[Scan]
initial_time=2016-02-16T00:54:06
final_time=2016-02-16T00:54:26
ip_count=19
run=1030
dataset=4
scan=275
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08752E-4
ql1_vset=
ql1_vmon=-8.17871E-1
ql1_imon=7.14219E-10
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=2.90215E-10
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=7.78604E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.10991E-10
mult1=-9.82467E-9
mult2=-2.80844E-9
rf_tmon=-3.8395E-3
rf_agc=3.34117E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=3.54826E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68777E0
bslens_imon=2.56659E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53777E1
cs_ef1b_imon=3.06141E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=2.21163E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40681E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64301E1
os_ef1alow_imon=2.99051E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.58292E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84707E1
cs_ef1a_imon=3.01588E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.83782E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10851E1
os_restr1_imon=2.87861E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=1.88357E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26111E0
cs_ionrep_imon=1.24514E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93265E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01717E1
cs_anode1_imon=3.26402E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.55794E-10
tplens_vset=1.4E-1
tplens_vmon=1.57835E0
tplens_imon=-9.74686E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26026E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.59302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98688E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.85737E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29175E0
ionrepsh_imon=1.99172E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.20081E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.10415E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.52324E-1
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00695E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7098E1
cs_ef2a_imon=3.20111E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61929E0
os_ef2alow_imon=-2.63714E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45102E-1
os_ef2bup_imon=-5.17407E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=2.87096E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.31154E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.27809E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73291E1
iondef1_imon=1.13591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.90985E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.62237E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15447E0
cs_ionaccel_imon=-1.97336E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02033E2
cs_ionfocb_imon=1.47292E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56672E1
einzel_imon=7.55926E-6
window_vset=0.0E0
window_vmon=2.1479E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-4.06024E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=8.01368E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.48375E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.7354E0
defgridb_imon=6.25806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33942E1
os_fil1_imon=4.77944E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.39167E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66434E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=1.00905E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62615E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6618E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.45077E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62184E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32149E-1
cs_fil2_imon=-2.06102E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.63988E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22396E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.48404E-1
res40_imon=-2.65104E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.17394E-1	-7.98321E-1	-9.13098E0	-9.1418E0	5.62668E-3	9.29594E-2	2.73322E1	-3.26968E1	-3.26331E1	2.68322E1	1.73753E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.17037E-1	-7.98464E-1	-9.13091E0	-9.14178E0	5.74589E-3	9.32932E-2	2.73297E1	-3.26543E1	-3.26326E1	2.67421E1	1.73753E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9883E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.17347E-1	-7.98607E-1	-9.13115E0	-9.14185E0	5.48363E-3	9.30786E-2	2.72927E1	-3.26437E1	-3.26301E1	2.68157E1	1.73681E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.17466E-1	-7.98249E-1	-9.13105E0	-9.14199E0	5.53131E-3	9.32932E-2	2.72973E1	-3.26615E1	-3.26428E1	2.68022E1	1.73605E-7	2.51603E-3	2.51603E-3	6.30212E-3	1.99227E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17823E-1	-7.98273E-1	-9.13126E0	-9.14171E0	5.57899E-3	9.31978E-2	2.73128E1	-3.26708E1	-3.26301E1	2.68286E1	1.7368E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.17585E-1	-7.98416E-1	-9.13122E0	-9.14218E0	5.43594E-3	9.32217E-2	2.73075E1	-3.26615E1	-3.26044E1	2.67337E1	1.73642E-7	2.51755E-3	2.51755E-3	6.31827E-3	1.98798E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.1737E-1	-7.98607E-1	-9.1311E0	-9.14221E0	5.98431E-3	9.32217E-2	2.73303E1	-3.26585E1	-3.26524E1	2.6795E1					
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17657E-1	-7.98559E-1	-9.13117E0	-9.14216E0	5.45979E-3	9.3174E-2	2.73039E1	-3.26326E1	-3.26056E1	2.67854E1	1.73605E-7	2.51248E-3	2.51248E-3	6.3074E-3	2.00463E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17537E-1	-7.98225E-1	-9.1311E0	-9.14218E0	5.45979E-3	9.31263E-2	2.72696E1	-3.26633E1	-3.2629E1	2.68076E1	1.73679E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.9985E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.17418E-1	-7.98416E-1	-9.13115E0	-9.14221E0	5.88894E-3	9.30309E-2	2.73249E1	-3.26897E1	-3.25281E1	2.67848E1	1.73681E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.00108E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.17633E-1	-7.98655E-1	-9.1311E0	-9.14207E0	5.60284E-3	9.28879E-2	2.73228E1	-3.2698E1	-3.26248E1	2.67694E1	1.73753E-7	2.5131E-3	2.5131E-3	6.33436E-3	1.9917E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.17657E-1	-7.98011E-1	-9.1315E0	-9.14209E0	5.53131E-3	9.31263E-2	2.72955E1	-3.26759E1	-3.26777E1	2.6802E1	1.73605E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.9968E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.17561E-1	-7.98225E-1	-9.13134E0	-9.1419E0	5.4121E-3	9.31263E-2	2.72915E1	-3.26502E1	-3.26372E1	2.68331E1	1.73605E-7	2.51915E-3	2.51915E-3	6.32978E-3	1.99401E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.1749E-1	-7.98392E-1	-9.13115E0	-9.14183E0	5.43594E-3	9.30309E-2	2.73345E1	-3.26885E1	-3.2638E1	2.68004E1	1.73679E-7	2.52599E-3	2.52599E-3	6.32896E-3	1.9883E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.17943E-1	-7.98345E-1	-9.13112E0	-9.14178E0	5.74589E-3	9.32932E-2	2.73193E1	-3.26573E1	-3.26207E1	2.68184E1	1.73755E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.00151E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.178E-1	-7.98607E-1	-9.13122E0	-9.14214E0	5.53131E-3	9.34839E-2	2.73069E1	-3.26957E1	-3.26446E1	2.68135E1	1.73605E-7	2.51417E-3	2.51417E-3	6.35059E-3	1.9968E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17657E-1	-7.98464E-1	-9.13124E0	-9.14216E0	5.6982E-3	9.34124E-2	2.72895E1	-3.26873E1	-3.25978E1	2.6831E1	1.73605E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.17466E-1	-7.9875E-1	-9.13124E0	-9.14199E0	5.76973E-3	9.32932E-2	2.72955E1	-3.26621E1	-3.26188E1	2.67935E1	1.73605E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.99977E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17657E-1	-7.98321E-1	-9.13177E0	-9.14199E0	5.43594E-3	9.29832E-2	2.73405E1	-3.26508E1	-3.26449E1	2.6774E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9883E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.17871E-1	-7.97915E-1	-9.1316E0	-9.14202E0	5.43594E-3	9.30309E-2	2.73291E1	-3.26927E1	-3.26026E1	2.67956E1	1.73753E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9934E-1