[Scan]
initial_time=2016-02-16T00:38:23
final_time=2016-02-16T00:38:43
ip_count=19
run=1030
dataset=3
scan=240
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.82175E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.86653E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=4.01258E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.66008E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=8.18682E-10
mult1=-8.96319E-9
mult2=-2.65248E-9
rf_tmon=-4.75314E-3
rf_agc=3.34634E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=3.71563E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62728E0
bslens_imon=2.11499E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=2.01377E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.04806E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53454E1
cs_ef1b_imon=3.0382E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04575E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=2.2187E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05366E0
lens1_imon=1.79998E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04068E1
cs_ea2_imon=1.56108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.0209E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.58379E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10937E1
os_restr1_imon=2.86305E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14592E1
os_ea1_imon=1.89661E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63888E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24089E0
cs_ionrep_imon=1.28571E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01521E1
cs_anode1_imon=3.28255E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=6.86514E-10
tplens_vset=1.4E-1
tplens_vmon=1.59483E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.50551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26605E1
iondef2_imon=1.59081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=3.96085E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24797E0
ionrepsh_imon=1.98262E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.23498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49266E-1
os_ea2_imon=-7.90865E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00517E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6336E0
os_ef2alow_imon=-2.39606E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3015E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10294E1
os_restr2_imon=2.88828E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23125E2
cs_ionfoca_imon=6.36724E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.29074E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73417E1
iondef1_imon=1.06945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68108E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.81903E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.03376E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08029E0
cs_ionaccel_imon=-1.76897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.86804E-6
window_vset=0.0E0
window_vmon=1.88511E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.61877E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.71976E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.10202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.73628E0
defgridb_imon=6.34458E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33993E1
os_fil1_imon=5.6652E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33504E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66156E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3078E1
cs_fil1_imon=1.00945E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62672E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66113E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05331E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.01958E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76604E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49661E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22469E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77312E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2234E4	1.7E1	1.47E2	4.1E1	-7.27053E-2	-8.80024E1	-8.10623E-4	-8.80003E1	5.24521E-4	5.03063E-3	9.29117E-2	2.72296E1	-3.26891E1	-3.26018E1	2.68134E1	1.73827E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.98491E-1
2.0E0	6.591E3	8.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80024E1	-7.62939E-4	-8.80006E1	1.43051E-4	5.62668E-3	9.30309E-2	2.7321E1	-3.2686E1	-3.26413E1	2.67801E1	1.73679E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.97478E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80023E1	-6.67572E-4	-8.80003E1	2.38419E-4	5.14984E-3	9.31978E-2	2.73213E1	-3.26549E1	-3.2644E1	2.68046E1	1.73758E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.97469E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80026E1	-6.91414E-4	-8.79999E1	2.6226E-4	5.126E-3	9.26256E-2	2.72786E1	-3.26614E1	-3.2613E1	2.67914E1	1.73755E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.9911E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80022E1	-6.91414E-4	-8.80001E1	3.57628E-4	5.03063E-3	9.28164E-2	2.72937E1	-3.26897E1	-3.25671E1	2.67854E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80022E1	-9.29832E-4	-8.80003E1	1.66893E-4	5.36442E-3	9.28879E-2	2.73141E1	-3.26801E1	-3.26615E1	2.67998E1	1.73605E-7	2.5147E-3	2.5147E-3	6.31858E-3	1.99224E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80024E1	-1.14441E-3	-8.80003E1	-4.76837E-5	5.43594E-3	9.27925E-2	2.7334E1	-3.26697E1	-3.26573E1	2.68028E1	1.73827E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80025E1	-6.19888E-4	-8.79999E1	-4.76837E-5	5.53131E-3	9.30309E-2	2.73257E1	-3.26372E1	-3.26785E1	2.68163E1	1.7368E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.9911E-1
1.2E1	3.23E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80024E1	-5.72205E-4	-8.79999E1	7.15256E-5	5.07832E-3	9.32217E-2	2.7321E1	-3.26358E1	-3.26725E1	2.68119E1	1.73679E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9883E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80022E1	-5.00679E-4	-8.8E1	2.14577E-4	5.07832E-3	9.32932E-2	2.73075E1	-3.26506E1	-3.26326E1	2.67974E1	1.7368E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99456E-1
1.4E1	7.6E2	2.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80021E1	-3.8147E-4	-8.80001E1	-4.76837E-5	5.10216E-3	9.31978E-2	2.7364E1	-3.26627E1	-3.26591E1	2.67523E1	1.73605E-7	2.50898E-3	2.50898E-3	6.30192E-3	1.99977E-1
1.5E1	7.6E1	1.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80024E1	-3.8147E-4	-8.80003E1	2.14577E-4	5.31673E-3	9.30071E-2	2.7341E1	-3.26011E1	-3.26393E1	2.68198E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00325E-1
1.6E1	3.378E3	3.0E0	6.47E2	4.41E2	-7.44059E-2	-8.80023E1	-7.39098E-4	-8.80002E1	2.38419E-5	5.10216E-3	9.3174E-2	2.73424E1	-3.26425E1	-3.26291E1	2.6804E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00534E-1
1.7E1	4.3729E4	1.9E1	6.87E2	4.7E2	-7.36328E-2	-8.80025E1	-4.76837E-5	-8.80001E1	-2.38419E-5	5.53131E-3	9.28164E-2	2.72576E1	-3.26561E1	-3.26278E1	2.67812E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.00151E-1
1.8E1	1.95759E5	1.11E2	7.27E2	5.0E2	-7.27053E-2	-8.80024E1	2.38419E-4	-8.80002E1	-7.15256E-5	5.24521E-3	9.32932E-2	2.73111E1	-3.26422E1	-3.26326E1	2.67896E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00151E-1
1.9E1	2.562E3	2.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80024E1	-2.14577E-4	-8.79997E1	-1.66893E-4	5.14984E-3	9.34124E-2	2.72961E1	-3.26585E1	-3.25653E1	2.67325E1	1.73758E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.00996E-1
2.0E1	3.98E2	1.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80023E1	-2.86102E-4	-8.79998E1	1.19209E-4	5.50747E-3	9.29594E-2	2.73183E1	-3.26116E1	-3.25918E1	2.68364E1	1.73605E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.99E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80021E1	-3.8147E-4	-8.79999E1	3.33786E-4	5.26905E-3	9.29356E-2	2.73103E1	-3.27094E1	-3.26208E1	2.66715E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98247E-1
2.2E1	5.1E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80023E1	-4.05312E-4	-8.79997E1	2.6226E-4	5.14984E-3	9.26971E-2	2.7278E1	-3.26679E1	-3.25723E1	2.67662E1	1.73605E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.98063E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80021E1	-3.33786E-4	-8.79999E1	-2.38419E-5	5.31673E-3	9.29356E-2	2.73417E1	-3.26605E1	-3.26119E1	2.68108E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9934E-1