2.72522E1	-3.26903E1	-3.2608E1	2.67854E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80021E1	-2.86102E-4	-8.79998E1	2.86102E-4	4.93526E-3	9.31263E-2	2.72532E1	-3.26543E1	-3.26201E1	2.67752E1	1.7368E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80022E1	-2.38419E-4	-8.80001E1	7.15256E-5	5.14984E-3	9.31501E-2	2.73069E1	-3.26591E1	-3.2599E1	2.67595E1	1.73605E-7	2.51632E-3	2.51632E-3	6.28592E-3	1.98491E-1
1.2E1	3.38E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80023E1	-3.33786E-4	-8.80004E1	6.19888E-4	5.07832E-3	9.27925E-2	2.72991E1	-3.26627E1	-3.26422E1	2.67589E1	1.73718E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99716E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80024E1	-5.24521E-4	-8.80001E1	5.24521E-4	5.26905E-3	9.28879E-2	2.73129E1	-3.26753E1	-3.26236E1	2.68106E1					
1.4E1	7.5E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80025E1	-5.96046E-4	-8.80002E1	5.48363E-4	5.05447E-3	9.31978E-2	2.73147E1	-3.26122E1	-3.2632E1	2.68262E1	1.73679E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.00021E-1
1.5E1	7.7E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80021E1	-5.00679E-4	-8.80002E1	3.57628E-4	5.29289E-3	9.33886E-2	2.73193E1	-3.26762E1	-3.26048E1	2.68082E1	1.73681E-7	2.5147E-3	2.5147E-3	6.31299E-3	1.99754E-1
1.6E1	3.264E3	1.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80023E1	-4.05312E-4	-8.80002E1	3.8147E-4	5.24521E-3	9.29117E-2	2.7266E1	-3.26723E1	-3.26128E1	2.67902E1	1.73605E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00876E-1
1.7E1	4.3606E4	3.0E1	6.87E2	4.7E2	-7.26282E-2	-8.80024E1	-5.00679E-4	-8.79998E1	3.33786E-4	5.43594E-3	9.28879E-2	2.73604E1	-3.2632E1	-3.26567E1	2.67644E1	1.73605E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.01372E-1
1.8E1	1.96489E5	1.23E2	7.27E2	5.0E2	-7.22418E-2	-8.80024E1	-6.19888E-4	-8.79999E1	2.86102E-4	5.43594E-3	9.32217E-2	2.73087E1	-3.26735E1	-3.26422E1	2.67896E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.99456E-1
1.9E1	2.45E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80027E1	-7.86781E-4	-8.80001E1	2.86102E-4	4.98295E-3	9.29832E-2	2.73063E1	-3.26661E1	-3.26325E1	2.6813E1	1.73755E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.99456E-1
2.0E1	4.24E2	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80026E1	-6.19888E-4	-8.79999E1	4.05312E-4	5.22137E-3	9.31263E-2	2.72871E1	-3.26717E1	-3.26416E1	2.6783E1	1.73679E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.9985E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80027E1	-3.8147E-4	-8.80003E1	3.33786E-4	5.38826E-3	9.30548E-2	2.72703E1	-3.2666E1	-3.26637E1	2.68673E1	1.73753E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.98491E-1
2.2E1	5.2E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80025E1	-5.00679E-4	-8.80001E1	2.14577E-4	5.22137E-3	9.29117E-2	2.73177E1	-3.26314E1	-3.26536E1	2.6786E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.98661E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80023E1	-2.38419E-4	-8.79997E1	2.38419E-4	5.05447E-3	9.27925E-2	2.73243E1	-3.26885E1	-3.25996E1	2.67698E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.9911E-1