[Scan]
initial_time=2016-02-16T00:56:20
final_time=2016-02-16T00:56:39
ip_count=19
run=1030
dataset=4
scan=280
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=6.3622E-10
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.90644E-10
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=6.83892E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=4.99761E-10
mult1=-8.84939E-9
mult2=-2.66272E-9
rf_tmon=-4.24806E-3
rf_agc=3.34718E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=3.70145E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68596E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19442E1
lens5a_imon=1.98956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.05514E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05312E1
cs_ea1_imon=2.19612E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41822E0
lens1_imon=2.55938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04075E1
cs_ea2_imon=1.5941E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=3.02415E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.77631E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=2.87386E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15059E1
os_ea1_imon=1.87204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21665E0
cs_ionrep_imon=1.25523E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=3.24579E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=6.57749E-10
tplens_vset=1.4E-1
tplens_vmon=1.57955E0
tplens_imon=-3.49815E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.51443E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.59392E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24849E0
ionrepsh_imon=1.99821E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.19432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74315E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.89575E-1
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.639E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51173E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=2.86197E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.31767E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.29146E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.91483E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.9763E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0899E0
cs_ionaccel_imon=-2.0717E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.07732E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-4.71539E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.93437E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=6.63298E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=8.11822E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46773E0
defgridb_imon=6.47797E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33974E1
os_fil1_imon=5.40692E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.20289E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66236E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30794E1
cs_fil1_imon=1.00835E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62642E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66457E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88737E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2238E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30182E-3
inlet_lpb_pmon=1.99401E-1
chamber_ion_pmon=1.73681E-7
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.62606E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.17323E-1	-7.98345E-1	-9.13153E0	-9.14223E0	5.62668E-3	9.32217E-2	2.7265E1	-3.26408E1	-3.26596E1	2.6774E1	1.7368E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.98937E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.17418E-1	-7.98821E-1	-9.1315E0	-9.14216E0	5.4121E-3	9.30786E-2	2.72855E1	-3.27007E1	-3.26107E1	2.67782E1	1.73605E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.17275E-1	-7.98154E-1	-9.1311E0	-9.1423E0	5.53131E-3	9.30071E-2	2.73329E1	-3.27042E1	-3.26411E1	2.6796E1	1.73758E-7	2.51693E-3	2.51693E-3	6.34661E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16751E-1	-7.98249E-1	-9.13093E0	-9.14218E0	5.98431E-3	9.32217E-2	2.72516E1	-3.26248E1	-3.26326E1	2.67992E1	1.73677E-7	2.51498E-3	2.51498E-3	6.30212E-3	1.99394E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16965E-1	-7.98845E-1	-9.13112E0	-9.14237E0	5.91278E-3	9.32455E-2	2.73033E1	-3.26655E1	-3.26496E1	2.68076E1	1.7368E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.9911E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16917E-1	-7.98559E-1	-9.13093E0	-9.14249E0	5.4121E-3	9.3317E-2	2.73189E1	-3.26386E1	-3.26098E1	2.68148E1	1.73605E-7	2.51647E-3	2.51647E-3	6.31827E-3	1.99655E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.17347E-1	-7.98273E-1	-9.13105E0	-9.14233E0	5.74589E-3	9.30309E-2	2.73075E1	-3.26449E1	-3.25658E1	2.67944E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17156E-1	-7.98535E-1	-9.13095E0	-9.14242E0	5.67436E-3	9.32932E-2	2.73339E1	-3.26482E1	-3.26176E1	2.67974E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.98661E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.17323E-1	-7.98559E-1	-9.13095E0	-9.14209E0	5.57899E-3	9.3174E-2	2.73051E1	-3.2659E1	-3.26254E1	2.6792E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-8.17299E-1	-7.9813E-1	-9.13095E0	-9.14204E0	5.45979E-3	9.3317E-2	2.73413E1	-3.27059E1	-3.27258E1	2.67521E1	1.73605E-7	2.52131E-3	2.52131E-3	6.30212E-3	2.00567E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16917E-1	-7.98225E-1	-9.13105E0	-9.14245E0	5.50747E-3	9.32217E-2	2.73472E1	-3.26639E1	-3.2593E1	2.68064E1	1.73683E-7	2.51611E-3	2.51611E-3	6.3131E-3	1.99883E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.17299E-1	-7.98416E-1	-9.13124E0	-9.14183E0	5.53131E-3	9.31978E-2	2.7308E1	-3.26779E1	-3.2616E1	2.68382E1	1.73755E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.98247E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.17347E-1	-7.98059E-1	-9.13138E0	-9.1419E0	5.74589E-3	9.30071E-2	2.72654E1	-3.26699E1	-3.25984E1	2.67914E1	1.73753E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.9951E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0965E0	-8.17084E-1	-7.98225E-1	-9.1305E0	-9.14216E0	5.57899E-3	9.30309E-2	2.73411E1	-3.26831E1	-3.25888E1	2.6843E1	1.73529E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.98764E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16941E-1	-7.98368E-1	-9.13084E0	-9.14214E0	5.45979E-3	9.31025E-2	2.73157E1	-3.26897E1	-3.26378E1	2.68128E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.97731E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.1706E-1	-7.98464E-1	-9.13119E0	-9.14221E0	5.57899E-3	9.33886E-2	2.73291E1	-3.26434E1	-3.2614E1	2.67854E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.99E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17013E-1	-7.97939E-1	-9.13138E0	-9.14233E0	5.50747E-3	9.30786E-2	2.73345E1	-3.2647E1	-3.2599E1	2.67689E1	1.73755E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.17156E-1	-7.98106E-1	-9.13141E0	-9.14233E0	5.88894E-3	9.29356E-2	2.73335E1	-3.26666E1	-3.26144E1	2.67877E1	1.73605E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16655E-1	-7.9844E-1	-9.13146E0	-9.1419E0	5.65052E-3	9.31501E-2	2.72654E1	-3.26729E1	-3.26374E1	2.67994E1	1.73605E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.00399E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16822E-1	-7.98225E-1	-9.13138E0	-9.14204E0	5.65052E-3	9.3174E-2	2.73261E1	-3.26693E1	-3.26338E1	2.68244E1	1.73681E-7	2.52139E-3	2.52139E-3	6.30182E-3	1.99401E-1