[Scan]
initial_time=2016-02-16T00:44:36
final_time=2016-02-16T00:44:55
ip_count=19
run=1030
dataset=3
scan=254
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.78398E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.07836E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=3.79741E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.63012E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=7.69913E-10
mult1=-8.34368E-9
mult2=-2.70464E-9
rf_tmon=-5.29951E-3
rf_agc=3.33997E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.19283E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64096E0
bslens_imon=2.87363E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19896E1
lens5a_imon=1.99676E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04652E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53493E1
cs_ef1b_imon=3.04652E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05178E1
cs_ea1_imon=2.2311E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99186E0
lens1_imon=1.18773E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.98477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03647E1
cs_ea2_imon=1.54536E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.0031E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=4.04656E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11098E1
os_restr1_imon=2.88708E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15128E1
os_ea1_imon=1.93579E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63423E1
os_ef1bup_imon=3.09629E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26985E0
cs_ionrep_imon=1.24527E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93328E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.25648E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=7.45082E-10
tplens_vset=1.4E-1
tplens_vmon=1.59124E0
tplens_imon=-5.7406E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.54242E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.54719E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98577E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.1889E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25087E0
ionrepsh_imon=2.03496E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34166E1
lens5b_imon=2.1716E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74258E1
cs_ef2b_imon=3.13896E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.12647E-1
os_ea2_imon=-5.202E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00895E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.1689E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62156E0
os_ef2alow_imon=-2.46204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.21533E-1
os_ef2bup_imon=-5.23155E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10855E1
os_restr2_imon=2.88222E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.32022E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01547E1
cs_anode2_imon=2.26619E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.06052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67878E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.9361E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.37017E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09708E0
cs_ionaccel_imon=-1.84451E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47193E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56305E1
einzel_imon=7.65041E-6
window_vset=0.0E0
window_vmon=1.97636E-1
window_imon=-9.5752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39114E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-5.45837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.42444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.91757E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.33261E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.13696E0
defgridb_imon=5.96259E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3398E1
os_fil1_imon=5.52751E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.13484E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66324E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30793E1
cs_fil1_imon=1.00782E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6629E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29199E-2
os_fil2_imon=-2.55023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.30374E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80709E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32744E-1
cs_fil2_imon=-2.43795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98988E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22556E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29157E-3
inlet_lpb_pmon=1.98561E-1
chamber_ion_pmon=1.7375E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.69988E-1
res40_imon=-2.42087E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2641E4	8.0E0	1.47E2	4.1E1	-7.16233E-2	-8.80021E1	-6.19888E-4	-8.79999E1	9.53674E-5	5.57899E-3	9.30548E-2	2.7337E1	-3.26874E1	-3.26313E1	2.67984E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.00673E-1
2.0E0	6.479E3	5.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80023E1	-5.48363E-4	-8.79998E1	1.19209E-4	5.53131E-3	9.29117E-2	2.72486E1	-3.26603E1	-3.26603E1	2.67716E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.00705E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80023E1	-8.10623E-4	-8.80001E1	2.6226E-4	5.67436E-3	9.28879E-2	2.73171E1	-3.26591E1	-3.26188E1	2.67812E1	1.73681E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80025E1	-7.86781E-4	-8.80003E1	2.86102E-4	5.48363E-3	9.32455E-2	2.73588E1	-3.26549E1	-3.26012E1	2.68178E1	1.73605E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80023E1	-8.10623E-4	-8.80003E1	-1.19209E-4	5.6982E-3	9.28879E-2	2.73357E1	-3.26741E1	-3.26434E1	2.68376E1	1.73605E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9934E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80025E1	-6.19888E-4	-8.80004E1	-1.43051E-4	5.67436E-3	9.31025E-2	2.73522E1	-3.26578E1	-3.26119E1	2.67752E1	1.73605E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.99048E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80023E1	-5.48363E-4	-8.79999E1	3.57628E-4	5.07832E-3	9.30786E-2	2.73123E1	-3.26759E1	-3.26278E1	2.68238E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80026E1	-6.67572E-4	-8.80002E1	-1.43051E-4	5.45979E-3	9.2864E-2	2.73117E1	-3.26512E1	-3.2635E1	2.67944E1	1.73605E-7	2.51498E-3	2.51498E-3	6.28825E-3	2.00238E-1
1.2E1	3.35E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80023E1	-2.86102E-4	-8.80002E1	-7.15256E-5	5.38826E-3	9.31978E-2	2.7285E1	-3.26396E1	-3.25883E1	2.68418E1					
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80025E1	-5.24521E-4	-8.80001E1	4.76837E-5	5.93662E-3	9.2864E-2	2.73552E1	-3.26933E1	-3.26166E1	2.67816E1	1.73605E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.9968E-1
1.4E1	7.22E2	1.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80023E1	-1.43051E-4	-8.80002E1	1.43051E-4	5.34058E-3	9.30786E-2	2.72941E1	-3.26223E1	-3.26334E1	2.68207E1	1.7368E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00673E-1
1.5E1	7.5E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80025E1	1.90735E-4	-8.79997E1	4.29153E-4	5.74589E-3	9.30786E-2	2.73333E1	-3.26795E1	-3.25972E1	2.67668E1	1.7368E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99803E-1
1.6E1	3.324E3	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80023E1	-2.6226E-4	-8.8E1	5.48363E-4	6.05583E-3	9.28879E-2	2.73141E1	-3.26723E1	-3.26056E1	2.6792E1	1.7368E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99977E-1
1.7E1	4.3516E4	1.3E1	6.87E2	4.7E2	-7.39421E-2	-8.80023E1	-1.43051E-4	-8.80002E1	4.05312E-4	5.74589E-3	9.27448E-2	2.73201E1	-3.26657E1	-3.26038E1	2.68148E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.99456E-1
1.8E1	1.97238E5	1.44E2	7.27E2	5.0E2	-7.37103E-2	-8.80026E1	-5.48363E-4	-8.80004E1	4.29153E-4	5.81741E-3	9.32217E-2	2.72799E1	-3.26669E1	-3.26356E1	2.67648E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
1.9E1	2.583E3	1.0E0	7.68E2	5.29E2	-7.42513E-2	-8.80022E1	-3.57628E-4	-8.80004E1	1.19209E-4	5.96046E-3	9.29832E-2	2.72949E1	-3.26609E1	-3.26332E1	2.67896E1	1.7368E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98937E-1
2.0E1	4.17E2	1.0E0	8.08E2	5.58E2	-7.40192E-2	-8.80023E1	-1.43051E-4	-8.80003E1	0.0E0	5.79357E-3	9.2864E-2	2.72962E1	-3.26496E1	-3.26679E1	2.68274E1	1.7368E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.98764E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80021E1	-2.86102E-4	-8.8E1	1.19209E-4	5.57899E-3	9.28164E-2	2.72973E1	-3.26651E1	-3.26428E1	2.67469E1	1.73753E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.98661E-1
2.2E1	5.1E1	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.8002E1	-2.6226E-4	-8.79999E1	2.6226E-4	5.8651E-3	9.3317E-2	2.73178E1	-3.27112E1	-3.26364E1	2.67856E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98419E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80022E1	-1.43051E-4	-8.80003E1	4.76837E-4	5.19753E-3	9.31501E-2	2.73381E1	-3.26837E1	-3.2611E1	2.67878E1	1.7375E-7	2.51814E-3	2.51814E-3	6.29157E-3	1.98561E-1