[Scan]
initial_time=2016-02-16T00:42:23
final_time=2016-02-16T00:42:42
ip_count=19
run=1030
dataset=3
scan=249
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.81253E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.72836E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=3.50595E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.60946E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=7.9118E-10
mult1=-1.02702E-8
mult2=-2.83838E-9
rf_tmon=-4.62057E-3
rf_agc=3.33396E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=3.72112E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61807E0
bslens_imon=2.28901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20169E1
lens5a_imon=2.01948E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12539E2
lens4a_imon=2.05435E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53496E1
cs_ef1b_imon=3.03316E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.01779E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04429E1
cs_ea1_imon=2.19937E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05037E0
lens1_imon=1.87084E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.56706E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84124E1
cs_ef1a_imon=3.01189E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.78036E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=2.87963E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14789E1
os_ea1_imon=1.86591E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.09478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26351E0
cs_ionrep_imon=1.3021E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.24291E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=7.18212E-10
tplens_vset=1.4E-1
tplens_vmon=1.55371E0
tplens_imon=-5.44483E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.61501E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.0381E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=2.00722E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34319E1
lens5b_imon=2.24984E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74429E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.75156E-1
os_ea2_imon=-4.79594E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00316E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.642E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69793E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10583E1
os_restr2_imon=2.86845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.32235E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.26515E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.10094E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67631E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.8971E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=2.94185E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10191E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02042E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-5.32807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.54503E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.90335E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58202E0
defgridb_imon=6.31214E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33951E1
os_fil1_imon=4.92639E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.28408E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65822E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=1.00768E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63255E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66074E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78425E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22465E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.41583E-1
res40_imon=-2.68437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2247E4	1.2E1	1.47E2	4.1E1	-7.37103E-2	-8.80021E1	-5.96046E-4	-8.8E1	1.43051E-4	5.10216E-3	9.32932E-2	2.72327E1	-3.26202E1	-3.26666E1	2.68151E1					
2.0E0	6.556E3	1.0E1	3.16E2	1.6E2	-7.37874E-2	-8.80023E1	-1.43051E-4	-8.80005E1	1.43051E-4	6.03199E-3	9.31263E-2	2.73285E1	-3.26789E1	-3.26122E1	2.67962E1	1.73605E-7	2.50762E-3	2.50762E-3	6.29684E-3	1.99896E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80025E1	-1.19209E-4	-8.80002E1	2.6226E-4	5.4121E-3	9.32455E-2	2.73393E1	-3.26627E1	-3.26362E1	2.68064E1	1.73681E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.00285E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80024E1	-4.29153E-4	-8.80002E1	4.05312E-4	5.55515E-3	9.29117E-2	2.73016E1	-3.26767E1	-3.2626E1	2.68118E1	1.7368E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.9911E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80025E1	-3.57628E-4	-8.80004E1	2.6226E-4	5.74589E-3	9.32455E-2	2.72959E1	-3.26444E1	-3.26603E1	2.6792E1	1.73679E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80022E1	-4.05312E-4	-8.80007E1	2.6226E-4	5.84126E-3	9.31501E-2	2.72733E1	-3.26561E1	-3.265E1	2.6804E1	1.73605E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80022E1	-3.57628E-4	-8.80003E1	-9.53674E-5	5.48363E-3	9.30786E-2	2.72815E1	-3.26585E1	-3.26166E1	2.67908E1	1.73605E-7	2.51248E-3	2.51248E-3	6.32978E-3	1.98872E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80021E1	-6.67572E-4	-8.79998E1	-7.15256E-5	5.91278E-3	9.31263E-2	2.72843E1	-3.26689E1	-3.26327E1	2.68082E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9934E-1
1.2E1	3.35E2	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80023E1	-1.19209E-4	-8.8E1	1.90735E-4	5.48363E-3	9.30309E-2	2.73075E1	-3.26791E1	-3.26254E1	2.6795E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98764E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80023E1	-5.24521E-4	-8.80001E1	1.90735E-4	5.6982E-3	9.28879E-2	2.73327E1	-3.26777E1	-3.26476E1	2.68088E1	1.73755E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.9911E-1
1.4E1	8.01E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80026E1	-3.57628E-4	-8.80001E1	4.76837E-4	5.31673E-3	9.27925E-2	2.73165E1	-3.26068E1	-3.2593E1	2.68118E1	1.7368E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99977E-1
1.5E1	6.9E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80024E1	-2.86102E-4	-8.80004E1	4.05312E-4	5.62668E-3	9.29832E-2	2.73358E1	-3.26773E1	-3.26006E1	2.68053E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98937E-1
1.6E1	3.236E3	1.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80024E1	-2.6226E-4	-8.80002E1	3.33786E-4	5.48363E-3	9.25064E-2	2.73027E1	-3.26897E1	-3.26223E1	2.67974E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9968E-1
1.7E1	4.3311E4	2.1E1	6.87E2	4.7E2	-7.15461E-2	-8.80026E1	-3.57628E-4	-8.80001E1	2.6226E-4	5.76973E-3	9.29594E-2	2.73169E1	-3.26608E1	-3.25936E1	2.68082E1	1.7368E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00151E-1
1.8E1	1.9559E5	1.06E2	7.27E2	5.0E2	-7.21643E-2	-8.80025E1	-2.14577E-4	-8.80001E1	2.38419E-4	5.84126E-3	9.29594E-2	2.73069E1	-3.26675E1	-3.2644E1	2.67625E1	1.7368E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.99803E-1
1.9E1	2.526E3	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80023E1	-4.29153E-4	-8.80002E1	4.29153E-4	5.45979E-3	9.31501E-2	2.73033E1	-3.26844E1	-3.26272E1	2.6798E1	1.73605E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.00363E-1
2.0E1	3.92E2	1.0E0	8.08E2	5.58E2	-7.17007E-2	-8.80026E1	-2.38419E-4	-8.80001E1	4.52995E-4	5.88894E-3	9.30071E-2	2.72979E1	-3.26416E1	-3.26464E1	2.68306E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80026E1	-7.15256E-4	-8.80002E1	2.6226E-4	5.93662E-3	9.31978E-2	2.73122E1	-3.26691E1	-3.26425E1	2.67651E1	1.73827E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.99E-1
2.2E1	4.9E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80024E1	-4.05312E-4	-8.80003E1	2.38419E-4	5.55515E-3	9.31263E-2	2.73387E1	-3.26183E1	-3.26726E1	2.68184E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99803E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80023E1	-3.33786E-4	-8.80002E1	2.6226E-4	5.6982E-3	9.29356E-2	2.73153E1	-3.26915E1	-3.26218E1	2.67631E1	1.73753E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.99E-1