[Scan]
initial_time=2016-02-16T00:55:26
final_time=2016-02-16T00:55:46
ip_count=19
run=1030
dataset=4
scan=278
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.1749E-1
ql1_imon=6.75988E-10
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=2.78115E-10
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=7.34103E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.02145E-10
mult1=-1.06073E-8
mult2=-2.80844E-9
rf_tmon=-4.33819E-3
rf_agc=3.38743E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.67105E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.3575E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.05226E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54223E1
cs_ef1b_imon=3.04829E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04736E1
cs_ea1_imon=2.18062E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36956E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64374E1
os_ef1alow_imon=2.98775E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.56814E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.9964E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=3.71742E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10817E1
os_restr1_imon=2.86701E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=1.88718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63371E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.26316E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01401E1
cs_anode1_imon=3.24507E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=7.11489E-10
tplens_vset=1.4E-1
tplens_vmon=1.58255E0
tplens_imon=-8.66537E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26044E1
iondef3_imon=1.50181E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27233E1
iondef2_imon=1.61176E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.4436E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24789E0
ionrepsh_imon=1.9928E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.18098E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74886E1
cs_ef2b_imon=3.15137E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.91378E-1
os_ea2_imon=-5.69717E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.20074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6408E0
os_ef2alow_imon=-2.33479E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.06123E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10631E1
os_restr2_imon=2.8598E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.32091E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02278E1
cs_anode2_imon=2.29146E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.11752E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68111E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.92878E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=2.8435E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-2.01043E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56039E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=1.75296E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86993E1
mask2_imon=-5.07579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92695E3
multa_neg_imon=7.58469E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.43688E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.75345E0
defgridb_imon=6.32656E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33978E1
os_fil1_imon=5.34084E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.65339E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66208E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30824E1
cs_fil1_imon=1.0076E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6254E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66144E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1253E-2
os_fil2_imon=-2.2395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.62024E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77394E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22385E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83919E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.17156E-1	-7.98368E-1	-9.13053E0	-9.14233E0	5.6982E-3	9.3317E-2	2.73125E1	-3.26163E1	-3.26289E1	2.67798E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98419E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17537E-1	-7.9844E-1	-9.13074E0	-9.14202E0	5.38826E-3	9.29594E-2	2.7291E1	-3.26738E1	-3.2634E1	2.68046E1	1.73823E-7	2.51709E-3	2.51709E-3	6.3074E-3	1.99227E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.17609E-1	-7.98464E-1	-9.13093E0	-9.14218E0	6.10352E-3	9.31501E-2	2.73364E1	-3.26349E1	-3.26148E1	2.68046E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99456E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.17585E-1	-7.97963E-1	-9.13095E0	-9.14237E0	5.76973E-3	9.32217E-2	2.73015E1	-3.26362E1	-3.26278E1	2.68034E1	1.73605E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.17418E-1	-7.98202E-1	-9.13084E0	-9.14228E0	5.84126E-3	9.32455E-2	2.73018E1	-3.26862E1	-3.26067E1	2.68128E1	1.73605E-7	2.51662E-3	2.51662E-3	6.34037E-3	1.97559E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17323E-1	-7.98249E-1	-9.13086E0	-9.14199E0	6.07967E-3	9.30309E-2	2.73237E1	-3.26681E1	-3.26344E1	2.68022E1	1.73605E-7	2.51306E-3	2.51306E-3	6.32888E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17513E-1	-7.98082E-1	-9.13072E0	-9.14218E0	5.98431E-3	9.30071E-2	2.7344E1	-3.26174E1	-3.26231E1	2.68119E1	1.73605E-7	2.51116E-3	2.51116E-3	6.33486E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17609E-1	-7.98178E-1	-9.13086E0	-9.1423E0	5.67436E-3	9.30309E-2	2.73249E1	-3.26158E1	-3.27005E1	2.68418E1	1.73695E-7	2.51727E-3	2.51727E-3	6.32716E-3	2.00743E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.1737E-1	-7.97892E-1	-9.13072E0	-9.1423E0	5.57899E-3	9.30071E-2	2.73328E1	-3.26762E1	-3.2626E1	2.68018E1	1.73755E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.1718E-1	-7.97939E-1	-9.1306E0	-9.14226E0	5.31673E-3	9.32455E-2	2.73369E1	-3.26657E1	-3.27053E1	2.68028E1	1.73827E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.98661E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.17156E-1	-7.98178E-1	-9.13074E0	-9.14211E0	5.19753E-3	9.30786E-2	2.72642E1	-3.26747E1	-3.25791E1	2.681E1	1.7368E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.17037E-1	-7.97892E-1	-9.13148E0	-9.14183E0	5.84126E-3	9.29356E-2	2.7308E1	-3.26567E1	-3.26242E1	2.68082E1	1.73605E-7	2.51771E-3	2.51771E-3	6.28552E-3	1.9911E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16894E-1	-7.97892E-1	-9.13138E0	-9.14204E0	5.43594E-3	9.28879E-2	2.73429E1	-3.26603E1	-3.2632E1	2.67914E1	1.73755E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.1737E-1	-7.98082E-1	-9.13122E0	-9.14221E0	5.34058E-3	9.30786E-2	2.73755E1	-3.26254E1	-3.26811E1	2.68046E1	1.73753E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9968E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.17466E-1	-7.97892E-1	-9.13112E0	-9.14226E0	5.84126E-3	9.31978E-2	2.72769E1	-3.2638E1	-3.26476E1	2.67818E1	1.73528E-7	2.5147E-3	2.5147E-3	6.31858E-3	1.98344E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.1768E-1	-7.98249E-1	-9.13105E0	-9.14216E0	5.45979E-3	9.29117E-2	2.73257E1	-3.26502E1	-3.26396E1	2.68064E1	1.73755E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.98419E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.1768E-1	-7.98368E-1	-9.13126E0	-9.14178E0	5.43594E-3	9.30548E-2	2.72903E1	-3.26891E1	-3.25989E1	2.68124E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.97984E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.17394E-1	-7.98464E-1	-9.1315E0	-9.14192E0	5.29289E-3	9.31025E-2	2.73181E1	-3.26585E1	-3.2616E1	2.68406E1	1.7368E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98075E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.17585E-1	-7.9813E-1	-9.13141E0	-9.14197E0	5.76973E-3	9.34601E-2	2.73316E1	-3.26832E1	-3.2649E1	2.68196E1	1.73679E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.98322E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.1749E-1	-7.98631E-1	-9.13129E0	-9.14197E0	5.07832E-3	9.32217E-2	2.73123E1	-3.27233E1	-3.26044E1	2.68111E1	1.73679E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.9951E-1