[Scan]
initial_time=2016-02-16T00:40:10
final_time=2016-02-16T00:40:29
ip_count=19
run=1030
dataset=3
scan=244
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.73983E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.82552E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=4.25196E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.71752E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=7.93421E-10
mult1=-1.09272E-8
mult2=-2.74891E-9
rf_tmon=-4.66306E-3
rf_agc=3.35288E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=3.91686E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.72161E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12559E2
lens4a_imon=2.05176E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.04577E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0454E2
lens23_imon=1.0242E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05433E1
cs_ea1_imon=2.21559E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04316E0
lens1_imon=1.87084E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.54579E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.00324E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.21023E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=2.88395E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14807E1
os_ea1_imon=1.91314E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63359E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27793E0
cs_ionrep_imon=1.23793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93932E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=3.24327E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=7.57885E-10
tplens_vset=1.4E-1
tplens_vmon=1.50985E0
tplens_imon=-5.12038E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25849E1
iondef3_imon=1.54255E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27013E1
iondef2_imon=1.56526E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02987E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.86012E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21124E0
ionrepsh_imon=1.98812E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34661E1
lens5b_imon=2.16981E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.31295E-1
os_ea2_imon=-4.43544E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71522E1
cs_ef2a_imon=3.20651E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37358E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=2.86557E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.34795E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.29002E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73416E1
iondef1_imon=1.07607E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67985E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.94168E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=3.92747E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.99962E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.04128E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.74691E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93753E3
defgrida_imon=7.17733E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=6.89614E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=5.68127E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33952E1
os_fil1_imon=4.76421E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.32302E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66014E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30742E1
cs_fil1_imon=1.00703E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62732E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65849E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0995E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.63806E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72367E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22386E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.98645E-1
res40_imon=-2.60509E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=135
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2706E4	1.0E1	1.47E2	4.1E1	-7.12368E-2	-8.80025E1	-4.05312E-4	-8.79998E1	1.43051E-4	5.34058E-3	9.31263E-2	2.73207E1	-3.26301E1	-3.26335E1	2.67682E1	1.7368E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.9911E-1
2.0E0	6.374E3	8.0E0	3.16E2	1.6E2	-7.12368E-2	-8.80024E1	-3.57628E-4	-8.79996E1	-2.38419E-5	5.29289E-3	9.32932E-2	2.73063E1	-3.26597E1	-3.26753E1	2.67914E1	1.73679E-7	2.5131E-3	2.5131E-3	6.31548E-3	1.98661E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80025E1	-5.96046E-4	-8.79998E1	7.15256E-5	5.62668E-3	9.31978E-2	2.72648E1	-3.26933E1	-3.2647E1	2.67842E1					
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80023E1	-4.76837E-4	-8.80001E1	5.00679E-4	5.19753E-3	9.31025E-2	2.72821E1	-3.27051E1	-3.25812E1	2.67758E1	1.73755E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.98592E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.286E-2	-8.80023E1	-4.76837E-4	-8.8E1	3.09944E-4	5.48363E-3	9.31978E-2	2.73225E1	-3.26699E1	-3.26392E1	2.67974E1	1.73605E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.98322E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80023E1	-2.86102E-4	-8.79999E1	-1.19209E-4	5.38826E-3	9.32217E-2	2.72762E1	-3.26638E1	-3.259E1	2.6804E1	1.7368E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80024E1	-5.24521E-4	-8.79999E1	5.24521E-4	5.38826E-3	9.31025E-2	2.73123E1	-3.2632E1	-3.26591E1	2.67852E1	1.73679E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.98661E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80023E1	-4.05312E-4	-8.79999E1	4.29153E-4	5.24521E-3	9.32217E-2	2.72847E1	-3.26669E1	-3.2629E1	2.68217E1	1.7368E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.00673E-1
1.2E1	3.34E2	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80023E1	-6.67572E-4	-8.80004E1	2.86102E-4	4.95911E-3	9.32693E-2	2.72961E1	-3.26092E1	-3.2617E1	2.6752E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00151E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80021E1	-7.15256E-4	-8.8E1	5.72205E-4	4.98295E-3	9.32217E-2	2.72874E1	-3.26785E1	-3.26419E1	2.67944E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98937E-1
1.4E1	8.05E2	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80022E1	-2.86102E-4	-8.80002E1	3.57628E-4	5.126E-3	9.29117E-2	2.7318E1	-3.26634E1	-3.26817E1	2.6797E1	1.73605E-7	2.5131E-3	2.5131E-3	6.33436E-3	1.98491E-1
1.5E1	7.1E1	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80023E1	-6.4373E-4	-8.80001E1	5.72205E-4	5.43594E-3	9.31978E-2	2.72847E1	-3.26771E1	-3.26554E1	2.68274E1	1.73681E-7	2.52139E-3	2.52139E-3	6.31858E-3	1.98872E-1
1.6E1	3.33E3	2.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80023E1	-4.05312E-4	-8.79999E1	4.05312E-4	5.79357E-3	9.31978E-2	2.72624E1	-3.26266E1	-3.26368E1	2.67968E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98937E-1
1.7E1	4.3513E4	2.5E1	6.87E2	4.7E2	-7.19325E-2	-8.80023E1	-3.09944E-4	-8.8E1	5.48363E-4	5.62668E-3	9.31263E-2	2.73075E1	-3.26609E1	-3.262E1	2.67668E1	1.73605E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.99283E-1
1.8E1	1.96587E5	1.26E2	7.27E2	5.0E2	-7.21643E-2	-8.80026E1	-4.05312E-4	-8.8E1	3.57628E-4	5.45979E-3	9.31501E-2	2.73285E1	-3.26687E1	-3.25894E1	2.67692E1	1.73831E-7	2.51552E-3	2.51552E-3	6.3514E-3	1.9963E-1
1.9E1	2.473E3	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80022E1	-4.76837E-4	-8.8E1	1.43051E-4	5.4121E-3	9.3174E-2	2.73488E1	-3.26614E1	-3.26242E1	2.68621E1	1.7368E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99283E-1
2.0E1	3.7E2	0.0E0	8.08E2	5.58E2	-7.13143E-2	-8.80021E1	-3.57628E-4	-8.79998E1	2.38419E-4	5.74589E-3	9.31263E-2	2.73063E1	-3.2645E1	-3.26291E1	2.67595E1	1.7368E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.8002E1	-5.96046E-4	-8.80001E1	5.48363E-4	5.4121E-3	9.31263E-2	2.7321E1	-3.26567E1	-3.26201E1	2.68372E1	1.73755E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99283E-1
2.2E1	5.1E1	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80017E1	-4.05312E-4	-8.80001E1	2.86102E-4	5.4121E-3	9.29117E-2	2.73027E1	-3.26514E1	-3.25888E1	2.67998E1	1.73679E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9934E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80022E1	-5.24521E-4	-8.80001E1	2.14577E-4	5.43594E-3	9.30309E-2	2.73416E1	-3.27013E1	-3.25849E1	2.67985E1	1.73605E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.9917E-1