[Scan]
initial_time=2016-02-16T00:45:02
final_time=2016-02-16T00:45:22
ip_count=19
run=1030
dataset=3
scan=255
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.81136E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.95391E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=3.93522E-10
ql3_vset=
ql3_vmon=-8.79996E1
ql3_imon=-1.69984E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=7.92158E-10
mult1=-1.03906E-8
mult2=-2.83438E-9
rf_tmon=-3.64724E-3
rf_agc=3.38743E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=4.16064E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65383E0
bslens_imon=2.79456E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.0487E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53337E1
cs_ef1b_imon=3.04994E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02277E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.049E1
cs_ea1_imon=2.23816E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00764E0
lens1_imon=1.68318E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64603E1
os_ef1alow_imon=2.98947E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.5494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84632E1
cs_ef1a_imon=3.00268E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.09198E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11152E1
os_restr1_imon=2.87513E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15477E1
os_ea1_imon=1.89803E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.09616E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=1.25209E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93169E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=3.25359E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=7.70319E-10
tplens_vset=1.4E-1
tplens_vmon=1.57772E0
tplens_imon=-2.31638E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.5816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=4.00174E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30519E0
ionrepsh_imon=2.02261E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.17552E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74565E1
cs_ef2b_imon=3.13717E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.27439E-1
os_ea2_imon=-4.40464E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.1813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61002E0
os_ef2alow_imon=-2.5016E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22513E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=2.87513E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23108E2
cs_ionfoca_imon=6.34034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01636E1
cs_anode2_imon=2.28191E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72865E1
iondef1_imon=1.09883E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67367E1
iondef4_imon=1.08434E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.95432E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.67892E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10581E0
cs_ionaccel_imon=-1.90386E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47303E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.66351E-6
window_vset=0.0E0
window_vmon=2.10156E-1
window_imon=-9.37738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86118E1
mask2_imon=-7.39649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.52675E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.97814E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.51259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33173E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33951E1
os_fil1_imon=5.20226E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.03459E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66197E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30797E1
cs_fil1_imon=1.0089E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62882E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66034E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.46646E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.52404E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84957E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32274E-1
cs_fil2_imon=-2.15948E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.63988E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22439E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73755E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.69835E-1
res40_imon=-2.59891E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2679E4	1.0E1	1.47E2	4.1E1	-7.32464E-2	-8.80023E1	-3.8147E-4	-8.80002E1	1.90735E-4	5.45979E-3	9.31025E-2	2.7321E1	-3.26372E1	-3.26354E1	2.68198E1	1.73605E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.01047E-1
2.0E0	6.457E3	6.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80022E1	-6.91414E-4	-8.80002E1	6.4373E-4	5.67436E-3	9.27448E-2	2.73222E1	-3.26774E1	-3.26046E1	2.6792E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9968E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80026E1	-5.48363E-4	-8.79998E1	2.38419E-4	5.67436E-3	9.30071E-2	2.72903E1	-3.26537E1	-3.26762E1	2.6852E1	1.73758E-7	2.51804E-3	2.51804E-3	6.35223E-3	2.00108E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80025E1	-6.4373E-4	-8.79999E1	3.8147E-4	5.81741E-3	9.29594E-2	2.73157E1	-3.26974E1	-3.25776E1	2.67584E1	1.73679E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80026E1	-4.76837E-4	-8.79999E1	1.66893E-4	5.96046E-3	9.30309E-2	2.72931E1	-3.2638E1	-3.26506E1	2.68268E1	1.73679E-7	2.51096E-3	2.51096E-3	6.33436E-3	1.98661E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80027E1	-4.05312E-4	-8.8E1	2.14577E-4	5.48363E-3	9.31501E-2	2.73105E1	-3.26446E1	-3.26032E1	2.67974E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80028E1	-4.29153E-4	-8.80001E1	0.0E0	5.43594E-3	9.3174E-2	2.73204E1	-3.26579E1	-3.26272E1	2.6819E1	1.73755E-7	2.50898E-3	2.50898E-3	6.32386E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80028E1	-5.72205E-4	-8.80006E1	0.0E0	5.88894E-3	9.29832E-2	2.73243E1	-3.26506E1	-3.26434E1	2.68052E1	1.73755E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.9963E-1
1.2E1	3.34E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80025E1	-3.09944E-4	-8.80002E1	-1.19209E-4	5.84126E-3	9.2864E-2	2.73177E1	-3.27155E1	-3.26068E1	2.67978E1	1.73753E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.9934E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80029E1	-7.39098E-4	-8.80005E1	-1.43051E-4	5.60284E-3	9.28164E-2	2.73129E1	-3.26735E1	-3.25966E1	2.6782E1	1.73755E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00151E-1
1.4E1	7.63E2	2.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80024E1	-1.19209E-4	-8.80002E1	0.0E0	5.45979E-3	9.2864E-2	2.72949E1	-3.26573E1	-3.26101E1	2.67914E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99803E-1
1.5E1	6.9E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80026E1	-2.14577E-4	-8.8E1	-9.53674E-5	5.07832E-3	9.31025E-2	2.73006E1	-3.26559E1	-3.26635E1	2.67627E1	1.73605E-7	2.51058E-3	2.51058E-3	6.3126E-3	1.98955E-1
1.6E1	3.246E3	1.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80023E1	-2.86102E-4	-8.8E1	-1.43051E-4	5.65052E-3	9.2864E-2	2.73273E1	-3.26705E1	-3.26044E1	2.68015E1	1.73605E-7	2.51296E-3	2.51296E-3	6.31321E-3	1.99466E-1
1.7E1	4.3737E4	2.4E1	6.87E2	4.7E2	-7.201E-2	-8.80024E1	-1.90735E-4	-8.80002E1	1.90735E-4	5.65052E-3	9.30786E-2	2.73228E1	-3.26697E1	-3.26402E1	2.68023E1	1.7368E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98592E-1
1.8E1	1.96921E5	1.28E2	7.27E2	5.0E2	-7.21643E-2	-8.80021E1	-7.86781E-4	-8.8E1	-2.38419E-5	5.8651E-3	9.29832E-2	2.73144E1	-3.2706E1	-3.26532E1	2.67966E1	1.73753E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.9934E-1
1.9E1	2.488E3	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80023E1	-5.72205E-4	-8.80004E1	1.66893E-4	5.93662E-3	9.31978E-2	2.73045E1	-3.26815E1	-3.26349E1	2.67962E1	1.73677E-7	2.51393E-3	2.51393E-3	6.3445E-3	1.98894E-1
2.0E1	3.96E2	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80023E1	-3.33786E-4	-8.8E1	1.43051E-4	5.57899E-3	9.30071E-2	2.73345E1	-3.26735E1	-3.26302E1	2.68166E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00705E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80024E1	-2.14577E-4	-8.80001E1	2.6226E-4	5.55515E-3	9.31501E-2	2.73305E1	-3.26154E1	-3.26154E1	2.677E1	1.73605E-7	2.51443E-3	2.51443E-3	6.28552E-3	2.00151E-1
2.2E1	5.8E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80023E1	-4.29153E-4	-8.80001E1	3.09944E-4	5.55515E-3	9.30309E-2	2.73123E1	-3.26759E1	-3.26176E1	2.67541E1	1.73753E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.01047E-1
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80025E1	-5.96046E-4	-8.79996E1	9.53674E-5	5.50747E-3	9.2864E-2	2.72865E1	-3.26801E1	-3.26278E1	2.67367E1	1.73755E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.9963E-1