[Scan]
initial_time=2016-02-16T00:51:53
final_time=2016-02-16T00:52:13
ip_count=19
run=1030
dataset=4
scan=270
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.17966E-1
ql1_imon=7.87008E-10
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.61593E-10
ql3_vset=
ql3_vmon=-9.13062E0
ql3_imon=9.32503E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=4.90355E-10
mult1=-9.55847E-9
mult2=-2.43517E-9
rf_tmon=-5.80136E-3
rf_agc=3.20762E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=3.60668E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63672E0
bslens_imon=2.66714E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20579E1
lens5a_imon=2.01943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05164E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53522E1
cs_ef1b_imon=3.01519E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04553E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=2.20454E-5
lens1_vset=-5.0E0
lens1_vmon=-5.47461E0
lens1_imon=2.87242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=3.02422E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03248E1
cs_ea2_imon=1.57134E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.97904E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.89218E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11106E1
os_restr1_imon=2.91475E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=1.90688E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63757E1
os_ef1bup_imon=3.04612E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2869E0
cs_ionrep_imon=1.32004E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93565E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01525E1
cs_anode1_imon=3.28209E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=6.50525E-10
tplens_vset=1.4E-1
tplens_vmon=1.56357E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25405E1
iondef3_imon=1.50268E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27228E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98233E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.53944E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28926E0
ionrepsh_imon=2.04067E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34041E1
lens5b_imon=2.22436E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74878E1
cs_ef2b_imon=3.09025E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.38647E-1
os_ea2_imon=-8.40417E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70771E1
cs_ef2a_imon=3.21397E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65578E0
os_ef2alow_imon=-2.8387E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.17879E-1
os_ef2bup_imon=-5.51812E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11326E1
os_restr2_imon=2.84733E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23115E2
cs_ionfoca_imon=6.33184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02435E1
cs_anode2_imon=2.30971E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72827E1
iondef1_imon=1.08396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.06488E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.89812E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.08335E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07106E0
cs_ionaccel_imon=-1.8274E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02135E2
cs_ionfocb_imon=1.47195E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55768E1
einzel_imon=7.75039E-6
window_vset=0.0E0
window_vmon=1.05899E-1
window_imon=-1.10455E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82556E2
mask1_imon=2.39188E-4
mask2_vset=0.0E0
mask2_vmon=-1.8697E1
mask2_imon=-5.27658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.31084E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.81532E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.28961E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67132E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33939E1
os_fil1_imon=4.88949E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.32217E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66279E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30778E1
cs_fil1_imon=1.0079E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63368E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66266E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.25795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.46612E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88374E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32274E-1
cs_fil2_imon=-1.68453E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.45077E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22433E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.513E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.17919E-1	-7.99084E-1	-9.13081E0	-9.14195E0	5.57899E-3	9.32217E-2	2.73497E1	-3.27303E1	-3.26185E1	2.68256E1	1.73605E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.00363E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.17704E-1	-7.9875E-1	-9.13093E0	-9.14197E0	5.48363E-3	9.32693E-2	2.72996E1	-3.26842E1	-3.26321E1	2.6834E1	1.73605E-7	2.51603E-3	2.51603E-3	6.28103E-3	2.00399E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.17728E-1	-7.98917E-1	-9.13093E0	-9.14226E0	5.50747E-3	9.31978E-2	2.72892E1	-3.26608E1	-3.26337E1	2.6804E1	1.73605E-7	2.51693E-3	2.51693E-3	6.32978E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.18014E-1	-7.98726E-1	-9.13095E0	-9.14197E0	5.79357E-3	9.30786E-2	2.72925E1	-3.26825E1	-3.26044E1	2.67833E1	1.73605E-7	2.51417E-3	2.51417E-3	6.29128E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.17966E-1	-7.98631E-1	-9.13074E0	-9.1419E0	5.76973E-3	9.32693E-2	2.73375E1	-3.2672E1	-3.26024E1	2.67674E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.1811E-1	-7.98821E-1	-9.13069E0	-9.14209E0	5.55515E-3	9.32693E-2	2.72871E1	-3.26591E1	-3.26164E1	2.67836E1	1.73679E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.9883E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.1799E-1	-7.98535E-1	-9.13081E0	-9.14211E0	5.79357E-3	9.31978E-2	2.72727E1	-3.26212E1	-3.2635E1	2.67914E1	1.73605E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18229E-1	-7.9813E-1	-9.13081E0	-9.14226E0	5.48363E-3	9.29832E-2	2.72787E1	-3.26597E1	-3.25876E1	2.68214E1	1.73605E-7	2.51443E-3	2.51443E-3	6.34588E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.18133E-1	-7.98893E-1	-9.13084E0	-9.14218E0	5.26905E-3	9.2864E-2	2.72968E1	-3.26685E1	-3.26024E1	2.68196E1	1.73755E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98419E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.17752E-1	-7.98655E-1	-9.13062E0	-9.1424E0	5.38826E-3	9.31025E-2	2.73652E1	-3.26849E1	-3.26056E1	2.67769E1	1.73753E-7	2.51954E-3	2.51954E-3	6.28056E-3	1.9917E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.17823E-1	-7.98559E-1	-9.13076E0	-9.14197E0	5.53131E-3	9.29832E-2	2.72835E1	-3.262E1	-3.26326E1	2.67964E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.178E-1	-7.98726E-1	-9.13079E0	-9.14221E0	5.43594E-3	9.28402E-2	2.7352E1	-3.2641E1	-3.26573E1	2.6774E1	1.73605E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.99456E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17943E-1	-7.98583E-1	-9.13093E0	-9.14214E0	5.38826E-3	9.28164E-2	2.73351E1	-3.265E1	-3.2647E1	2.67806E1	1.73529E-7	2.52538E-3	2.52538E-3	6.29098E-3	2.00673E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.17943E-1	-7.98583E-1	-9.13072E0	-9.14202E0	5.38826E-3	9.30786E-2	2.73027E1	-3.2649E1	-3.26384E1	2.67896E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99283E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.18014E-1	-7.98869E-1	-9.13072E0	-9.14209E0	5.55515E-3	9.29832E-2	2.73275E1	-3.26573E1	-3.26272E1	2.67878E1	1.73605E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.9968E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.17442E-1	-7.98368E-1	-9.13093E0	-9.14204E0	5.74589E-3	9.30548E-2	2.73063E1	-3.26476E1	-3.26681E1	2.68052E1	1.73679E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9985E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.17513E-1	-7.98416E-1	-9.13079E0	-9.14235E0	5.79357E-3	9.3317E-2	2.7265E1	-3.27021E1	-3.26254E1	2.68041E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17847E-1	-7.98297E-1	-9.13081E0	-9.14223E0	5.74589E-3	9.32693E-2	2.73169E1	-3.26897E1	-3.2603E1	2.67668E1	1.73753E-7	2.52169E-3	2.52169E-3	6.34518E-3	1.9968E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.1799E-1	-7.98535E-1	-9.13084E0	-9.14233E0	5.53131E-3	9.30786E-2	2.73069E1	-3.26789E1	-3.26062E1	2.67955E1	1.73605E-7	2.51096E-3	2.51096E-3	6.33436E-3	1.98153E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.17966E-1	-7.98392E-1	-9.13062E0	-9.14221E0	5.19753E-3	9.35555E-2	2.72827E1	-3.27228E1	-3.25405E1	2.6807E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.9963E-1