[Scan]
initial_time=2016-02-16T00:35:17
final_time=2016-02-16T00:35:36
ip_count=19
run=1030
dataset=3
scan=233
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.72308E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.17671E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=3.78478E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.61614E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.1017E-10
mult1=-1.0847E-8
mult2=-2.58607E-9
rf_tmon=-5.77776E-3
rf_agc=3.2554E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=4.0189E-10
bslens_vset=-6.2E0
bslens_vmon=-6.737E0
bslens_imon=2.73085E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18975E1
lens5a_imon=1.94758E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53448E1
cs_ef1b_imon=3.05009E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0469E2
lens23_imon=1.0273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=2.17304E-5
lens1_vset=-2.7E0
lens1_vmon=-2.92211E0
lens1_imon=1.20182E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04664E1
cs_ea2_imon=1.61063E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=3.0173E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=4.00579E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=2.86593E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15388E1
os_ea1_imon=1.86228E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19783E0
cs_ionrep_imon=1.22731E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93724E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=3.25912E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.22003E-10
tplens_vset=1.4E-1
tplens_vmon=1.66444E0
tplens_imon=1.01066E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26307E1
iondef3_imon=1.44144E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26166E1
iondef2_imon=1.60603E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0302E2
lens6_imon=2.98806E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.97968E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=1.97483E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32855E1
lens5b_imon=2.17516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.51625E-1
os_ea2_imon=6.21325E-8
lens4b_vset=-4.05E2
lens4b_vmon=-4.06162E2
lens4b_imon=2.00315E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61678E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56579E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10667E1
os_restr2_imon=2.8753E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23008E2
cs_ionfoca_imon=6.28477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.27092E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72756E1
iondef1_imon=1.11192E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67659E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.89962E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=3.60525E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0923E0
cs_ionaccel_imon=-2.01764E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.90313E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.89484E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.34812E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=7.27545E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.17523E0
defgridb_imon=6.45077E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33978E1
os_fil1_imon=4.27767E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.44316E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66088E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=1.00721E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62708E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65635E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.27767E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81919E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22373E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.40381E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2513E4	6.0E0	1.47E2	4.1E1	-7.22418E-2	-8.8002E1	-5.72205E-4	-8.8E1	7.15256E-5	5.14984E-3	9.29832E-2	2.72461E1	-3.26667E1	-3.26703E1	2.67978E1	1.73753E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9917E-1
2.0E0	6.398E3	1.1E1	3.16E2	1.6E2	-7.34782E-2	-8.80023E1	-6.67572E-4	-8.79999E1	9.53674E-5	5.26905E-3	9.29832E-2	2.73213E1	-3.26723E1	-3.2605E1	2.67926E1	1.73605E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.99E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80025E1	-4.76837E-4	-8.80002E1	7.15256E-5	5.48363E-3	9.33409E-2	2.73526E1	-3.26356E1	-3.2644E1	2.68022E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00151E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80022E1	-1.43051E-4	-8.8E1	1.19209E-4	5.74589E-3	9.30548E-2	2.73199E1	-3.26647E1	-3.26471E1	2.67816E1	1.73605E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.00673E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80022E1	-2.14577E-4	-8.80002E1	0.0E0	5.45979E-3	9.30071E-2	2.73028E1	-3.26388E1	-3.25681E1	2.6792E1	1.7369E-7	2.51203E-3	2.51203E-3	6.29495E-3	2.00435E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80022E1	-2.14577E-4	-8.80002E1	2.38419E-5	5.4121E-3	9.3174E-2	2.72962E1	-3.26464E1	-3.26177E1	2.67797E1	1.73906E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80021E1	-4.05312E-4	-8.80001E1	2.38419E-5	5.29289E-3	9.31025E-2	2.72914E1	-3.26779E1	-3.26238E1	2.68272E1	1.73683E-7	2.51498E-3	2.51498E-3	6.3245E-3	2.00606E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80023E1	-2.86102E-4	-8.80002E1	1.90735E-4	5.38826E-3	9.32455E-2	2.73393E1	-3.26915E1	-3.26166E1	2.68016E1	1.73695E-7	2.52647E-3	2.52647E-3	6.29426E-3	2.00325E-1
1.2E1	3.25E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80024E1	-8.34465E-4	-8.80005E1	0.0E0	5.24521E-3	9.31025E-2	2.72455E1	-3.26496E1	-3.26408E1	2.6814E1	1.73642E-7	2.51809E-3	2.51809E-3	6.32371E-3	1.99397E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80024E1	-8.10623E-4	-8.80003E1	9.53674E-5	5.4121E-3	9.34601E-2	2.73502E1	-3.26879E1	-3.25413E1	2.67854E1					
1.4E1	7.05E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80021E1	-5.00679E-4	-8.8E1	5.24521E-4	5.29289E-3	9.33647E-2	2.72797E1	-3.26844E1	-3.25977E1	2.67607E1	1.73679E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9968E-1
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80021E1	-2.86102E-4	-8.80001E1	3.8147E-4	5.34058E-3	9.34839E-2	2.72757E1	-3.26464E1	-3.26518E1	2.6789E1	1.73605E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.98592E-1
1.6E1	3.314E3	2.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80021E1	-6.67572E-4	-8.8E1	2.38419E-5	5.55515E-3	9.3174E-2	2.73057E1	-3.26437E1	-3.26048E1	2.67943E1	1.73679E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9951E-1
1.7E1	4.3602E4	2.3E1	6.87E2	4.7E2	-7.29374E-2	-8.80024E1	-4.05312E-4	-8.8E1	0.0E0	5.62668E-3	9.31501E-2	2.7311E1	-3.26366E1	-3.26101E1	2.6792E1	1.73605E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.98419E-1
1.8E1	1.9753E5	1.24E2	7.27E2	5.0E2	-7.31692E-2	-8.80023E1	-6.91414E-4	-8.79999E1	1.43051E-4	5.79357E-3	9.31978E-2	2.72793E1	-3.27011E1	-3.26188E1	2.67986E1	1.73679E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9934E-1
1.9E1	2.515E3	2.0E0	7.68E2	5.29E2	-7.42513E-2	-8.80024E1	-2.38419E-4	-8.80001E1	1.19209E-4	5.34058E-3	9.33409E-2	2.73129E1	-3.26464E1	-3.26362E1	2.68112E1	1.73755E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.9963E-1
2.0E1	3.92E2	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.80022E1	-1.90735E-4	-8.80004E1	5.48363E-4	5.34058E-3	9.31978E-2	2.72856E1	-3.26703E1	-3.26649E1	2.67787E1	1.73679E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00534E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80023E1	-5.00679E-4	-8.80003E1	3.09944E-4	5.45979E-3	9.33886E-2	2.73033E1	-3.26537E1	-3.26201E1	2.6786E1	1.73605E-7	2.5068E-3	2.5068E-3	6.33486E-3	2.00847E-1
2.2E1	5.6E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80022E1	-5.96046E-4	-8.80003E1	2.38419E-4	5.48363E-3	9.30786E-2	2.73369E1	-3.26633E1	-3.26543E1	2.67794E1	1.73679E-7	2.52384E-3	2.52384E-3	6.29665E-3	1.9985E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80023E1	-5.48363E-4	-8.8E1	2.86102E-4	5.72205E-3	9.30786E-2	2.72756E1	-3.26166E1	-3.26307E1	2.67659E1	1.73753E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00705E-1