[Scan]
initial_time=2016-02-16T00:55:53
final_time=2016-02-16T00:56:13
ip_count=19
run=1030
dataset=4
scan=279
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.17847E-1
ql1_imon=7.16138E-10
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=3.13556E-10
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=7.09939E-10
ql4_vset=
ql4_vmon=-9.14235E0
ql4_imon=4.89771E-10
mult1=-9.18652E-9
mult2=-2.74256E-9
rf_tmon=-4.51242E-3
rf_agc=3.2883E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=3.66998E-10
bslens_vset=-6.2E0
bslens_vmon=-6.7106E0
bslens_imon=2.73963E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.0537E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02442E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=2.21451E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38698E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04423E1
cs_ea2_imon=1.57499E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85235E1
cs_ef1a_imon=3.04072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=3.87621E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10997E1
os_restr1_imon=2.86629E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15354E1
os_ea1_imon=1.9171E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=1.26028E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.25516E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.76882E-10
tplens_vset=1.4E-1
tplens_vmon=1.58255E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.50974E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=3.52478E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23167E0
ionrepsh_imon=2.01191E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.16801E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8597E-1
os_ea2_imon=-5.33668E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00846E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6402E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.32552E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.31442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.27452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.09229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.90088E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.57885E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10732E0
cs_ionaccel_imon=-2.1618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.8626E1
mask2_imon=-4.64331E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92594E3
multa_neg_imon=7.12325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=7.35397E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67525E0
defgridb_imon=6.21841E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33948E1
os_fil1_imon=4.80625E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.12481E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66422E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30791E1
cs_fil1_imon=1.0078E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6239E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65947E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.83939E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8487E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2248E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.34975E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.17251E-1	-7.98917E-1	-9.13129E0	-9.14242E0	5.76973E-3	9.32455E-2	2.73039E1	-3.26803E1	-3.26384E1	2.67746E1	1.73755E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.99283E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.17585E-1	-7.98392E-1	-9.13107E0	-9.1424E0	5.43594E-3	9.26733E-2	2.72751E1	-3.27001E1	-3.2637E1	2.68046E1	1.73753E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.17537E-1	-7.98249E-1	-9.13107E0	-9.1423E0	5.43594E-3	9.27925E-2	2.73291E1	-3.26434E1	-3.2641E1	2.67944E1	1.73605E-7	2.51359E-3	2.51359E-3	6.3074E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.17132E-1	-7.98631E-1	-9.13093E0	-9.14242E0	5.19753E-3	9.30786E-2	2.72697E1	-3.26673E1	-3.26201E1	2.67932E1	1.73831E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99456E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17227E-1	-7.98583E-1	-9.1311E0	-9.14214E0	5.22137E-3	9.31263E-2	2.72684E1	-3.27107E1	-3.26032E1	2.67962E1	1.73679E-7	2.51484E-3	2.51484E-3	6.32371E-3	1.99483E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.17418E-1	-7.9875E-1	-9.13074E0	-9.14228E0	5.126E-3	9.31501E-2	2.72841E1	-3.26278E1	-3.26392E1	2.681E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.16798E-1	-7.98464E-1	-9.13124E0	-9.14245E0	5.74589E-3	9.29832E-2	2.73321E1	-3.26969E1	-3.26398E1	2.68196E1	1.7368E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.1706E-1	-7.9813E-1	-9.1311E0	-9.1419E0	5.10216E-3	9.34124E-2	2.72775E1	-3.26771E1	-3.26182E1	2.67776E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00847E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.17084E-1	-7.98297E-1	-9.131E0	-9.14237E0	5.31673E-3	9.34124E-2	2.72997E1	-3.26777E1	-3.26663E1	2.67662E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.17299E-1	-7.97844E-1	-9.1311E0	-9.14204E0	5.53131E-3	9.31025E-2	2.73586E1	-3.27155E1	-3.26242E1	2.68004E1	1.7368E-7	2.51007E-3	2.51007E-3	6.32386E-3	2.00499E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.17251E-1	-7.98059E-1	-9.13093E0	-9.14214E0	5.36442E-3	9.35078E-2	2.73045E1	-3.26897E1	-3.2632E1	2.67746E1	1.73831E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00499E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.17347E-1	-7.97939E-1	-9.13095E0	-9.14178E0	5.45979E-3	9.30309E-2	2.73296E1	-3.26306E1	-3.26351E1	2.68183E1	1.73755E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.16941E-1	-7.98273E-1	-9.131E0	-9.14204E0	5.38826E-3	9.30309E-2	2.73126E1	-3.26291E1	-3.26117E1	2.68147E1	1.73605E-7	2.52197E-3	2.52197E-3	6.31779E-3	2.01261E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.1718E-1	-7.98154E-1	-9.13117E0	-9.14187E0	5.48363E-3	9.29832E-2	2.72957E1	-3.26632E1	-3.26307E1	2.68233E1	1.73684E-7	2.51642E-3	2.51642E-3	6.3074E-3	1.98917E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.17585E-1	-7.9875E-1	-9.13117E0	-9.14216E0	5.55515E-3	9.31025E-2	2.73137E1	-3.26836E1	-3.26199E1	2.67776E1	1.73605E-7	2.51498E-3	2.51498E-3	6.31798E-3	1.99394E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17728E-1	-7.97939E-1	-9.13093E0	-9.14204E0	5.55515E-3	9.31263E-2	2.72815E1	-3.2662E1	-3.26449E1	2.68352E1	1.73681E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.0064E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.17537E-1	-7.98059E-1	-9.1315E0	-9.14207E0	5.57899E-3	9.29117E-2	2.73153E1	-3.27005E1	-3.26422E1	2.67866E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.17847E-1	-7.98106E-1	-9.13141E0	-9.1424E0	5.19753E-3	9.30309E-2	2.73087E1	-3.26795E1	-3.2611E1	2.67974E1	1.73975E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.00021E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.17728E-1	-7.98225E-1	-9.13122E0	-9.14214E0	5.50747E-3	9.2721E-2	2.72892E1	-3.27051E1	-3.26183E1	2.68209E1	1.7368E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99803E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.17847E-1	-7.98011E-1	-9.13134E0	-9.14235E0	5.14984E-3	9.28879E-2	2.73153E1	-3.26645E1	-3.26092E1	2.67992E1	1.73679E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.9934E-1