[Scan]
initial_time=2016-02-16T00:47:27
final_time=2016-02-16T00:47:46
ip_count=19
run=1030
dataset=4
scan=260
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.19254E-1
ql1_imon=1.2735E-9
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.50649E-10
ql3_vset=
ql3_vmon=-9.13057E0
ql3_imon=2.32509E-9
ql4_vset=
ql4_vmon=-9.1423E0
ql4_imon=3.69084E-10
mult1=-8.80188E-9
mult2=-2.60763E-9
rf_tmon=-5.50641E-3
rf_agc=3.22119E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=3.36707E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61035E0
bslens_imon=1.48157E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18378E1
lens5a_imon=2.00778E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12661E2
lens4a_imon=2.06118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.06091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.01173E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03054E1
cs_ea1_imon=2.12568E-5
lens1_vset=-5.0E0
lens1_vmon=-5.47357E0
lens1_imon=3.90206E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.06029E1
cs_ea2_imon=1.57327E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8401E1
cs_ef1a_imon=3.02198E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=3.74341E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.8735E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13561E1
os_ea1_imon=1.76133E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.16578E0
cs_ionrep_imon=1.30588E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92063E2
cs_nozzle_imon=1.94287E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=3.26633E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=6.49583E-10
tplens_vset=1.4E-1
tplens_vmon=1.5594E0
tplens_imon=-1.22541E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.47998E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26372E1
iondef2_imon=1.69852E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03038E2
lens6_imon=2.9839E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.27933E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.13885E0
ionrepsh_imon=1.91265E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33848E1
lens5b_imon=2.30052E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74183E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-4.53839E-1
os_ea2_imon=-4.9449E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06011E2
lens4b_imon=1.99407E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64741E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=2.87134E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22976E2
cs_ionfoca_imon=6.38119E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.26659E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73098E1
iondef1_imon=1.16704E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71792E1
olens3_imon=1.89108E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=2.57468E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.97976E-6
window_vset=0.0E0
window_vmon=2.22749E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39394E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92755E3
multa_neg_imon=7.90927E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93643E3
defgrida_imon=7.57503E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50029E3
multb_neg_imon=5.56591E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.56186E0
defgridb_imon=7.33261E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33949E1
os_fil1_imon=4.40982E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.58131E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66086E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30731E1
cs_fil1_imon=1.00884E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65904E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10802E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.07965E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82285E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.62993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.74889E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22293E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.68612E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.19683E-1	-7.98345E-1	-9.13048E0	-9.14202E0	5.24521E-3	9.29832E-2	2.72219E1	-3.24703E1	-3.26148E1	2.68188E1	1.7368E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.98419E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.19731E-1	-7.9844E-1	-9.13045E0	-9.14178E0	5.24521E-3	9.27687E-2	2.73195E1	-3.26236E1	-3.26386E1	2.67678E1	1.73755E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98764E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.19755E-1	-7.98726E-1	-9.13095E0	-9.14192E0	5.26905E-3	9.30071E-2	2.73003E1	-3.26801E1	-3.26693E1	2.68395E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98592E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.19564E-1	-7.98345E-1	-9.1305E0	-9.1419E0	5.36442E-3	9.32932E-2	2.73169E1	-3.27009E1	-3.25953E1	2.68274E1	1.73679E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.19063E-1	-7.98368E-1	-9.13064E0	-9.14207E0	5.57899E-3	9.3174E-2	2.72919E1	-3.26573E1	-3.2629E1	2.68064E1	1.73679E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.19111E-1	-7.98488E-1	-9.13053E0	-9.14192E0	5.19753E-3	9.33886E-2	2.72985E1	-3.2647E1	-3.26164E1	2.68268E1	1.73755E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.19397E-1	-7.98535E-1	-9.13045E0	-9.1418E0	5.26905E-3	9.33409E-2	2.73122E1	-3.27039E1	-3.25883E1	2.68064E1	1.73605E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.97903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.19349E-1	-7.98678E-1	-9.13031E0	-9.14197E0	5.43594E-3	9.35078E-2	2.73057E1	-3.26539E1	-3.2626E1	2.67651E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.97559E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.19516E-1	-7.98345E-1	-9.13048E0	-9.14168E0	5.43594E-3	9.30786E-2	2.7279E1	-3.26884E1	-3.26546E1	2.67329E1	1.73676E-7	2.51886E-3	2.51886E-3	6.3282E-3	1.98465E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.19373E-1	-7.98512E-1	-9.13064E0	-9.1419E0	5.29289E-3	9.32693E-2	2.72829E1	-3.2647E1	-3.26344E1	2.67812E1	1.73684E-7	2.51874E-3	2.51874E-3	6.3016E-3	1.9965E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.19111E-1	-7.98225E-1	-9.13067E0	-9.14211E0	5.60284E-3	9.32932E-2	2.73135E1	-3.26777E1	-3.26248E1	2.67931E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.19302E-1	-7.9875E-1	-9.13029E0	-9.14233E0	5.50747E-3	9.32217E-2	2.73123E1	-3.26615E1	-3.26116E1	2.67896E1	1.73605E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9968E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.19421E-1	-7.9875E-1	-9.13067E0	-9.14218E0	5.38826E-3	9.32455E-2	2.73183E1	-3.2638E1	-3.26086E1	2.68094E1	1.7368E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.99977E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.19325E-1	-7.98607E-1	-9.13048E0	-9.14223E0	5.96046E-3	9.33409E-2	2.73375E1	-3.26555E1	-3.26325E1	2.68012E1	1.73605E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.98872E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.19373E-1	-7.98535E-1	-9.13048E0	-9.14211E0	5.38826E-3	9.32455E-2	2.73033E1	-3.26561E1	-3.262E1	2.67571E1	1.73605E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9917E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.19397E-1	-7.98488E-1	-9.13012E0	-9.14221E0	5.43594E-3	9.32932E-2	2.73069E1	-3.26843E1	-3.26681E1	2.67541E1	1.73605E-7	2.52061E-3	2.52061E-3	6.29128E-3	1.9917E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.19159E-1	-7.98368E-1	-9.1305E0	-9.14214E0	5.48363E-3	9.32217E-2	2.72903E1	-3.26679E1	-3.26201E1	2.68076E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98247E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.19016E-1	-7.98321E-1	-9.1305E0	-9.14207E0	5.84126E-3	9.31025E-2	2.73228E1	-3.27139E1	-3.25894E1	2.68142E1	1.73755E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.97559E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.19159E-1	-7.98678E-1	-9.1306E0	-9.14221E0	5.65052E-3	9.32932E-2	2.72721E1	-3.26621E1	-3.26176E1	2.6807E1	1.73605E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.98153E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.19254E-1	-7.98559E-1	-9.13057E0	-9.1423E0	5.17368E-3	9.3317E-2	2.73098E1	-3.26372E1	-3.26219E1	2.67962E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.99E-1