[Scan]
initial_time=2016-02-16T00:47:00
final_time=2016-02-16T00:47:20
ip_count=19
run=1030
dataset=4
scan=259
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08731E-4
ql1_vset=
ql1_vmon=-8.19898E-1
ql1_imon=1.36092E-9
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=2.60472E-10
ql3_vset=
ql3_vmon=-9.13062E0
ql3_imon=2.79428E-9
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=2.93779E-10
mult1=-9.77651E-9
mult2=-2.80045E-9
rf_tmon=-6.06856E-3
rf_agc=3.2156E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=3.2866E-10
bslens_vset=-6.2E0
bslens_vmon=-6.77771E0
bslens_imon=3.81391E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20544E1
lens5a_imon=1.94687E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12346E2
lens4a_imon=2.04438E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53656E1
cs_ef1b_imon=3.0489E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.0296E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.07006E1
cs_ea1_imon=2.25657E-5
lens1_vset=-5.0E0
lens1_vmon=-5.20031E0
lens1_imon=1.52745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03584E1
cs_ea2_imon=1.64496E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=3.01484E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.81863E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11233E1
os_restr1_imon=2.86749E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16391E1
os_ea1_imon=1.96705E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63537E1
os_ef1bup_imon=3.09686E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.31463E0
cs_ionrep_imon=1.19581E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91683E2
cs_nozzle_imon=1.92776E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01624E1
cs_anode1_imon=3.24942E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=6.27267E-10
tplens_vset=1.4E-1
tplens_vmon=1.67742E0
tplens_imon=7.66475E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2596E1
iondef3_imon=1.46622E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26909E1
iondef2_imon=1.51825E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.99075E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=2.94852E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.42199E0
ionrepsh_imon=2.06863E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33245E1
lens5b_imon=2.05624E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74565E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28926E-1
os_ea2_imon=-2.8473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06249E2
lens4b_imon=2.01405E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.18617E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60828E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.39889E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10591E1
os_restr2_imon=2.87409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23162E2
cs_ionfoca_imon=6.29362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.29303E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73502E1
iondef1_imon=1.04892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6785E1
iondef4_imon=1.0965E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.852E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.19703E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09423E0
cs_ionaccel_imon=-2.05677E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56214E1
einzel_imon=7.65309E-6
window_vset=0.0E0
window_vmon=2.20582E-1
window_imon=-1.00724E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39258E-4
mask2_vset=0.0E0
mask2_vmon=-1.86124E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92694E3
multa_neg_imon=8.42222E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93766E3
defgrida_imon=5.83137E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=8.11783E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.95272E-1
defgridb_imon=5.7712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33886E1
os_fil1_imon=5.56716E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.65811E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65983E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3076E1
cs_fil1_imon=1.00781E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63212E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65915E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.32166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.98741E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87488E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32149E-1
cs_fil2_imon=-2.2174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25785E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22312E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.04384E-1
res40_imon=-2.64756E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.19898E-1	-7.98917E-1	-9.13029E0	-9.14216E0	4.93526E-3	9.32455E-2	2.74449E1	-3.28053E1	-3.25245E1	2.67962E1	1.73605E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.99394E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.20184E-1	-7.98416E-1	-9.13026E0	-9.14228E0	5.36442E-3	9.3317E-2	2.7302E1	-3.26689E1	-3.26101E1	2.67819E1	1.73755E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.19993E-1	-7.9844E-1	-9.13005E0	-9.14195E0	5.24521E-3	9.28164E-2	2.73322E1	-3.26614E1	-3.25865E1	2.68052E1	1.73758E-7	2.5147E-3	2.5147E-3	6.34099E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.19874E-1	-7.98607E-1	-9.13031E0	-9.1419E0	5.31673E-3	9.3317E-2	2.73153E1	-3.26422E1	-3.26512E1	2.6774E1	1.73605E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.20041E-1	-7.98798E-1	-9.13033E0	-9.14209E0	5.38826E-3	9.3627E-2	2.72684E1	-3.26663E1	-3.26506E1	2.67908E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.1985E-1	-7.9813E-1	-9.13074E0	-9.14221E0	5.60284E-3	9.33886E-2	2.73141E1	-3.26729E1	-3.26212E1	2.68088E1	1.73605E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.99E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.19802E-1	-7.9844E-1	-9.13067E0	-9.14183E0	5.84126E-3	9.29832E-2	2.73228E1	-3.26703E1	-3.26402E1	2.67946E1	1.73605E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.19778E-1	-7.98488E-1	-9.13026E0	-9.14199E0	5.81741E-3	9.34601E-2	2.72865E1	-3.26981E1	-3.26488E1	2.67874E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.19612E-1	-7.98273E-1	-9.13012E0	-9.1424E0	5.53131E-3	9.31501E-2	2.72943E1	-3.26711E1	-3.26242E1	2.67535E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.19707E-1	-7.98583E-1	-9.13019E0	-9.14221E0	5.24521E-3	9.30309E-2	2.73104E1	-3.2682E1	-3.26325E1	2.68215E1	1.73982E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99803E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.19612E-1	-7.9844E-1	-9.13033E0	-9.14202E0	5.26905E-3	9.30309E-2	2.72751E1	-3.26236E1	-3.26098E1	2.67571E1	1.73679E-7	2.50989E-3	2.50989E-3	6.31278E-3	2.00021E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.19564E-1	-7.97915E-1	-9.13026E0	-9.14216E0	5.65052E-3	9.32217E-2	2.73189E1	-3.26392E1	-3.25828E1	2.68436E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00325E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.19373E-1	-7.98512E-1	-9.13012E0	-9.14199E0	5.26905E-3	9.32217E-2	2.73231E1	-3.26675E1	-3.26176E1	2.67992E1	1.73679E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9968E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.19397E-1	-7.9875E-1	-9.13E0	-9.14207E0	5.29289E-3	9.3174E-2	2.73322E1	-3.26508E1	-3.2639E1	2.6813E1	1.73681E-7	2.5147E-3	2.5147E-3	6.29067E-3	2.00463E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.19278E-1	-7.98583E-1	-9.13029E0	-9.14226E0	5.22137E-3	9.30071E-2	2.73315E1	-3.27161E1	-3.26266E1	2.6781E1	1.73679E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9934E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.19778E-1	-7.98297E-1	-9.13033E0	-9.14214E0	5.36442E-3	9.30309E-2	2.72943E1	-3.26891E1	-3.26434E1	2.67968E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9968E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.19731E-1	-7.98655E-1	-9.13057E0	-9.14204E0	5.22137E-3	9.32455E-2	2.73311E1	-3.26638E1	-3.26296E1	2.67932E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.19874E-1	-7.98202E-1	-9.13053E0	-9.14209E0	5.4121E-3	9.29594E-2	2.72839E1	-3.26514E1	-3.26001E1	2.68034E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.19802E-1	-7.98416E-1	-9.13079E0	-9.14221E0	5.38826E-3	9.28402E-2	2.73315E1	-3.26909E1	-3.26158E1	2.67944E1	1.73679E-7	2.51525E-3	2.51525E-3	6.35601E-3	2.00021E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.19898E-1	-7.98798E-1	-9.13062E0	-9.14202E0	5.22137E-3	9.29594E-2	2.73502E1	-3.26909E1	-3.2596E1	2.6785E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99456E-1