[Scan]
initial_time=2016-02-16T00:36:10
final_time=2016-02-16T00:36:29
ip_count=19
run=1030
dataset=3
scan=235
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.75052E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.70262E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=3.75152E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.66715E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=7.47526E-10
mult1=-9.78941E-9
mult2=-2.60262E-9
rf_tmon=-4.28068E-3
rf_agc=3.33782E-2
counter1=1
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.00627E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71577E0
bslens_imon=2.78748E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.97023E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53358E1
cs_ef1b_imon=3.04217E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05206E1
cs_ea1_imon=2.2056E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97933E0
lens1_imon=1.51329E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65299E1
os_ef1alow_imon=2.99495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04416E1
cs_ea2_imon=1.57665E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.00504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=3.91018E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10985E1
os_restr1_imon=2.86773E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14415E1
os_ea1_imon=1.88812E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.10235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.3105E0
cs_ionrep_imon=1.24147E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93696E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=3.25156E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.27785E-10
tplens_vset=1.4E-1
tplens_vmon=1.63612E0
tplens_imon=-4.617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25994E1
iondef3_imon=1.55435E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2666E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98633E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.2876E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22142E0
ionrepsh_imon=1.99111E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34312E1
lens5b_imon=2.20065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.15641E-1
os_ea2_imon=-4.12148E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00817E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65522E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25345E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10589E1
os_restr2_imon=2.87602E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.28123E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.27776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73207E1
iondef1_imon=1.07653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67763E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.90709E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=3.3046E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55895E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=1.783E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.96563E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=7.25067E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50061E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33976E1
os_fil1_imon=5.15464E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.28698E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66177E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30831E1
cs_fil1_imon=1.00864E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62246E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65684E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97733E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96853E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22471E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27901E-3
inlet_lpb_pmon=1.98088E-1
chamber_ion_pmon=1.73761E-7
chamber_cvt_pmon=2.51952E-3
foreline_cvt_pmon=2.51952E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10949E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2352E4	1.1E1	1.47E2	4.1E1	-7.14689E-2	-8.80021E1	-1.0252E-3	-8.79998E1	2.38419E-5	5.26905E-3	9.30071E-2	2.73169E1	-3.26573E1	-3.26248E1	2.67854E1	1.73605E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9934E-1
2.0E0	6.437E3	3.0E0	3.16E2	1.6E2	-7.16233E-2	-8.80024E1	-9.05991E-4	-8.8E1	1.43051E-4	5.05447E-3	9.29832E-2	2.73198E1	-3.26505E1	-3.25942E1	2.67788E1	1.73679E-7	2.51268E-3	2.51268E-3	6.32099E-3	1.99913E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80024E1	-2.86102E-4	-8.8E1	-1.43051E-4	4.98295E-3	9.3174E-2	2.72992E1	-3.26856E1	-3.26178E1	2.6796E1					
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80024E1	-2.6226E-4	-8.79996E1	1.66893E-4	5.31673E-3	9.32455E-2	2.73363E1	-3.26693E1	-3.26585E1	2.67968E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00847E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80025E1	-7.15256E-5	-8.8E1	2.6226E-4	4.8399E-3	9.29832E-2	2.73157E1	-3.27316E1	-3.26231E1	2.67619E1	1.73605E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80026E1	-1.66893E-4	-8.79998E1	-3.33786E-4	5.29289E-3	9.30071E-2	2.73243E1	-3.26549E1	-3.25996E1	2.67848E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00534E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80023E1	0.0E0	-8.79997E1	2.38419E-4	5.24521E-3	9.30309E-2	2.72907E1	-3.26849E1	-3.26038E1	2.68082E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80024E1	-3.33786E-4	-8.79998E1	4.76837E-5	5.38826E-3	9.26733E-2	2.72703E1	-3.26626E1	-3.26178E1	2.67897E1	1.7368E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.99977E-1
1.2E1	3.41E2	1.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80023E1	-4.29153E-4	-8.8E1	1.43051E-4	5.57899E-3	9.30309E-2	2.72781E1	-3.26524E1	-3.25677E1	2.68112E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.01022E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80024E1	-5.96046E-4	-8.79997E1	1.19209E-4	5.48363E-3	9.28879E-2	2.73009E1	-3.27131E1	-3.25972E1	2.6807E1	1.73605E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00534E-1
1.4E1	7.88E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80023E1	-5.72205E-4	-8.79998E1	2.14577E-4	5.34058E-3	9.28879E-2	2.7266E1	-3.26807E1	-3.2599E1	2.6792E1	1.73758E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.99401E-1
1.5E1	6.5E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80023E1	-6.67572E-4	-8.79998E1	5.00679E-4	5.36442E-3	9.28879E-2	2.73141E1	-3.26476E1	-3.265E1	2.67698E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.99E-1
1.6E1	3.389E3	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80023E1	-4.76837E-4	-8.80002E1	3.33786E-4	5.4121E-3	9.33647E-2	2.73478E1	-3.26609E1	-3.26254E1	2.67962E1	1.73681E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.00108E-1
1.7E1	4.3602E4	2.1E1	6.87E2	4.7E2	-7.23189E-2	-8.80025E1	-6.67572E-4	-8.80003E1	2.38419E-4	5.29289E-3	9.35078E-2	2.73387E1	-3.26655E1	-3.26467E1	2.68016E1	1.73679E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.00534E-1
1.8E1	1.97291E5	1.08E2	7.27E2	5.0E2	-7.22418E-2	-8.80023E1	-6.91414E-4	-8.80003E1	1.19209E-4	5.4121E-3	9.31263E-2	2.73208E1	-3.26547E1	-3.25925E1	2.68282E1	1.73755E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99803E-1
1.9E1	2.497E3	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80023E1	-9.53674E-4	-8.79999E1	2.6226E-4	5.50747E-3	9.31263E-2	2.7302E1	-3.26462E1	-3.25838E1	2.67908E1	1.73605E-7	2.514E-3	2.514E-3	6.31727E-3	1.98816E-1
2.0E1	3.99E2	0.0E0	8.08E2	5.58E2	-7.09279E-2	-8.80024E1	-5.96046E-4	-8.80004E1	2.14577E-4	5.53131E-3	9.29356E-2	2.72839E1	-3.26484E1	-3.26437E1	2.68154E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.97731E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80025E1	-5.48363E-4	-8.79998E1	1.90735E-4	5.05447E-3	9.2864E-2	2.72854E1	-3.26393E1	-3.2615E1	2.68053E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98592E-1
2.2E1	4.7E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80026E1	-4.29153E-4	-8.79999E1	3.33786E-4	5.43594E-3	9.29117E-2	2.73307E1	-3.26429E1	-3.2606E1	2.67957E1	1.73747E-7	2.51162E-3	2.51162E-3	6.323E-3	1.98465E-1
2.3E1	1.0E0	1.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80023E1	-4.05312E-4	-8.8E1	-2.38419E-5	5.29289E-3	9.29356E-2	2.73207E1	-3.2666E1	-3.25994E1	2.67763E1	1.73761E-7	2.51952E-3	2.51952E-3	6.27901E-3	1.98088E-1