[Scan]
initial_time=2016-02-16T00:50:07
final_time=2016-02-16T00:50:26
ip_count=19
run=1030
dataset=4
scan=266
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08723E-4
ql1_vset=
ql1_vmon=-8.18014E-1
ql1_imon=8.52263E-10
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.88475E-10
ql3_vset=
ql3_vmon=-9.13074E0
ql3_imon=1.19405E-9
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=4.76885E-10
mult1=-9.28657E-9
mult2=-2.59783E-9
rf_tmon=-6.42665E-3
rf_agc=3.20644E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=3.34919E-10
bslens_vset=-6.2E0
bslens_vmon=-6.632E0
bslens_imon=2.23533E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19978E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12541E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53696E1
cs_ef1b_imon=3.08052E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.01834E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04451E1
cs_ea1_imon=2.19782E-5
lens1_vset=-5.0E0
lens1_vmon=-5.46871E0
lens1_imon=3.01046E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64365E1
os_ef1alow_imon=2.97175E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.55966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.01554E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=3.48997E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10926E1
os_restr1_imon=2.87861E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15052E1
os_ea1_imon=1.87007E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63936E1
os_ef1bup_imon=3.10103E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27805E0
cs_ionrep_imon=1.27898E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.9365E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0163E1
cs_anode1_imon=3.24351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.32656E-10
tplens_vset=1.4E-1
tplens_vmon=1.58126E0
tplens_imon=-7.83786E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.51294E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26756E1
iondef2_imon=1.60957E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98509E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.2481E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=1.98333E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.21587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74831E1
cs_ef2b_imon=3.11944E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.22413E-1
os_ea2_imon=-5.43106E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06057E2
lens4b_imon=2.00343E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7076E1
cs_ef2a_imon=3.20737E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65925E0
os_ef2alow_imon=-2.83523E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41048E-1
os_ef2bup_imon=-5.38606E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11222E1
os_restr2_imon=2.84803E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.33503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0152E1
cs_anode2_imon=2.27114E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.11794E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67722E1
iondef4_imon=1.08121E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.89748E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=2.93732E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-1.71272E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.4716E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.60791E-6
window_vset=0.0E0
window_vmon=2.06681E-1
window_imon=-9.86392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86083E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.77096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.72684E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=6.97106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.84849E0
defgridb_imon=6.40475E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33958E1
os_fil1_imon=4.37979E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.50172E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3076E1
cs_fil1_imon=1.00888E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63003E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66125E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.11662E-2
os_fil2_imon=-2.56493E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.46612E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85463E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.49681E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22338E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.26018E-1
res40_imon=-2.53288E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.18062E-1	-7.98368E-1	-9.13084E0	-9.14228E0	5.48363E-3	9.2864E-2	2.73334E1	-3.26844E1	-3.26455E1	2.68192E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9968E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.18133E-1	-7.98249E-1	-9.13088E0	-9.14223E0	5.29289E-3	9.30548E-2	2.72929E1	-3.26836E1	-3.26236E1	2.68356E1	1.73605E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.18682E-1	-7.98488E-1	-9.13131E0	-9.14218E0	6.00815E-3	9.30309E-2	2.73098E1	-3.26714E1	-3.26419E1	2.68641E1	1.73681E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.18706E-1	-7.98535E-1	-9.13126E0	-9.14254E0	5.48363E-3	9.33647E-2	2.73105E1	-3.26543E1	-3.26404E1	2.67845E1	1.73679E-7	2.51203E-3	2.51203E-3	6.28592E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.18634E-1	-7.98154E-1	-9.13122E0	-9.14235E0	5.67436E-3	9.30786E-2	2.72915E1	-3.26667E1	-3.26042E1	2.6816E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.18586E-1	-7.98726E-1	-9.13115E0	-9.14245E0	5.60284E-3	9.32217E-2	2.73195E1	-3.26597E1	-3.26543E1	2.68004E1	1.73906E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.18539E-1	-7.98678E-1	-9.13045E0	-9.14242E0	5.53131E-3	9.32455E-2	2.73183E1	-3.26651E1	-3.25948E1	2.67794E1	1.73753E-7	2.51632E-3	2.51632E-3	6.35059E-3	1.9985E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.18038E-1	-7.98607E-1	-9.13107E0	-9.14199E0	5.55515E-3	9.32693E-2	2.72992E1	-3.26691E1	-3.26213E1	2.68024E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00151E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.183E-1	-7.9875E-1	-9.13107E0	-9.14192E0	5.48363E-3	9.31263E-2	2.73135E1	-3.26164E1	-3.2644E1	2.67788E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9985E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.18038E-1	-7.9875E-1	-9.13107E0	-9.14207E0	5.26905E-3	9.31025E-2	2.72903E1	-3.26461E1	-3.26915E1	2.67962E1	1.73755E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98764E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.17657E-1	-7.98583E-1	-9.13079E0	-9.14226E0	5.53131E-3	9.30786E-2	2.72468E1	-3.2641E1	-3.2608E1	2.68034E1	1.7368E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.18086E-1	-7.98249E-1	-9.13095E0	-9.14223E0	5.43594E-3	9.29832E-2	2.72787E1	-3.26861E1	-3.26296E1	2.68118E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9951E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.17919E-1	-7.9844E-1	-9.13091E0	-9.14235E0	5.60284E-3	9.27448E-2	2.73004E1	-3.26531E1	-3.2636E1	2.68022E1	1.7368E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.98419E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.17847E-1	-7.98988E-1	-9.13098E0	-9.14204E0	6.05583E-3	9.28164E-2	2.73057E1	-3.26512E1	-3.26482E1	2.68719E1	1.7368E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98937E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.17966E-1	-7.98559E-1	-9.13079E0	-9.14211E0	5.67436E-3	9.31025E-2	2.73123E1	-3.26404E1	-3.26446E1	2.68024E1	1.73753E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.98661E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.1799E-1	-7.98512E-1	-9.13088E0	-9.14228E0	5.57899E-3	9.28164E-2	2.73195E1	-3.26771E1	-3.262E1	2.67902E1	1.73755E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18062E-1	-7.98106E-1	-9.1311E0	-9.14218E0	5.93662E-3	9.29832E-2	2.72924E1	-3.26434E1	-3.26121E1	2.68106E1	1.73755E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.1799E-1	-7.98106E-1	-9.13064E0	-9.14211E0	5.72205E-3	9.27925E-2	2.73204E1	-3.26646E1	-3.26462E1	2.68256E1	1.73901E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9934E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.18181E-1	-7.98512E-1	-9.13062E0	-9.14207E0	5.48363E-3	9.32693E-2	2.73334E1	-3.26602E1	-3.26071E1	2.67758E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9911E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.18014E-1	-7.98655E-1	-9.13074E0	-9.14218E0	5.31673E-3	9.3174E-2	2.73187E1	-3.26756E1	-3.2629E1	2.67722E1	1.73679E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00021E-1