[Scan]
initial_time=2016-02-16T00:38:50
final_time=2016-02-16T00:39:09
ip_count=19
run=1030
dataset=3
scan=241
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.87039E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.77414E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=3.61371E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.6582E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=7.85458E-10
mult1=-9.5357E-9
mult2=-2.79646E-9
rf_tmon=-6.03251E-3
rf_agc=3.21379E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=4.08375E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.76847E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20205E1
lens5a_imon=2.00542E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04621E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=3.06271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04575E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05463E1
cs_ea1_imon=2.221E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01372E0
lens1_imon=1.37335E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.99387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.58544E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83926E1
cs_ef1a_imon=2.9982E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=3.77905E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=2.87855E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15492E1
os_ea1_imon=1.91818E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.09478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.34643E0
cs_ionrep_imon=1.26208E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93157E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.24291E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.02488E-10
tplens_vset=1.4E-1
tplens_vmon=1.58195E0
tplens_imon=-4.68779E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26573E1
iondef3_imon=1.51154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2602E1
iondef2_imon=1.53606E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98321E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.883E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=2.0065E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34168E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74447E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.25287E-1
os_ea2_imon=-4.32729E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71534E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.639E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55378E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=2.86918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.31911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.25614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73321E1
iondef1_imon=1.084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.96906E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=3.18861E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-2.03926E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.04128E-1
window_imon=-9.83303E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.38962E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.13046E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.80241E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.46212E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=5.82547E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33975E1
os_fil1_imon=4.95041E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.32613E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65962E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30778E1
cs_fil1_imon=1.00796E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62738E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65836E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.59912E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9067E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22484E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.3918E-1
res40_imon=-2.78168E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2346E4	1.5E1	1.47E2	4.1E1	-7.33239E-2	-8.80022E1	-6.19888E-4	-8.79999E1	4.29153E-4	5.36442E-3	9.29594E-2	2.73027E1	-3.26779E1	-3.26325E1	2.67902E1	1.73605E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.97984E-1
2.0E0	6.755E3	4.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80022E1	-3.57628E-4	-8.79998E1	4.29153E-4	5.48363E-3	9.30071E-2	2.73375E1	-3.26765E1	-3.26242E1	2.681E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9731E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.8002E1	-6.4373E-4	-8.79997E1	4.05312E-4	5.50747E-3	9.29832E-2	2.73131E1	-3.2638E1	-3.26345E1	2.68199E1	1.73681E-7	2.51359E-3	2.51359E-3	6.31299E-3	1.98169E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80021E1	-3.33786E-4	-8.80001E1	3.33786E-4	5.50747E-3	9.3317E-2	2.72758E1	-3.26565E1	-3.26196E1	2.6816E1	1.73675E-7	2.5216E-3	2.5216E-3	6.29721E-3	1.99498E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80022E1	-4.29153E-4	-8.80001E1	4.52995E-4	5.48363E-3	9.31978E-2	2.73128E1	-3.26708E1	-3.26231E1	2.68065E1	1.73764E-7	2.51527E-3	2.51527E-3	6.32483E-3	1.991E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80024E1	-5.00679E-4	-8.80004E1	5.00679E-4	5.48363E-3	9.31978E-2	2.73247E1	-3.26719E1	-3.26291E1	2.67895E1	1.73605E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80023E1	-4.29153E-4	-8.8E1	5.00679E-4	5.36442E-3	9.3317E-2	2.73363E1	-3.26392E1	-3.26434E1	2.68004E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98419E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80021E1	-5.48363E-4	-8.8E1	3.33786E-4	5.17368E-3	9.31978E-2	2.72744E1	-3.26614E1	-3.26343E1	2.68099E1	1.73605E-7	2.51116E-3	2.51116E-3	6.34037E-3	1.99283E-1
1.2E1	3.3E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80021E1	-8.82149E-4	-8.80002E1	1.90735E-4	5.53131E-3	9.35316E-2	2.72733E1	-3.26452E1	-3.25707E1	2.68262E1	1.73605E-7	2.5131E-3	2.5131E-3	6.34518E-3	1.9883E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80023E1	-5.24521E-4	-8.80002E1	1.19209E-4	5.53131E-3	9.3317E-2	2.73086E1	-3.26756E1	-3.26225E1	2.68268E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.9911E-1
1.4E1	8.01E2	2.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80023E1	-4.05312E-4	-8.80001E1	2.38419E-4	5.53131E-3	9.30786E-2	2.73075E1	-3.26597E1	-3.2607E1	2.68106E1	1.73679E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.9968E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80022E1	-3.57628E-4	-8.79998E1	4.29153E-4	5.38826E-3	9.29594E-2	2.7311E1	-3.26467E1	-3.26195E1	2.67704E1	1.73605E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.9852E-1
1.6E1	3.237E3	1.0E0	6.47E2	4.41E2	-7.3401E-2	-8.8002E1	-5.00679E-4	-8.79999E1	9.53674E-5	5.31673E-3	9.31263E-2	2.73405E1	-3.26512E1	-3.26014E1	2.67858E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.97815E-1
1.7E1	4.3577E4	2.1E1	6.87E2	4.7E2	-7.27828E-2	-8.80019E1	-4.52995E-4	-8.79998E1	1.19209E-4	5.26905E-3	9.3317E-2	2.73216E1	-3.26856E1	-3.25989E1	2.68047E1	1.73755E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.97903E-1
1.8E1	1.9639E5	1.04E2	7.27E2	5.0E2	-7.36328E-2	-8.8002E1	-5.48363E-4	-8.8E1	2.86102E-4	5.57899E-3	9.33886E-2	2.73171E1	-3.26536E1	-3.2647E1	2.6798E1	1.73679E-7	2.50775E-3	2.50775E-3	6.29665E-3	1.9731E-1
1.9E1	2.446E3	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80023E1	-3.57628E-4	-8.8E1	-1.19209E-4	5.36442E-3	9.31501E-2	2.73189E1	-3.26651E1	-3.26278E1	2.68088E1	1.73755E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98075E-1
2.0E1	4.13E2	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80024E1	-4.05312E-4	-8.79996E1	3.33786E-4	5.05447E-3	9.32455E-2	2.73151E1	-3.26791E1	-3.26077E1	2.67776E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99283E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80025E1	-7.39098E-4	-8.79997E1	-7.15256E-5	4.79221E-3	9.29594E-2	2.72865E1	-3.27005E1	-3.2638E1	2.67457E1	1.73605E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.99E-1
2.2E1	5.3E1	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80025E1	-5.72205E-4	-8.79999E1	7.15256E-5	5.14984E-3	9.30548E-2	2.73281E1	-3.26543E1	-3.26248E1	2.67972E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.01022E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80024E1	-7.15256E-5	-8.8E1	9.53674E-5	4.93526E-3	9.32455E-2	2.73321E1	-3.2602E1	-3.26573E1	2.67758E1	1.73679E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.00021E-1