[Scan]
initial_time=2016-02-16T00:47:53
final_time=2016-02-16T00:48:13
ip_count=19
run=1030
dataset=4
scan=261
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.18944E-1
ql1_imon=1.00166E-9
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=2.67243E-10
ql3_vset=
ql3_vmon=-9.13053E0
ql3_imon=1.84572E-9
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=3.71659E-10
mult1=-9.98679E-9
mult2=-2.66229E-9
rf_tmon=-6.66767E-3
rf_agc=3.20109E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.12781E-10
bslens_vset=-6.2E0
bslens_vmon=-6.88389E0
bslens_imon=4.06874E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.84281E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12212E2
lens4a_imon=2.04537E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53505E1
cs_ef1b_imon=3.06627E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04771E2
lens23_imon=1.0353E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06363E1
cs_ea1_imon=2.19782E-5
lens1_vset=-5.0E0
lens1_vmon=-5.15548E0
lens1_imon=1.37171E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.96619E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03059E1
cs_ea2_imon=1.72E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83989E1
cs_ef1a_imon=3.02596E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.73769E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=2.87722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.18373E1
os_ea1_imon=1.94758E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63392E1
os_ef1bup_imon=3.10346E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17482E0
cs_ionrep_imon=1.16714E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91728E2
cs_nozzle_imon=1.93194E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=3.24699E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=7.09569E-10
tplens_vset=1.4E-1
tplens_vmon=1.71753E0
tplens_imon=1.13811E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.26527E1
iondef3_imon=1.42056E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2626E1
iondef2_imon=1.51259E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03058E2
lens6_imon=2.99602E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.36957E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.43261E0
ionrepsh_imon=2.01164E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32236E1
lens5b_imon=2.09199E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74426E1
cs_ef2b_imon=3.12813E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-8.52729E-2
os_ea2_imon=7.98296E-8
lens4b_vset=-4.05E2
lens4b_vmon=-4.06354E2
lens4b_imon=2.01423E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71634E1
cs_ef2a_imon=3.19903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63956E0
os_ef2alow_imon=-2.70317E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34676E-1
os_ef2bup_imon=-5.19145E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10654E1
os_restr2_imon=2.85359E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.16762E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01722E1
cs_anode2_imon=2.29025E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72941E1
iondef1_imon=1.10662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.09789E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.87638E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=2.38574E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11103E0
cs_ionaccel_imon=-1.92471E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.70174E-6
window_vset=0.0E0
window_vmon=2.08418E-1
window_imon=-8.40431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.86738E1
mask2_imon=-5.69361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=8.36559E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93651E3
defgrida_imon=5.20843E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50293E3
multb_neg_imon=7.97625E-5
defgridb_vset=0.0E0
defgridb_vmon=-5.13786E-1
defgridb_imon=6.28795E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33929E1
os_fil1_imon=5.06325E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61756E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66203E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30712E1
