[Scan]
initial_time=2016-02-16T00:56:46
final_time=2016-02-16T00:57:06
ip_count=19
run=1030
dataset=4
scan=281
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=7.0138E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.69473E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=7.38478E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.08785E-10
mult1=-9.34032E-9
mult2=-2.79311E-9
rf_tmon=-5.06643E-3
rf_agc=3.24713E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.73936E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68981E0
bslens_imon=2.67068E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.97873E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53499E1
cs_ef1b_imon=3.05515E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02599E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=2.18012E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39026E0
lens1_imon=2.6282E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64591E1
os_ef1alow_imon=2.97835E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.57948E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8451E1
cs_ef1a_imon=3.02283E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.77202E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11233E1
os_restr1_imon=2.88278E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.156E1
os_ea1_imon=1.90334E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.10902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.23828E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01751E1
cs_anode1_imon=3.26089E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=6.94895E-10
tplens_vset=1.4E-1
tplens_vmon=1.64733E0
tplens_imon=-5.11285E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26211E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.59328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98671E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.56722E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=2.01129E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3331E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74797E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.42187E-1
os_ea2_imon=-3.59057E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06162E2
lens4b_imon=2.00676E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.1893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60597E0
os_ef2alow_imon=-2.58153E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43364E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10718E1
os_restr2_imon=2.87583E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01699E1
cs_anode2_imon=2.29094E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73008E1
iondef1_imon=1.08786E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.09407E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.91368E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.7945E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10234E0
cs_ionaccel_imon=-1.83783E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.4716E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.78862E-6
window_vset=0.0E0
window_vmon=1.69611E-1
window_imon=-9.37738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.66668E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=7.76389E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.66667E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.94982E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62997E0
defgridb_imon=6.3375E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33938E1
os_fil1_imon=4.84895E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.65232E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66478E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=1.00939E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6254E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66089E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02798E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.98741E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76098E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04933E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22354E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.01112E-1
res40_imon=-2.68232E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.17037E-1	-7.98893E-1	-9.13141E0	-9.14211E0	5.67436E-3	9.34124E-2	2.73104E1	-3.26673E1	-3.26402E1	2.67854E1	1.73753E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9951E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.17013E-1	-7.98488E-1	-9.13131E0	-9.14221E0	5.55515E-3	9.33409E-2	2.73045E1	-3.26878E1	-3.26364E1	2.67998E1	1.73605E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.1718E-1	-7.9875E-1	-9.13124E0	-9.14218E0	5.6982E-3	9.32693E-2	2.72951E1	-3.26708E1	-3.26236E1	2.68364E1	1.73605E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.17204E-1	-7.98798E-1	-9.13103E0	-9.1423E0	5.53131E-3	9.30548E-2	2.73087E1	-3.26915E1	-3.26356E1	2.68148E1	1.73605E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.17561E-1	-7.9782E-1	-9.13103E0	-9.14221E0	5.29289E-3	9.32217E-2	2.73454E1	-3.2617E1	-3.26482E1	2.6843E1	1.7368E-7	2.51116E-3	2.51116E-3	6.27461E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17347E-1	-7.9813E-1	-9.13088E0	-9.14178E0	5.24521E-3	9.32693E-2	2.72997E1	-3.2626E1	-3.26428E1	2.68028E1	1.73831E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99283E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.17013E-1	-7.98702E-1	-9.13084E0	-9.14197E0	5.34058E-3	9.29594E-2	2.7301E1	-3.26747E1	-3.26527E1	2.6763E1	1.73831E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.17013E-1	-7.98821E-1	-9.13086E0	-9.14207E0	5.43594E-3	9.2864E-2	2.73305E1	-3.2682E1	-3.26375E1	2.68063E1	1.73605E-7	2.51498E-3	2.51498E-3	6.31798E-3	1.99562E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.17275E-1	-7.98464E-1	-9.13107E0	-9.14197E0	5.4121E-3	9.30071E-2	2.72679E1	-3.26366E1	-3.26195E1	2.67992E1	1.73605E-7	2.51952E-3	2.51952E-3	6.30171E-3	1.99703E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.17156E-1	-7.98702E-1	-9.13103E0	-9.14209E0	5.36442E-3	9.31025E-2	2.73706E1	-3.27095E1	-3.26789E1	2.6774E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17132E-1	-7.98488E-1	-9.13119E0	-9.1423E0	5.57899E-3	9.29594E-2	2.73345E1	-3.26836E1	-3.26499E1	2.67842E1	1.73605E-7	2.52318E-3	2.52318E-3	6.34037E-3	1.97731E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.17323E-1	-7.9875E-1	-9.13115E0	-9.14216E0	5.50747E-3	9.30309E-2	2.72883E1	-3.26651E1	-3.26554E1	2.67962E1	1.73605E-7	2.5225E-3	2.5225E-3	6.31299E-3	1.97294E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.17323E-1	-7.98583E-1	-9.13107E0	-9.14221E0	5.14984E-3	9.28402E-2	2.72823E1	-3.26488E1	-3.26543E1	2.68136E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.9911E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.17108E-1	-7.98631E-1	-9.13131E0	-9.14237E0	4.95911E-3	9.30071E-2	2.73476E1	-3.26673E1	-3.2613E1	2.68046E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98419E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.17466E-1	-7.98535E-1	-9.13126E0	-9.14216E0	5.10216E-3	9.30786E-2	2.73159E1	-3.26591E1	-3.26368E1	2.67944E1	1.73605E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9883E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.17251E-1	-7.98631E-1	-9.13107E0	-9.14199E0	5.48363E-3	9.34362E-2	2.73259E1	-3.26676E1	-3.26805E1	2.67986E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.17513E-1	-7.98464E-1	-9.13117E0	-9.14211E0	5.65052E-3	9.32932E-2	2.72871E1	-3.26452E1	-3.26344E1	2.67866E1	1.73605E-7	2.5225E-3	2.5225E-3	6.34099E-3	1.98696E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.17251E-1	-7.98297E-1	-9.13112E0	-9.14197E0	5.67436E-3	9.31025E-2	2.72915E1	-3.2652E1	-3.26113E1	2.68286E1	1.7368E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.17466E-1	-7.98225E-1	-9.13129E0	-9.14187E0	5.74589E-3	9.30071E-2	2.73216E1	-3.26697E1	-3.26354E1	2.67896E1	1.73679E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.9985E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16894E-1	-7.98488E-1	-9.13143E0	-9.1419E0	5.55515E-3	9.30786E-2	2.73008E1	-3.26744E1	-3.26211E1	2.68442E1	1.73753E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.98661E-1