[Scan]
initial_time=2016-02-16T00:41:29
final_time=2016-02-16T00:41:49
ip_count=19
run=1030
dataset=3
scan=247
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.83637E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.73778E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=3.84605E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.66547E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=8.37779E-10
mult1=-9.5357E-9
mult2=-2.94816E-9
rf_tmon=-4.7888E-3
rf_agc=3.32254E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=4.24123E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69317E0
bslens_imon=2.84057E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53454E1
cs_ef1b_imon=3.03856E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04577E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05066E1
cs_ea1_imon=2.22352E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06359E0
lens1_imon=1.16066E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03534E1
cs_ea2_imon=1.60023E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84118E1
cs_ef1a_imon=3.02667E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.79336E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=2.87602E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15468E1
os_ea1_imon=1.90016E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.09731E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=1.28011E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93142E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01527E1
cs_anode1_imon=3.24831E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.07245E-10
tplens_vset=1.4E-1
tplens_vmon=1.60779E0
tplens_imon=-8.30488E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.259E1
iondef3_imon=1.51479E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.60383E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98559E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=3.70479E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29356E0
ionrepsh_imon=2.04147E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33592E1
lens5b_imon=2.15971E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.95246E-1
os_ea2_imon=-5.94952E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06169E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62519E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27747E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.30289E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.2893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72859E1
iondef1_imon=1.07282E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.01173E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=3.17836E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-2.05728E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56045E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86092E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.99205E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.59693E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.06557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47675E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=5.02249E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.19088E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6611E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=1.00813E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63015E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66249E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1382E-2
os_fil2_imon=-2.31758E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84096E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22438E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.99977E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36177E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2638E4	5.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80024E1	-3.09944E-4	-8.80003E1	4.52995E-4	5.26905E-3	9.32932E-2	2.73151E1	-3.26691E1	-3.26307E1	2.68198E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.00363E-1
2.0E0	6.409E3	3.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80026E1	1.43051E-4	-8.8E1	3.33786E-4	5.05447E-3	9.32217E-2	2.73135E1	-3.26536E1	-3.25876E1	2.67938E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00705E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80023E1	1.43051E-4	-8.8E1	2.38419E-4	5.45979E-3	9.3174E-2	2.72703E1	-3.26136E1	-3.26472E1	2.68154E1	1.73755E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98937E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80022E1	-4.76837E-5	-8.79998E1	7.15256E-5	5.22137E-3	9.34362E-2	2.73009E1	-3.26639E1	-3.26464E1	2.68136E1	1.73755E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.98764E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80021E1	-7.15256E-5	-8.79997E1	1.19209E-4	5.53131E-3	9.34601E-2	2.72886E1	-3.26437E1	-3.26042E1	2.67812E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80019E1	-3.09944E-4	-8.79998E1	2.14577E-4	5.43594E-3	9.34124E-2	2.73087E1	-3.2641E1	-3.26855E1	2.6798E1	1.73755E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80023E1	-2.38419E-4	-8.79999E1	2.38419E-4	5.22137E-3	9.34362E-2	2.73177E1	-3.26741E1	-3.26663E1	2.68262E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80023E1	-2.6226E-4	-8.79998E1	2.6226E-4	5.4121E-3	9.31263E-2	2.73333E1	-3.26549E1	-3.26074E1	2.67914E1	1.73605E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.9951E-1
1.2E1	2.95E2	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80024E1	-6.67572E-4	-8.8E1	4.05312E-4	5.65052E-3	9.32455E-2	2.73045E1	-3.2638E1	-3.25948E1	2.6846E1	1.7368E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.99456E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80021E1	-3.33786E-4	-8.79999E1	3.33786E-4	5.79357E-3	9.31025E-2	2.73305E1	-3.26962E1	-3.26183E1	2.6825E1	1.73831E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.99456E-1
1.4E1	7.35E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80022E1	-3.57628E-4	-8.80002E1	2.86102E-4	5.50747E-3	9.3174E-2	2.73141E1	-3.26579E1	-3.26038E1	2.68124E1	1.7368E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.9963E-1
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80025E1	-2.6226E-4	-8.8E1	2.86102E-4	5.34058E-3	9.31263E-2	2.72985E1	-3.26452E1	-3.26314E1	2.68316E1	1.7368E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99977E-1
1.6E1	3.317E3	1.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80024E1	-3.57628E-4	-8.80001E1	5.24521E-4	5.34058E-3	9.3174E-2	2.73183E1	-3.2647E1	-3.26284E1	2.68106E1	1.7368E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9963E-1
1.7E1	4.4035E4	2.0E1	6.87E2	4.7E2	-7.44059E-2	-8.80023E1	-4.76837E-4	-8.80002E1	4.76837E-4	5.93662E-3	9.30071E-2	2.72943E1	-3.26633E1	-3.2635E1	2.67848E1	1.73753E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.9951E-1
1.8E1	1.97256E5	1.28E2	7.27E2	5.0E2	-7.34782E-2	-8.80023E1	-6.4373E-4	-8.80001E1	2.86102E-4	5.96046E-3	9.33647E-2	2.7288E1	-3.26337E1	-3.26484E1	2.67734E1	1.73755E-7	2.51334E-3	2.51334E-3	6.28552E-3	1.99456E-1
1.9E1	2.454E3	1.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80025E1	-4.05312E-4	-8.80001E1	1.43051E-4	5.57899E-3	9.31025E-2	2.72907E1	-3.26573E1	-3.26086E1	2.6807E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.00151E-1
2.0E1	4.16E2	1.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80024E1	-2.14577E-4	-8.79999E1	4.29153E-4	5.72205E-3	9.33409E-2	2.73157E1	-3.26726E1	-3.26071E1	2.68094E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.01022E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80025E1	-5.72205E-4	-8.79999E1	5.48363E-4	5.65052E-3	9.32693E-2	2.73237E1	-3.26585E1	-3.26008E1	2.68262E1	1.73679E-7	2.50882E-3	2.50882E-3	6.28592E-3	2.00534E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80027E1	-5.48363E-4	-8.79999E1	3.8147E-4	5.53131E-3	9.32932E-2	2.72992E1	-3.26402E1	-3.2606E1	2.68178E1	1.73901E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.01391E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80025E1	-1.90735E-4	-8.8E1	5.48363E-4	5.38826E-3	9.2864E-2	2.72859E1	-3.26885E1	-3.259E1	2.67938E1	1.7368E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.99977E-1