[Scan]
initial_time=2016-02-16T00:49:13
final_time=2016-02-16T00:49:33
ip_count=19
run=1030
dataset=4
scan=264
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09294E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.18968E-1
ql1_imon=8.66377E-10
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.6226E-10
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=1.42905E-9
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=4.46951E-10
mult1=-9.16835E-9
mult2=-2.76049E-9
rf_tmon=-4.58616E-3
rf_agc=3.32206E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=3.20554E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68193E0
bslens_imon=2.89271E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20054E1
lens5a_imon=1.96793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.05211E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.03326E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.042E1
cs_ea1_imon=2.21161E-5
lens1_vset=-5.0E0
lens1_vmon=-5.405E0
lens1_imon=2.44428E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.98878E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03569E1
cs_ea2_imon=1.60814E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84157E1
cs_ef1a_imon=3.02249E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.56638E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11019E1
os_restr1_imon=2.87791E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15728E1
os_ea1_imon=1.86886E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63392E1
os_ef1bup_imon=3.076E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25036E0
cs_ionrep_imon=1.27999E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91949E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=3.26019E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.44863E-10
tplens_vset=1.4E-1
tplens_vmon=1.55685E0
tplens_imon=-4.27064E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.50525E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26968E1
iondef2_imon=1.58068E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03019E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.4436E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23935E0
ionrepsh_imon=2.01973E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34121E1
lens5b_imon=2.20883E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74704E1
cs_ef2b_imon=3.13022E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.96142E-1
os_ea2_imon=-3.95778E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71298E1
cs_ef2a_imon=3.17435E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63319E0
os_ef2alow_imon=-2.5155E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.48577E-1
os_ef2bup_imon=-5.2401E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10816E1
os_restr2_imon=2.87027E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.30102E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01549E1
cs_anode2_imon=2.28295E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73246E1
iondef1_imon=1.11313E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.08399E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.85885E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.59566E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11103E0
cs_ionaccel_imon=-1.91776E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.8477E-6
window_vset=0.0E0
window_vmon=1.85829E-1
window_imon=-1.0976E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86205E1
mask2_imon=-6.8752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.9193E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=7.07806E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.29706E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.87923E0
defgridb_imon=6.22987E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33945E1
os_fil1_imon=4.31028E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46118E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66236E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30762E1
cs_fil1_imon=1.00788E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62505E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66101E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.158E-2
os_fil2_imon=-2.59968E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.98741E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29777E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22393E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09018E-1
res40_imon=-2.53635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.18539E-1	-7.98416E-1	-9.13072E0	-9.14221E0	5.36442E-3	9.29356E-2	2.73163E1	-3.26791E1	-3.26443E1	2.67792E1	1.73605E-7	2.50972E-3	2.50972E-3	6.30212E-3	1.99729E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.18586E-1	-7.9875E-1	-9.13048E0	-9.14199E0	5.67436E-3	9.32455E-2	2.73045E1	-3.2644E1	-3.26524E1	2.68026E1	1.73679E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.18658E-1	-7.98416E-1	-9.1305E0	-9.14199E0	5.88894E-3	9.34601E-2	2.72594E1	-3.26687E1	-3.26639E1	2.68065E1	1.73605E-7	2.51248E-3	2.51248E-3	6.27399E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.18372E-1	-7.9875E-1	-9.13074E0	-9.14207E0	5.98431E-3	9.32455E-2	2.7311E1	-3.26349E1	-3.26349E1	2.6804E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.18205E-1	-7.98726E-1	-9.13069E0	-9.14187E0	5.34058E-3	9.34362E-2	2.72624E1	-3.27161E1	-3.26344E1	2.68184E1	1.73605E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.18348E-1	-7.98702E-1	-9.13074E0	-9.14216E0	5.24521E-3	9.33886E-2	2.73351E1	-3.26104E1	-3.25942E1	2.67649E1	1.73605E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.98419E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.18419E-1	-7.98726E-1	-9.13072E0	-9.14216E0	5.31673E-3	9.34124E-2	2.73598E1	-3.27143E1	-3.25996E1	2.67974E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.98247E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.18443E-1	-7.98678E-1	-9.13084E0	-9.14221E0	5.57899E-3	9.34362E-2	2.72949E1	-3.27041E1	-3.26212E1	2.67686E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.18586E-1	-7.98559E-1	-9.13067E0	-9.14199E0	5.62668E-3	9.3174E-2	2.73069E1	-3.26726E1	-3.26178E1	2.67931E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98247E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.18253E-1	-7.98535E-1	-9.13064E0	-9.14204E0	5.4121E-3	9.32217E-2	2.73175E1	-3.26909E1	-3.25706E1	2.67932E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.98322E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.18324E-1	-7.99179E-1	-9.13048E0	-9.14195E0	5.34058E-3	9.34362E-2	2.72793E1	-3.26909E1	-3.26044E1	2.6825E1	1.73529E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.18539E-1	-7.98941E-1	-9.1306E0	-9.1419E0	5.48363E-3	9.32455E-2	2.72823E1	-3.26657E1	-3.26062E1	2.68094E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9917E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.18515E-1	-7.98631E-1	-9.13067E0	-9.14209E0	5.74589E-3	9.3317E-2	2.72841E1	-3.26693E1	-3.2647E1	2.67565E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00847E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-8.18491E-1	-7.98655E-1	-9.13079E0	-9.14209E0	5.38826E-3	9.34124E-2	2.72985E1	-3.26717E1	-3.2641E1	2.68274E1	1.73681E-7	2.51248E-3	2.51248E-3	6.32978E-3	2.00108E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.18634E-1	-7.98583E-1	-9.13069E0	-9.14209E0	5.79357E-3	9.33409E-2	2.72913E1	-3.26494E1	-3.25996E1	2.6771E1	1.7368E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09263E0	-8.18563E-1	-7.98535E-1	-9.13086E0	-9.14199E0	5.53131E-3	9.34601E-2	2.73339E1	-3.26921E1	-3.26248E1	2.67896E1	1.73605E-7	2.51096E-3	2.51096E-3	6.35059E-3	2.00021E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09271E0	-8.18563E-1	-7.98464E-1	-9.13115E0	-9.14197E0	5.6982E-3	9.32217E-2	2.72823E1	-3.26717E1	-3.2599E1	2.68064E1	1.7368E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09294E0	-8.18992E-1	-7.98464E-1	-9.13098E0	-9.14197E0	5.55515E-3	9.30071E-2	2.73252E1	-3.26437E1	-3.25947E1	2.68151E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00325E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-8.1892E-1	-7.98869E-1	-9.13072E0	-9.14218E0	5.57899E-3	9.32693E-2	2.72678E1	-3.27089E1	-3.26008E1	2.67752E1	1.73679E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00876E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09294E0	-8.18968E-1	-7.98535E-1	-9.13095E0	-9.14207E0	5.53131E-3	9.30309E-2	2.73246E1	-3.26968E1	-3.26142E1	2.68136E1	1.73605E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.9963E-1