[Scan]
initial_time=2016-02-16T00:39:16
final_time=2016-02-16T00:39:36
ip_count=19
run=1030
dataset=3
scan=242
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.82791E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.85222E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=3.63159E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.57917E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=7.80821E-10
mult1=-1.10287E-8
mult2=-2.77251E-9
rf_tmon=-5.96041E-3
rf_agc=3.218E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.02117E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.69637E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20169E1
lens5a_imon=2.00362E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12433E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5354E1
cs_ef1b_imon=3.05307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02384E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04778E1
cs_ea1_imon=2.23181E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05217E0
lens1_imon=1.58244E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03312E1
cs_ea2_imon=1.54687E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.00963E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.93105E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11245E1
os_restr1_imon=2.8807E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15576E1
os_ea1_imon=1.93945E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63583E1
os_ef1bup_imon=3.09581E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20764E0
cs_ionrep_imon=1.23036E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93982E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=3.23726E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=7.26759E-10
tplens_vset=1.4E-1
tplens_vmon=1.44977E0
tplens_imon=2.87048E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25864E1
iondef3_imon=1.49172E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.553E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98717E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=4.40681E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3284E0
ionrepsh_imon=2.00939E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33544E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74524E1
cs_ef2b_imon=3.12813E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.21081E-1
os_ea2_imon=-5.87742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06175E2
lens4b_imon=2.00781E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71119E1
cs_ef2a_imon=3.18756E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61581E0
os_ef2alow_imon=-2.68232E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27726E-1
os_ef2bup_imon=-5.19492E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=2.87479E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23102E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01856E1
cs_anode2_imon=2.28677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68182E1
iondef4_imon=1.08746E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.91709E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.15356E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10002E0
cs_ionaccel_imon=-1.83088E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.70174E-6
window_vset=0.0E0
window_vmon=1.85829E-1
window_imon=-1.09412E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86437E1
mask2_imon=-5.34609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92591E3
multa_neg_imon=7.43688E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.54503E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23615E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.34004E1
os_fil1_imon=4.7389E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.35692E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66191E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30796E1
cs_fil1_imon=1.00799E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63142E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66236E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.46612E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.93506E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31275E-1
cs_fil2_imon=-2.368E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=1.97565E-1
chamber_ion_pmon=1.73677E-7
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.68677E-1
res40_imon=-2.65799E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2478E4	1.7E1	1.47E2	4.1E1	-7.34782E-2	-8.8002E1	-3.57628E-4	-8.80002E1	2.86102E-4	5.67436E-3	9.30548E-2	2.73027E1	-3.26644E1	-3.26626E1	2.67806E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.9963E-1
2.0E0	6.401E3	8.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80024E1	-5.48363E-4	-8.80002E1	4.52995E-4	5.48363E-3	9.32455E-2	2.73411E1	-3.26134E1	-3.2641E1	2.67872E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9951E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80022E1	-4.52995E-4	-8.80001E1	4.05312E-4	5.43594E-3	9.31501E-2	2.726E1	-3.26464E1	-3.2623E1	2.67758E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98592E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80023E1	-6.67572E-4	-8.8E1	3.09944E-4	5.50747E-3	9.3174E-2	2.72945E1	-3.26791E1	-3.2636E1	2.6786E1	1.7368E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.99456E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80023E1	-5.00679E-4	-8.79999E1	5.72205E-4	5.36442E-3	9.29594E-2	2.73357E1	-3.26422E1	-3.26278E1	2.67876E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80023E1	-6.91414E-4	-8.79997E1	9.53674E-5	5.53131E-3	9.32932E-2	2.72769E1	-3.26543E1	-3.26218E1	2.68033E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80019E1	-3.8147E-4	-8.80002E1	2.38419E-5	5.34058E-3	9.32455E-2	2.72797E1	-3.26585E1	-3.26083E1	2.67978E1	1.7368E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80022E1	-3.57628E-4	-8.79999E1	7.15256E-5	5.45979E-3	9.33409E-2	2.72883E1	-3.26681E1	-3.26098E1	2.68394E1	1.73679E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9934E-1
1.2E1	3.27E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80023E1	-4.29153E-4	-8.8E1	2.86102E-4	5.62668E-3	9.29594E-2	2.73429E1	-3.26362E1	-3.26356E1	2.68016E1	1.73831E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9963E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80021E1	-2.14577E-4	-8.80001E1	4.76837E-5	5.50747E-3	9.29356E-2	2.72696E1	-3.2697E1	-3.26113E1	2.67808E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99803E-1
1.4E1	7.58E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80022E1	-1.90735E-4	-8.80003E1	1.66893E-4	5.84126E-3	9.31501E-2	2.72915E1	-3.26632E1	-3.26425E1	2.68076E1	1.73681E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.0064E-1
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80023E1	-4.05312E-4	-8.80003E1	2.14577E-4	5.50747E-3	9.3317E-2	2.73265E1	-3.26762E1	-3.26462E1	2.68256E1	1.73679E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.98491E-1
1.6E1	3.225E3	2.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80023E1	-4.29153E-4	-8.80001E1	4.52995E-4	5.48363E-3	9.30309E-2	2.73526E1	-3.26202E1	-3.26417E1	2.6846E1	1.73605E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.99401E-1
1.7E1	4.3797E4	1.7E1	6.87E2	4.7E2	-7.23964E-2	-8.80025E1	-3.8147E-4	-8.8E1	1.66893E-4	5.50747E-3	9.28879E-2	2.73015E1	-3.26885E1	-3.26266E1	2.68214E1	1.73677E-7	2.51603E-3	2.51603E-3	6.31269E-3	1.99061E-1
1.8E1	1.97028E5	9.4E1	7.27E2	5.0E2	-7.32464E-2	-8.80026E1	-1.66893E-4	-8.8E1	1.43051E-4	5.6982E-3	9.30786E-2	2.72874E1	-3.26567E1	-3.26189E1	2.67711E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.01022E-1
1.9E1	2.418E3	2.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80025E1	-4.29153E-4	-8.8E1	-7.15256E-5	5.67436E-3	9.29832E-2	2.73153E1	-3.26386E1	-3.25864E1	2.68382E1	1.73679E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.00534E-1
2.0E1	4.46E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80022E1	-3.57628E-4	-8.79999E1	-2.14577E-4	5.60284E-3	9.2721E-2	2.73411E1	-3.26705E1	-3.2638E1	2.67649E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.98937E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80022E1	-5.96046E-4	-8.79998E1	-1.19209E-4	5.76973E-3	9.28164E-2	2.73157E1	-3.26868E1	-3.26231E1	2.66478E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.98592E-1
2.2E1	4.3E1	1.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80022E1	-7.39098E-4	-8.8E1	1.19209E-4	5.17368E-3	9.29356E-2	2.73027E1	-3.26567E1	-3.26284E1	2.67839E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9911E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80025E1	-4.05312E-4	-8.80001E1	9.53674E-5	4.86374E-3	9.28879E-2	2.73411E1	-3.26837E1	-3.25864E1	2.68182E1	1.73677E-7	2.51919E-3	2.51919E-3	6.32328E-3	1.97565E-1