[Scan]
initial_time=2016-02-16T00:41:56
final_time=2016-02-16T00:42:16
ip_count=19
run=1030
dataset=3
scan=248
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.79873E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.7652E-10
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=4.05776E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.64508E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=7.66075E-10
mult1=-9.30693E-9
mult2=-2.98609E-9
rf_tmon=-5.13127E-3
rf_agc=3.32615E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=3.93093E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.39106E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20184E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05482E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=3.05237E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04662E2
lens23_imon=1.02061E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=2.1918E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00882E0
lens1_imon=1.87431E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64336E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0428E1
cs_ea2_imon=1.58479E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84475E1
cs_ef1a_imon=3.01519E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=4.14741E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.87235E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=1.87113E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63554E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19016E0
cs_ionrep_imon=1.262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=3.24108E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=8.05414E-10
tplens_vset=1.4E-1
tplens_vmon=1.63376E0
tplens_imon=7.27508E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26098E1
iondef3_imon=1.49383E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26861E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03022E2
lens6_imon=2.98806E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.44937E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24502E0
ionrepsh_imon=2.00067E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33929E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74188E1
cs_ef2b_imon=3.12501E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.70502E-1
os_ea2_imon=-3.59057E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71142E1
cs_ef2a_imon=3.18826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62797E0
os_ef2alow_imon=-2.38692E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71746E-1
os_ef2bup_imon=-5.21577E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.86228E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01722E1
cs_anode2_imon=2.28643E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.12573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67818E1
iondef4_imon=1.09407E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.91662E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=3.79586E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1006E0
cs_ionaccel_imon=-1.88996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47209E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.88593E-6
window_vset=0.0E0
window_vmon=2.21161E-1
window_imon=-1.08717E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39272E-4
mask2_vset=0.0E0
mask2_vmon=-1.86564E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92686E3
multa_neg_imon=7.96917E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.46492E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.27191E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58273E0
defgridb_imon=6.44369E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33982E1
os_fil1_imon=4.84315E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.81449E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66242E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=1.0096E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62534E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65859E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14195E-2
os_fil2_imon=-2.33904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.82899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71921E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30026E-1
cs_fil2_imon=-2.08998E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19993E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22446E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.51007E-3
foreline_cvt_pmon=2.51007E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.69459E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2621E4	1.8E1	1.47E2	4.1E1	-7.40192E-2	-8.80025E1	-5.48363E-4	-8.80002E1	5.48363E-4	5.60284E-3	9.29594E-2	2.73535E1	-3.27003E1	-3.26413E1	2.68064E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9968E-1
2.0E0	6.387E3	3.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80027E1	-5.24521E-4	-8.79997E1	1.90735E-4	5.43594E-3	9.3317E-2	2.73235E1	-3.26664E1	-3.26223E1	2.67764E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00021E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80028E1	-4.05312E-4	-8.79998E1	2.6226E-4	5.55515E-3	9.3174E-2	2.73128E1	-3.26425E1	-3.26254E1	2.67637E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00847E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80025E1	-3.8147E-4	-8.79998E1	4.29153E-4	5.36442E-3	9.33409E-2	2.72791E1	-3.26815E1	-3.26278E1	2.67682E1	1.73679E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80025E1	-1.90735E-4	-8.79997E1	1.19209E-4	5.60284E-3	9.31978E-2	2.72869E1	-3.26761E1	-3.25594E1	2.67856E1	1.73605E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.00876E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80026E1	-2.38419E-5	-8.79998E1	5.00679E-4	5.45979E-3	9.30309E-2	2.72886E1	-3.26686E1	-3.26006E1	2.6767E1	1.73605E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.99394E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80023E1	-1.90735E-4	-8.80001E1	2.14577E-4	5.6982E-3	9.31025E-2	2.7291E1	-3.26413E1	-3.2634E1	2.67514E1	1.73605E-7	2.5118E-3	2.5118E-3	6.31321E-3	2.00386E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80028E1	-1.90735E-4	-8.8E1	4.52995E-4	5.53131E-3	9.34124E-2	2.73369E1	-3.26512E1	-3.26038E1	2.68198E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99803E-1
1.2E1	3.06E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80023E1	-5.00679E-4	-8.80001E1	4.05312E-4	5.60284E-3	9.32693E-2	2.72651E1	-3.26585E1	-3.26428E1	2.67978E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00325E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80024E1	-2.14577E-4	-8.80001E1	3.57628E-4	5.67436E-3	9.32932E-2	2.7301E1	-3.26874E1	-3.26366E1	2.68172E1	1.73605E-7	2.51287E-3	2.51287E-3	6.32328E-3	2.01072E-1
1.4E1	7.72E2	2.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80024E1	-4.05312E-4	-8.80002E1	2.6226E-4	5.36442E-3	9.31978E-2	2.72847E1	-3.26518E1	-3.26386E1	2.67956E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98764E-1
1.5E1	9.2E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80027E1	-2.6226E-4	-8.80001E1	5.00679E-4	5.62668E-3	9.31501E-2	2.73175E1	-3.27328E1	-3.26331E1	2.67854E1	1.73605E-7	2.50775E-3	2.50775E-3	6.32356E-3	1.9951E-1
1.6E1	3.367E3	3.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80026E1	-5.24521E-4	-8.80003E1	3.33786E-4	5.05447E-3	9.32455E-2	2.73333E1	-3.26398E1	-3.26494E1	2.67704E1	1.73906E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98592E-1
1.7E1	4.376E4	2.6E1	6.87E2	4.7E2	-7.20871E-2	-8.80027E1	-8.58307E-4	-8.80001E1	1.66893E-4	5.19753E-3	9.30548E-2	2.73285E1	-3.27029E1	-3.26116E1	2.67998E1	1.73679E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00021E-1
1.8E1	1.96632E5	1.03E2	7.27E2	5.0E2	-7.23189E-2	-8.80026E1	-7.15256E-4	-8.80001E1	2.86102E-4	5.26905E-3	9.3317E-2	2.73057E1	-3.26567E1	-3.2626E1	2.67728E1	1.73758E-7	2.51025E-3	2.51025E-3	6.31858E-3	1.98696E-1
1.9E1	2.552E3	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80025E1	-5.96046E-4	-8.80002E1	2.14577E-4	5.81741E-3	9.29356E-2	2.73033E1	-3.26476E1	-3.26242E1	2.6837E1	1.73755E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00499E-1
2.0E1	3.97E2	1.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80024E1	-5.96046E-4	-8.80002E1	-9.53674E-5	5.74589E-3	9.31263E-2	2.7344E1	-3.26744E1	-3.26272E1	2.67949E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00499E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80023E1	-2.38419E-4	-8.80004E1	-2.38419E-5	5.60284E-3	9.31263E-2	2.72892E1	-3.26413E1	-3.26124E1	2.68052E1	1.73605E-7	2.50882E-3	2.50882E-3	6.31278E-3	1.9985E-1
2.2E1	4.2E1	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80024E1	-5.24521E-4	-8.80006E1	2.86102E-4	5.43594E-3	9.31025E-2	2.73033E1	-3.26502E1	-3.25912E1	2.6797E1	1.73677E-7	2.51603E-3	2.51603E-3	6.31798E-3	2.00399E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80025E1	-1.19209E-4	-8.80004E1	3.57628E-4	5.34058E-3	9.31501E-2	2.73243E1	-3.26861E1	-3.26098E1	2.67818E1	1.7368E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.00151E-1