[Scan]
initial_time=2016-02-16T00:39:43
final_time=2016-02-16T00:40:02
ip_count=19
run=1030
dataset=3
scan=243
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.77465E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.64766E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=3.73948E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.61136E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=7.69329E-10
mult1=-8.95775E-9
mult2=-2.83239E-9
rf_tmon=-2.76402E-3
rf_agc=3.38263E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=4.0977E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71577E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20108E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05443E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=3.04505E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.19958E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98818E0
lens1_imon=1.52745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03555E1
cs_ea2_imon=1.57488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.02451E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.00424E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.86881E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15335E1
os_ea1_imon=1.90157E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.1128E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23971E0
cs_ionrep_imon=1.2627E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.24795E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=7.52664E-10
tplens_vset=1.4E-1
tplens_vmon=1.60073E0
tplens_imon=-1.25456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26579E1
iondef3_imon=1.49029E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26176E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98583E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.0983E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=1.99925E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74255E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.88789E-1
os_ea2_imon=-2.67032E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00704E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63239E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10649E1
os_restr2_imon=2.88467E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.28101E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67932E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.9275E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.31473E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09951E0
cs_ionaccel_imon=-1.93115E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.10135E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86014E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.50905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.2082E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=6.06851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33951E1
os_fil1_imon=5.63517E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.26897E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6594E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30784E1
cs_fil1_imon=1.00715E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62684E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66119E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.33773E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99131E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27437E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22447E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.45186E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2382E4	1.2E1	1.47E2	4.1E1	-7.27828E-2	-8.80023E1	-4.76837E-4	-8.80001E1	3.09944E-4	5.24521E-3	9.29356E-2	2.73201E1	-3.26831E1	-3.26236E1	2.6803E1	1.73605E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.99E-1
2.0E0	6.428E3	6.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80023E1	-6.4373E-4	-8.8E1	3.09944E-4	5.50747E-3	9.2864E-2	2.72943E1	-3.26759E1	-3.26068E1	2.67776E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9917E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80024E1	-5.00679E-4	-8.80002E1	2.14577E-4	5.4121E-3	9.34124E-2	2.73062E1	-3.26778E1	-3.26493E1	2.68093E1	1.73605E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.99401E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80022E1	-5.72205E-4	-8.8E1	4.52995E-4	5.67436E-3	9.31025E-2	2.73111E1	-3.26518E1	-3.26152E1	2.67806E1	1.73605E-7	2.51058E-3	2.51058E-3	6.30221E-3	1.98955E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80023E1	-6.91414E-4	-8.80002E1	7.15256E-5	5.6982E-3	9.3174E-2	2.72955E1	-3.26254E1	-3.26597E1	2.67758E1	1.73831E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00673E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80023E1	-5.96046E-4	-8.80001E1	1.66893E-4	5.57899E-3	9.28879E-2	2.72961E1	-3.26404E1	-3.26398E1	2.6798E1	1.7368E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80024E1	-5.24521E-4	-8.80001E1	-2.38419E-5	5.14984E-3	9.30309E-2	2.73252E1	-3.26537E1	-3.2616E1	2.67704E1	1.73831E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80024E1	-5.72205E-4	-8.80002E1	3.57628E-4	5.4121E-3	9.30309E-2	2.72883E1	-3.26518E1	-3.26296E1	2.68136E1	1.73679E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9917E-1
1.2E1	2.85E2	1.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80025E1	-4.76837E-4	-8.80001E1	1.43051E-4	5.55515E-3	9.31263E-2	2.73339E1	-3.26488E1	-3.26464E1	2.67704E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98592E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80022E1	-3.57628E-4	-8.8E1	7.39098E-4	5.48363E-3	9.30309E-2	2.73339E1	-3.26374E1	-3.26092E1	2.67902E1	1.7368E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.9911E-1
1.4E1	7.43E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80022E1	-7.86781E-4	-8.80001E1	2.86102E-4	5.43594E-3	9.31263E-2	2.73558E1	-3.26773E1	-3.26661E1	2.67613E1	1.73679E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.00876E-1
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80024E1	-7.86781E-4	-8.79997E1	1.66893E-4	5.74589E-3	9.34362E-2	2.73117E1	-3.26236E1	-3.2626E1	2.68136E1	1.73755E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.00325E-1
1.6E1	3.297E3	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.8002E1	-5.00679E-4	-8.79998E1	9.53674E-5	5.48363E-3	9.31978E-2	2.73309E1	-3.26296E1	-3.26344E1	2.67788E1	1.73605E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.00151E-1
1.7E1	4.3127E4	1.9E1	6.87E2	4.7E2	-7.201E-2	-8.80022E1	-3.57628E-4	-8.80004E1	1.19209E-4	5.4121E-3	9.31263E-2	2.73099E1	-3.26404E1	-3.26374E1	2.67938E1	1.73755E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98592E-1
1.8E1	1.96452E5	1.28E2	7.27E2	5.0E2	-7.19325E-2	-8.8002E1	-4.05312E-4	-8.79999E1	2.6226E-4	5.50747E-3	9.32217E-2	2.73267E1	-3.26855E1	-3.26699E1	2.68028E1	1.7368E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.00673E-1
1.9E1	2.485E3	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80021E1	-3.33786E-4	-8.79999E1	2.86102E-4	5.26905E-3	9.31025E-2	2.73273E1	-3.26705E1	-3.2653E1	2.6786E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00847E-1
2.0E1	4.35E2	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80023E1	-7.15256E-4	-8.8E1	3.57628E-4	5.29289E-3	9.31263E-2	2.72504E1	-3.27077E1	-3.25539E1	2.67878E1	1.7368E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99803E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80022E1	-4.05312E-4	-8.80001E1	4.29153E-4	5.55515E-3	9.30786E-2	2.72958E1	-3.26446E1	-3.26243E1	2.66559E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.00151E-1
2.2E1	5.6E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80023E1	-6.4373E-4	-8.79999E1	2.6226E-4	5.24521E-3	9.32455E-2	2.73464E1	-3.26012E1	-3.26502E1	2.68058E1	1.73605E-7	2.51182E-3	2.51182E-3	6.31269E-3	1.99729E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80022E1	-7.15256E-4	-8.8E1	3.57628E-4	5.45979E-3	9.3174E-2	2.73279E1	-3.26176E1	-3.26579E1	2.67932E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00021E-1