[Scan]
initial_time=2016-02-16T00:51:27
final_time=2016-02-16T00:51:46
ip_count=19
run=1030
dataset=4
scan=269
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.18014E-1
ql1_imon=7.74598E-10
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.96736E-10
ql3_vset=
ql3_vmon=-9.13072E0
ql3_imon=1.00781E-9
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=4.63307E-10
mult1=-1.01016E-8
mult2=-2.75853E-9
rf_tmon=-5.52181E-3
rf_agc=3.23362E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=3.77047E-10
bslens_vset=-6.2E0
bslens_vmon=-6.56475E0
bslens_imon=2.28134E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20184E1
lens5a_imon=2.01341E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1257E2
lens4a_imon=2.05426E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53464E1
cs_ef1b_imon=3.06662E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.01629E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0418E1
cs_ea1_imon=2.21693E-5
lens1_vset=-5.0E0
lens1_vmon=-5.47992E0
lens1_imon=3.19805E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64574E1
os_ef1alow_imon=2.98113E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04186E1
cs_ea2_imon=1.55329E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84522E1
cs_ef1a_imon=3.01241E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.70109E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11106E1
os_restr1_imon=2.87618E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1435E1
os_ea1_imon=1.8867E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25682E0
cs_ionrep_imon=1.29668E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93799E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=3.26888E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=6.62673E-10
tplens_vset=1.4E-1
tplens_vmon=1.54764E0
tplens_imon=-9.78454E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26242E1
iondef2_imon=1.62832E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.97999E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.49784E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20963E0
ionrepsh_imon=1.98934E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34578E1
lens5b_imon=2.26117E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74362E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.35981E-1
os_ea2_imon=-8.61653E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06033E2
lens4b_imon=2.00407E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71287E1
cs_ef2a_imon=3.17574E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6216E0
os_ef2alow_imon=-2.56416E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45681E-1
os_ef2bup_imon=-5.14627E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1044E1
os_restr2_imon=2.86957E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.34105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01624E1
cs_anode2_imon=2.29094E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72949E1
iondef1_imon=1.14236E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6768E1
iondef4_imon=1.10832E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89891E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=2.54881E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13304E0
cs_ionaccel_imon=-1.96641E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47264E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55924E1
einzel_imon=7.62528E-6
window_vset=0.0E0
window_vmon=2.18265E-1
window_imon=-1.14625E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86437E1
mask2_imon=-7.39649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.70726E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=7.14449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50069E3
multb_neg_imon=6.90735E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.90459E0
defgridb_imon=6.41183E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33969E1
os_fil1_imon=4.75048E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55964E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66116E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30748E1
cs_fil1_imon=1.00915E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62285E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6622E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.26953E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17651E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82172E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29777E-1
cs_fil2_imon=-1.93359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0783E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22413E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.2735E-1
res40_imon=-2.50855E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.18157E-1	-7.98726E-1	-9.13072E0	-9.14214E0	5.45979E-3	9.32217E-2	2.73435E1	-3.26224E1	-3.25779E1	2.67968E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.9951E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.18062E-1	-7.97939E-1	-9.13081E0	-9.14211E0	5.53131E-3	9.30786E-2	2.73231E1	-3.26585E1	-3.26536E1	2.67902E1	1.73755E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9911E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.1749E-1	-7.98416E-1	-9.13117E0	-9.1419E0	5.81741E-3	9.32217E-2	2.73111E1	-3.26663E1	-3.26158E1	2.68034E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.98419E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.18086E-1	-7.98702E-1	-9.13072E0	-9.14183E0	5.74589E-3	9.29594E-2	2.73423E1	-3.26614E1	-3.26101E1	2.67656E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99977E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17823E-1	-7.98488E-1	-9.131E0	-9.14207E0	5.48363E-3	9.29832E-2	2.73075E1	-3.26524E1	-3.26567E1	2.67668E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17823E-1	-7.98702E-1	-9.13093E0	-9.14218E0	5.31673E-3	9.31978E-2	2.72818E1	-3.26476E1	-3.26027E1	2.67344E1	1.73641E-7	2.51724E-3	2.51724E-3	6.33412E-3	1.9962E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18014E-1	-7.98559E-1	-9.13088E0	-9.14216E0	5.8651E-3	9.30786E-2	2.72956E1	-3.27043E1	-3.26292E1	2.6814E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.17895E-1	-7.98702E-1	-9.13062E0	-9.14216E0	5.76973E-3	9.31501E-2	2.72757E1	-3.26248E1	-3.26512E1	2.6836E1	1.73605E-7	2.51296E-3	2.51296E-3	6.32483E-3	1.98917E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.17704E-1	-7.98631E-1	-9.1305E0	-9.14218E0	5.22137E-3	9.32693E-2	2.73195E1	-3.26536E1	-3.26116E1	2.68599E1	1.7368E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.18181E-1	-7.98178E-1	-9.13088E0	-9.14211E0	5.48363E-3	9.2864E-2	2.73742E1	-3.27534E1	-3.25809E1	2.68358E1	1.73753E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9951E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.1811E-1	-7.98035E-1	-9.131E0	-9.14216E0	5.65052E-3	9.28402E-2	2.7311E1	-3.26862E1	-3.26296E1	2.68563E1	1.73605E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.00463E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18014E-1	-7.97963E-1	-9.13081E0	-9.14235E0	5.57899E-3	9.28164E-2	2.72925E1	-3.26585E1	-3.26482E1	2.6816E1	1.73605E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.9968E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.18086E-1	-7.98678E-1	-9.1311E0	-9.14235E0	5.62668E-3	9.32455E-2	2.72937E1	-3.26362E1	-3.26482E1	2.68082E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.01022E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.17943E-1	-7.98559E-1	-9.13119E0	-9.14233E0	5.24521E-3	9.31978E-2	2.73069E1	-3.27246E1	-3.2607E1	2.67552E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.00325E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.18205E-1	-7.98726E-1	-9.13117E0	-9.14235E0	5.38826E-3	9.31263E-2	2.72925E1	-3.26711E1	-3.26284E1	2.68059E1	1.73605E-7	2.51248E-3	2.51248E-3	6.31299E-3	1.99931E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.17895E-1	-7.98225E-1	-9.13103E0	-9.14221E0	5.55515E-3	9.31263E-2	2.73039E1	-3.26861E1	-3.2608E1	2.68155E1	1.7368E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.00325E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.178E-1	-7.98869E-1	-9.13091E0	-9.14207E0	5.48363E-3	9.31263E-2	2.73198E1	-3.26756E1	-3.26201E1	2.67675E1	1.73755E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.01197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17919E-1	-7.98392E-1	-9.13103E0	-9.14214E0	5.43594E-3	9.31978E-2	2.73009E1	-3.26663E1	-3.26561E1	2.68364E1	1.73679E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9917E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.17728E-1	-7.98631E-1	-9.13057E0	-9.14195E0	5.4121E-3	9.33647E-2	2.73228E1	-3.26543E1	-3.26531E1	2.67926E1	1.7368E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.00673E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.18014E-1	-7.98416E-1	-9.13072E0	-9.14211E0	5.6982E-3	9.31978E-2	2.72949E1	-3.26242E1	-3.26254E1	2.6768E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9934E-1