[Scan]
initial_time=2016-02-16T00:52:20
final_time=2016-02-16T00:52:39
ip_count=19
run=1030
dataset=4
scan=271
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=7.71606E-10
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=2.66838E-10
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=9.20665E-10
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=4.70448E-10
mult1=-1.02441E-8
mult2=-2.48808E-9
rf_tmon=-3.03472E-3
rf_agc=3.46777E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=3.64447E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20055E1
lens5a_imon=2.00326E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1254E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53823E1
cs_ef1b_imon=3.05098E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05355E1
cs_ea1_imon=2.19612E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43084E0
lens1_imon=2.69277E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=3.00163E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.56093E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84203E1
cs_ef1a_imon=3.01519E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.71301E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11425E1
os_restr1_imon=2.87896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=1.90304E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63572E1
os_ef1bup_imon=3.10554E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23828E0
cs_ionrep_imon=1.28804E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93258E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01769E1
cs_anode1_imon=3.25672E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=6.95515E-10
tplens_vset=1.4E-1
tplens_vmon=1.58255E0
tplens_imon=-1.22703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26301E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.5977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98231E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.52371E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22025E0
ionrepsh_imon=2.01155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34072E1
lens5b_imon=2.16476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74779E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.22884E-1
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00226E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7113E1
cs_ef2a_imon=3.19243E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63087E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.01661E-1
os_ef2bup_imon=-5.32003E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.87722E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.37282E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.28226E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72774E1
iondef1_imon=1.07931E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67613E1
iondef4_imon=1.09998E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.87161E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=2.58529E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10755E0
cs_ionaccel_imon=-2.01159E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56214E1
einzel_imon=7.74692E-6
window_vset=0.0E0
window_vmon=2.0726E-1
window_imon=-1.10108E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.3922E-4
mask2_vset=0.0E0
mask2_vmon=-1.86321E1
mask2_imon=-6.04114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92711E3
multa_neg_imon=8.09299E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.83125E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50085E3
multb_neg_imon=7.28548E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.20908E0
defgridb_imon=5.96246E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33941E1
os_fil1_imon=4.67518E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71603E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66159E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30757E1
cs_fil1_imon=1.00689E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6276E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66111E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.62454E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73656E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32648E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08409E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22373E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.98491E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.75048E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.17943E-1	-7.9875E-1	-9.1306E0	-9.14235E0	5.55515E-3	9.30071E-2	2.72815E1	-3.26992E1	-3.26195E1	2.67908E1	1.73605E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.98491E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.18086E-1	-7.98249E-1	-9.13079E0	-9.14199E0	5.55515E-3	9.29117E-2	2.72702E1	-3.27059E1	-3.25773E1	2.68292E1	1.73679E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.18253E-1	-7.98631E-1	-9.13088E0	-9.14211E0	5.45979E-3	9.28402E-2	2.72871E1	-3.26344E1	-3.26735E1	2.68046E1	1.73605E-7	2.51512E-3	2.51512E-3	6.30187E-3	1.99604E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17895E-1	-7.9875E-1	-9.13069E0	-9.14223E0	5.36442E-3	9.34362E-2	2.73293E1	-3.26555E1	-3.26655E1	2.68166E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.17633E-1	-7.98464E-1	-9.13081E0	-9.14221E0	5.43594E-3	9.31263E-2	2.73063E1	-3.26771E1	-3.25912E1	2.67937E1	1.73679E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.9968E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.178E-1	-7.98726E-1	-9.13081E0	-9.14221E0	5.36442E-3	9.30548E-2	2.72744E1	-3.26649E1	-3.26154E1	2.67926E1	1.73605E-7	2.5131E-3	2.5131E-3	6.33436E-3	1.98491E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.17704E-1	-7.98488E-1	-9.13069E0	-9.14233E0	5.60284E-3	9.30071E-2	2.73443E1	-3.26327E1	-3.26505E1	2.68094E1	1.73605E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09673E0	-8.17847E-1	-7.98869E-1	-9.13074E0	-9.1423E0	5.43594E-3	9.29832E-2	2.73122E1	-3.26732E1	-3.25818E1	2.68268E1	1.7368E-7	2.51116E-3	2.51116E-3	6.33486E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.17442E-1	-7.98917E-1	-9.13074E0	-9.14202E0	5.14984E-3	9.31263E-2	2.72522E1	-3.26651E1	-3.2623E1	2.68034E1	1.73755E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.1749E-1	-7.98488E-1	-9.13057E0	-9.14223E0	5.4121E-3	9.32693E-2	2.73874E1	-3.27065E1	-3.26278E1	2.67842E1	1.73679E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.00021E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.17633E-1	-7.98702E-1	-9.13072E0	-9.14211E0	5.29289E-3	9.31978E-2	2.72594E1	-3.26536E1	-3.26224E1	2.67884E1	1.73605E-7	2.5147E-3	2.5147E-3	6.32978E-3	1.99931E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.17633E-1	-7.98631E-1	-9.13081E0	-9.14199E0	5.19753E-3	9.32932E-2	2.73159E1	-3.26434E1	-3.26681E1	2.68226E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99977E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17537E-1	-7.98726E-1	-9.1311E0	-9.14211E0	5.24521E-3	9.29594E-2	2.73159E1	-3.26993E1	-3.26002E1	2.67848E1	1.73679E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.98491E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.178E-1	-7.98702E-1	-9.13117E0	-9.14187E0	5.126E-3	9.34124E-2	2.73063E1	-3.2653E1	-3.26248E1	2.67794E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9911E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17585E-1	-7.98702E-1	-9.13093E0	-9.14216E0	5.79357E-3	9.31263E-2	2.73234E1	-3.26809E1	-3.26231E1	2.68178E1	1.73681E-7	2.5147E-3	2.5147E-3	6.32978E-3	1.99401E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.17847E-1	-7.98941E-1	-9.13091E0	-9.14221E0	5.26905E-3	9.32217E-2	2.73082E1	-3.26719E1	-3.2585E1	2.67794E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9968E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.17561E-1	-7.98178E-1	-9.13084E0	-9.14228E0	5.38826E-3	9.32455E-2	2.72582E1	-3.26633E1	-3.26314E1	2.67794E1	1.73835E-7	2.51581E-3	2.51581E-3	6.31858E-3	1.99577E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.17585E-1	-7.98416E-1	-9.13086E0	-9.14209E0	5.19753E-3	9.2864E-2	2.73488E1	-3.26455E1	-3.26178E1	2.68221E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9934E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.17871E-1	-7.97915E-1	-9.13067E0	-9.14216E0	5.57899E-3	9.31501E-2	2.73159E1	-3.26536E1	-3.26038E1	2.67914E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.97903E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.17919E-1	-7.97939E-1	-9.13126E0	-9.14233E0	5.4121E-3	9.33409E-2	2.72774E1	-3.26885E1	-3.26301E1	2.67613E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.98491E-1