[Scan]
initial_time=2016-02-16T00:43:16
final_time=2016-02-16T00:43:35
ip_count=19
run=1030
dataset=3
scan=251
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.74958E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.81813E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=3.7421E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.61871E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=7.80106E-10
mult1=-8.71694E-9
mult2=-2.65673E-9
rf_tmon=-5.01712E-3
rf_agc=3.28529E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.94368E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70397E0
bslens_imon=2.71669E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19653E1
lens5a_imon=1.95041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05026E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.02883E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.22436E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94217E0
lens1_imon=1.308E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.99928E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0359E1
cs_ea2_imon=1.60496E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=2.99243E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.77703E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10775E1
os_restr1_imon=2.89945E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15866E1
os_ea1_imon=1.88776E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.0728E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19311E0
cs_ionrep_imon=1.22271E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=3.26813E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=7.62796E-10
tplens_vset=1.4E-1
tplens_vmon=1.64969E0
tplens_imon=-1.07759E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.47613E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26206E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98994E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.73387E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3105E0
ionrepsh_imon=1.99111E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3315E1
lens5b_imon=2.1557E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.10163E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.32748E-1
os_ea2_imon=-1.07759E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.00853E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65222E0
os_ef2alow_imon=-2.35641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.07925E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.89476E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.30371E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.11865E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.11368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.89084E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.32665E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07428E0
cs_ionaccel_imon=-2.05728E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56117E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.79501E-1
window_imon=-6.69758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.38745E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-3.23777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=8.03642E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.63128E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50164E3
multb_neg_imon=7.35331E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22838E0
defgridb_imon=6.3375E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33967E1
os_fil1_imon=4.44586E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.83359E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66098E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=1.00944E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66286E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81033E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.73707E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22488E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.50989E-3
foreline_cvt_pmon=2.50989E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06144E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2315E4	5.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80022E1	9.53674E-5	-8.8E1	7.15256E-5	5.45979E-3	9.29117E-2	2.73063E1	-3.26968E1	-3.26484E1	2.67804E1	1.73827E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.98491E-1
2.0E0	6.556E3	9.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80022E1	-2.38419E-4	-8.79998E1	1.66893E-4	5.36442E-3	9.2864E-2	2.72984E1	-3.26652E1	-3.26242E1	2.67898E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98419E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80025E1	-5.00679E-4	-8.79997E1	1.66893E-4	5.34058E-3	9.31025E-2	2.73153E1	-3.26561E1	-3.25665E1	2.6774E1	1.73755E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99456E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80023E1	-5.00679E-4	-8.79996E1	2.38419E-4	5.24521E-3	9.30071E-2	2.73225E1	-3.26735E1	-3.26356E1	2.6849E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.01022E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80026E1	-4.05312E-4	-8.8E1	3.09944E-4	5.14984E-3	9.29832E-2	2.73021E1	-3.26649E1	-3.26095E1	2.68208E1	1.7368E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00673E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80024E1	-5.72205E-4	-8.8E1	2.38419E-4	5.29289E-3	9.30548E-2	2.72606E1	-3.26735E1	-3.26338E1	2.68202E1	1.73605E-7	2.51116E-3	2.51116E-3	6.28552E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80024E1	-3.57628E-4	-8.79997E1	3.33786E-4	5.43594E-3	9.2864E-2	2.72986E1	-3.26655E1	-3.26307E1	2.6819E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.00363E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80026E1	0.0E0	-8.80001E1	5.00679E-4	5.43594E-3	9.27448E-2	2.73123E1	-3.2605E1	-3.2608E1	2.6822E1	1.73753E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.9968E-1
1.2E1	2.92E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80023E1	-2.6226E-4	-8.80001E1	1.66893E-4	5.74589E-3	9.29594E-2	2.73171E1	-3.27035E1	-3.2584E1	2.68052E1	1.73755E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.9963E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80023E1	-5.48363E-4	-8.80001E1	2.38419E-4	5.79357E-3	9.29832E-2	2.73399E1	-3.26747E1	-3.26843E1	2.67876E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99456E-1
1.4E1	7.12E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80022E1	-4.05312E-4	-8.80001E1	1.66893E-4	5.76973E-3	9.28402E-2	2.73328E1	-3.26502E1	-3.26201E1	2.67806E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9911E-1
1.5E1	7.4E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80025E1	-4.29153E-4	-8.80002E1	3.09944E-4	5.65052E-3	9.28879E-2	2.73075E1	-3.2636E1	-3.26178E1	2.68209E1	1.73605E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.98153E-1
1.6E1	3.293E3	2.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80024E1	-5.72205E-4	-8.80002E1	1.66893E-4	5.79357E-3	9.30309E-2	2.72853E1	-3.26795E1	-3.26579E1	2.68298E1	1.73679E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9917E-1
1.7E1	4.3608E4	1.9E1	6.87E2	4.7E2	-7.36328E-2	-8.80024E1	-3.09944E-4	-8.80002E1	2.38419E-5	5.48363E-3	9.3317E-2	2.72968E1	-3.26714E1	-3.26467E1	2.67956E1	1.73755E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99456E-1
1.8E1	1.96791E5	1.27E2	7.27E2	5.0E2	-7.37103E-2	-8.80023E1	-3.57628E-4	-8.80002E1	2.86102E-4	5.55515E-3	9.30786E-2	2.73363E1	-3.26687E1	-3.26404E1	2.67824E1	1.73755E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00151E-1
1.9E1	2.567E3	0.0E0	7.68E2	5.29E2	-7.39421E-2	-8.80023E1	-3.33786E-4	-8.80003E1	7.15256E-5	5.55515E-3	9.32932E-2	2.73393E1	-3.26717E1	-3.2635E1	2.67896E1	1.7368E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.01197E-1
2.0E1	3.57E2	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80023E1	-3.8147E-4	-8.80001E1	-9.53674E-5	5.57899E-3	9.30548E-2	2.72921E1	-3.26484E1	-3.26107E1	2.6771E1	1.73679E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00192E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80024E1	-8.34465E-4	-8.79998E1	1.90735E-4	5.6982E-3	9.30786E-2	2.72835E1	-3.26446E1	-3.26098E1	2.68175E1	1.7368E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.9911E-1
2.2E1	5.2E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80024E1	-8.34465E-4	-8.79999E1	1.90735E-4	5.22137E-3	9.33409E-2	2.72673E1	-3.26319E1	-3.26838E1	2.67782E1	1.73679E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9917E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80025E1	-4.76837E-4	-8.79998E1	1.43051E-4	5.55515E-3	9.31263E-2	2.72997E1	-3.26206E1	-3.26164E1	2.67914E1	1.73679E-7	2.50989E-3	2.50989E-3	6.32896E-3	2.00705E-1