[Scan]
initial_time=2016-02-16T00:52:46
final_time=2016-02-16T00:53:06
ip_count=19
run=1030
dataset=4
scan=272
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.1737E-1
ql1_imon=7.31325E-10
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.90573E-10
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=8.83377E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.69685E-10
mult1=-1.15864E-8
mult2=-2.67722E-9
rf_tmon=-2.64259E-3
rf_agc=3.5346E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.52705E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60846E0
bslens_imon=2.426E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=2.02309E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05259E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=3.03171E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05276E1
cs_ea1_imon=2.22785E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4026E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64981E1
os_ef1alow_imon=2.9964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.55228E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84136E1
cs_ef1a_imon=3.0155E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.61598E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=2.87638E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=1.91061E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25871E0
cs_ionrep_imon=1.2729E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=3.27642E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.75249E-10
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27034E1
iondef3_imon=1.53498E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26545E1
iondef2_imon=1.56309E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98483E-4
ql6_vset=1.0E-1
ql6_vmon=9.28164E-2
ql6_imon=3.65329E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28995E0
ionrepsh_imon=1.99425E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74345E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.58933E-1
os_ea2_imon=-8.79743E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6354E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61985E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.87638E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23112E2
cs_ionfoca_imon=6.3137E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.28605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72914E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67584E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.90214E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=3.01933E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15717E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-9.29243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.4477E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.75915E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.27466E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.25806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33956E1
os_fil1_imon=4.69814E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.62936E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66073E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30749E1
cs_fil1_imon=1.00806E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62972E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66039E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1253E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.92604E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22311E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.17556E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.17704E-1	-7.98297E-1	-9.13122E0	-9.1424E0	5.4121E-3	9.32455E-2	2.7301E1	-3.26614E1	-3.26638E1	2.68018E1	1.73753E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.00363E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17823E-1	-7.98297E-1	-9.13086E0	-9.1423E0	5.38826E-3	9.30548E-2	2.72823E1	-3.26657E1	-3.26506E1	2.6801E1	1.73642E-7	2.51647E-3	2.51647E-3	6.32916E-3	1.99999E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.17871E-1	-7.98345E-1	-9.13126E0	-9.14233E0	5.36442E-3	9.3174E-2	2.73045E1	-3.26366E1	-3.26095E1	2.67656E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.18038E-1	-7.98225E-1	-9.13093E0	-9.14242E0	5.29289E-3	9.3174E-2	2.73613E1	-3.27048E1	-3.26295E1	2.67381E1	1.73605E-7	2.52061E-3	2.52061E-3	6.35059E-3	1.98153E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.17633E-1	-7.98678E-1	-9.13112E0	-9.1424E0	5.07832E-3	9.30548E-2	2.72971E1	-3.26456E1	-3.26395E1	2.6798E1	1.73605E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.00021E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.17156E-1	-7.98368E-1	-9.13105E0	-9.14204E0	5.36442E-3	9.29356E-2	2.73169E1	-3.26644E1	-3.26319E1	2.67649E1	1.7368E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98764E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.17776E-1	-7.98321E-1	-9.13084E0	-9.14216E0	5.48363E-3	9.30548E-2	2.72721E1	-3.26633E1	-3.26621E1	2.67872E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17847E-1	-7.98607E-1	-9.13095E0	-9.14199E0	5.48363E-3	9.2864E-2	2.72709E1	-3.26909E1	-3.26632E1	2.67781E1	1.73605E-7	2.51662E-3	2.51662E-3	6.28552E-3	2.00151E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17585E-1	-7.98798E-1	-9.13081E0	-9.14207E0	5.91278E-3	9.29117E-2	2.72892E1	-3.25942E1	-3.26425E1	2.68136E1	1.73605E-7	2.51287E-3	2.51287E-3	6.31269E-3	1.99562E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.18014E-1	-7.98845E-1	-9.13062E0	-9.14207E0	5.8651E-3	9.3174E-2	2.73159E1	-3.26633E1	-3.25563E1	2.67662E1	1.73755E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00847E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.17871E-1	-7.98416E-1	-9.13072E0	-9.14223E0	6.00815E-3	9.31978E-2	2.73375E1	-3.26773E1	-3.26071E1	2.68004E1	1.73605E-7	2.51443E-3	2.51443E-3	6.28006E-3	1.99803E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17609E-1	-7.98512E-1	-9.13055E0	-9.14226E0	5.74589E-3	9.32932E-2	2.73339E1	-3.26699E1	-3.25954E1	2.68337E1	1.73827E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9917E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.18086E-1	-7.98488E-1	-9.13084E0	-9.14199E0	5.79357E-3	9.34124E-2	2.73201E1	-3.262E1	-3.26675E1	2.6828E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98247E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.178E-1	-7.98464E-1	-9.13112E0	-9.1423E0	5.60284E-3	9.30071E-2	2.73165E1	-3.26554E1	-3.26038E1	2.67445E1	1.73753E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.98491E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.17847E-1	-7.97844E-1	-9.13107E0	-9.14216E0	5.48363E-3	9.32455E-2	2.73429E1	-3.26386E1	-3.26651E1	2.68194E1	1.73605E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.99931E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.17442E-1	-7.98154E-1	-9.13093E0	-9.14209E0	5.43594E-3	9.32455E-2	2.73267E1	-3.27071E1	-3.26392E1	2.68154E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.99977E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.1768E-1	-7.98392E-1	-9.13093E0	-9.14214E0	5.36442E-3	9.32455E-2	2.7301E1	-3.27056E1	-3.26065E1	2.67734E1	1.73755E-7	2.51771E-3	2.51771E-3	6.28006E-3	2.00847E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.17704E-1	-7.98607E-1	-9.13098E0	-9.14216E0	5.29289E-3	9.31978E-2	2.73243E1	-3.2653E1	-3.2641E1	2.68124E1	1.73679E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9934E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.17394E-1	-7.9844E-1	-9.13079E0	-9.14211E0	5.38826E-3	9.28879E-2	2.73263E1	-3.26732E1	-3.25688E1	2.68047E1	1.7368E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.9963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.1737E-1	-7.98655E-1	-9.13095E0	-9.14195E0	5.126E-3	9.28164E-2	2.72914E1	-3.26545E1	-3.27034E1	2.67584E1	1.73679E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9951E-1