cs_fil1_imon=1.00819E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62383E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66104E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.35062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.87156E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81666E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.26374E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11884E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22313E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=1.99977E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.9532E-1
res40_imon=-2.51203E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.19159E-1	-7.98416E-1	-9.13067E0	-9.14214E0	5.43594E-3	9.3317E-2	2.7202E1	-3.2535E1	-3.25414E1	2.67984E1	1.73823E-7	2.51919E-3	2.51919E-3	6.31798E-3	1.98894E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.19182E-1	-7.98559E-1	-9.1305E0	-9.14221E0	5.74589E-3	9.30309E-2	2.73431E1	-3.26756E1	-3.26933E1	2.68045E1	1.73901E-7	2.51203E-3	2.51203E-3	6.32896E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.19349E-1	-7.98416E-1	-9.13088E0	-9.14228E0	5.72205E-3	9.30786E-2	2.72833E1	-3.27145E1	-3.25971E1	2.6792E1	1.73758E-7	2.5147E-3	2.5147E-3	6.34099E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.19325E-1	-7.9844E-1	-9.13062E0	-9.14223E0	5.65052E-3	9.30071E-2	2.72751E1	-3.26729E1	-3.26284E1	2.67788E1	1.73679E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00876E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.19421E-1	-7.98416E-1	-9.13064E0	-9.14195E0	5.14984E-3	9.32455E-2	2.73308E1	-3.27025E1	-3.26101E1	2.6786E1	1.7368E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.19182E-1	-7.99012E-1	-9.1305E0	-9.14228E0	5.29289E-3	9.30071E-2	2.73057E1	-3.26809E1	-3.26054E1	2.67571E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.19111E-1	-7.98488E-1	-9.13055E0	-9.14185E0	5.36442E-3	9.29117E-2	2.73219E1	-3.26308E1	-3.26603E1	2.68184E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.19182E-1	-7.98678E-1	-9.13033E0	-9.14199E0	5.17368E-3	9.29356E-2	2.73165E1	-3.26561E1	-3.26038E1	2.684E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.18968E-1	-7.98321E-1	-9.13036E0	-9.14218E0	5.26905E-3	9.27925E-2	2.72744E1	-3.26903E1	-3.26001E1	2.67914E1	1.7368E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.18896E-1	-7.98535E-1	-9.13012E0	-9.14233E0	5.57899E-3	9.30309E-2	2.72991E1	-3.26603E1	-3.2641E1	2.67832E1	1.73677E-7	2.51182E-3	2.51182E-3	6.32328E-3	1.99562E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.1892E-1	-7.98464E-1	-9.13045E0	-9.14211E0	5.10216E-3	9.28879E-2	2.72588E1	-3.26284E1	-3.26567E1	2.68005E1	1.73605E-7	2.51915E-3	2.51915E-3	6.29624E-3	1.99048E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.19302E-1	-7.98464E-1	-9.1305E0	-9.14173E0	5.05447E-3	9.2864E-2	2.73129E1	-3.26771E1	-3.25984E1	2.67858E1	1.73605E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.97984E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.19087E-1	-7.98535E-1	-9.13062E0	-9.14185E0	5.22137E-3	9.30786E-2	2.73328E1	-3.26797E1	-3.26296E1	2.67752E1	1.73755E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98075E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.18706E-1	-7.98535E-1	-9.13064E0	-9.14168E0	5.26905E-3	9.32932E-2	2.73016E1	-3.26685E1	-3.2629E1	2.6807E1	1.73679E-7	2.52169E-3	2.52169E-3	6.29665E-3	1.97815E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.18682E-1	-7.98678E-1	-9.13072E0	-9.14202E0	5.60284E-3	9.29594E-2	2.73339E1	-3.26499E1	-3.25825E1	2.67932E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98247E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.18849E-1	-7.98678E-1	-9.13045E0	-9.14228E0	5.4121E-3	9.2864E-2	2.73075E1	-3.26331E1	-3.26349E1	2.68352E1	1.73605E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.19016E-1	-7.9875E-1	-9.13064E0	-9.14207E0	5.60284E-3	9.30548E-2	2.73051E1	-3.26691E1	-3.26296E1	2.67937E1	1.73755E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.18968E-1	-7.98464E-1	-9.13048E0	-9.14187E0	5.17368E-3	9.29117E-2	2.72845E1	-3.26278E1	-3.25971E1	2.6785E1	1.73641E-7	2.51883E-3	2.51883E-3	6.30207E-3	1.98946E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.18872E-1	-7.98392E-1	-9.13057E0	-9.14202E0	5.36442E-3	9.29832E-2	2.73165E1	-3.26933E1	-3.26452E1	2.67782E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.18944E-1	-7.98082E-1	-9.13053E0	-9.14199E0	5.55515E-3	9.30786E-2	2.72941E1	-3.2626E1	-3.26527E1	2.6819E1	1.7368E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.99977E-1