[Scan]
initial_time=2016-02-16T00:57:13
final_time=2016-02-16T00:57:32
ip_count=19
run=1030
dataset=4
scan=282
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08742E-4
ql1_vset=
ql1_vmon=-8.17537E-1
ql1_imon=6.49333E-10
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=2.72596E-10
ql3_vset=
ql3_vmon=-9.13079E0
ql3_imon=6.75356E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=5.07915E-10
mult1=-1.07406E-8
mult2=-2.79381E-9
rf_tmon=-4.24402E-3
rf_agc=3.35805E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=3.58903E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.50531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=1.9719E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.0555E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0488E1
cs_ea1_imon=2.2246E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38818E0
lens1_imon=2.81533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03546E1
cs_ea2_imon=1.59986E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.99027E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.75664E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=2.88107E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15552E1
os_ea1_imon=1.88682E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.10235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20944E0
cs_ionrep_imon=1.23649E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=3.25408E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.26247E-10
tplens_vset=1.4E-1
tplens_vmon=1.61319E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26537E1
iondef3_imon=1.53173E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2629E1
iondef2_imon=1.60671E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.9867E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.57032E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=1.99749E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33435E1
lens5b_imon=2.17954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.72151E-1
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71059E1
cs_ef2a_imon=3.21624E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60176E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.16335E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=2.87458E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.31442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.30624E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73358E1
iondef1_imon=1.11572E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68059E1
iondef4_imon=1.10251E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.87575E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=2.66576E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-2.11855E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.16742E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86098E1
mask2_imon=-4.67935E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=7.34676E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93671E3
defgrida_imon=6.4275E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50176E3
multb_neg_imon=7.72889E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=6.22922E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33952E1
os_fil1_imon=5.23272E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.78553E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66339E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30774E1
cs_fil1_imon=1.00754E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63003E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6629E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70433E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.08933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2241E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.00735E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51287E-3
foreline_cvt_pmon=2.51287E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.89926E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16751E-1	-7.98178E-1	-9.13107E0	-9.14221E0	5.96046E-3	9.2864E-2	2.72968E1	-3.26738E1	-3.26779E1	2.68118E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00673E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16703E-1	-7.98249E-1	-9.13105E0	-9.14207E0	5.43594E-3	9.30548E-2	2.73106E1	-3.26689E1	-3.26389E1	2.6807E1	1.73605E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.17347E-1	-7.98154E-1	-9.13088E0	-9.14173E0	5.53131E-3	9.28879E-2	2.72935E1	-3.26324E1	-3.26191E1	2.68012E1	1.73755E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.00499E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.1706E-1	-7.98273E-1	-9.13124E0	-9.14185E0	5.50747E-3	9.2721E-2	2.73087E1	-3.26837E1	-3.26206E1	2.67806E1	1.73679E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.17084E-1	-7.98154E-1	-9.13115E0	-9.14202E0	5.31673E-3	9.29832E-2	2.72955E1	-3.26621E1	-3.26855E1	2.68016E1	1.73605E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17442E-1	-7.97582E-1	-9.13115E0	-9.14199E0	5.57899E-3	9.29594E-2	2.7324E1	-3.26661E1	-3.2616E1	2.67782E1	1.73679E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9968E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.17275E-1	-7.9813E-1	-9.13141E0	-9.14187E0	5.79357E-3	9.28164E-2	2.73033E1	-3.26383E1	-3.26027E1	2.681E1	1.73605E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.17347E-1	-7.97939E-1	-9.13117E0	-9.14197E0	5.74589E-3	9.27925E-2	2.73502E1	-3.26801E1	-3.26452E1	2.67812E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09657E0	-8.17251E-1	-7.98202E-1	-9.13136E0	-9.14202E0	5.65052E-3	9.30309E-2	2.73225E1	-3.26843E1	-3.2608E1	2.68118E1	1.73605E-7	2.51359E-3	2.51359E-3	6.3074E-3	1.99401E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16965E-1	-7.98368E-1	-9.13129E0	-9.14192E0	5.76973E-3	9.28164E-2	2.72919E1	-3.26843E1	-3.26741E1	2.68076E1	1.73755E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.1706E-1	-7.98345E-1	-9.13105E0	-9.14178E0	5.38826E-3	9.28164E-2	2.73237E1	-3.26681E1	-3.26807E1	2.6816E1	1.7368E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09688E0	-8.17156E-1	-7.98464E-1	-9.13119E0	-9.14199E0	5.48363E-3	9.2864E-2	2.73122E1	-3.26992E1	-3.26095E1	2.67944E1	1.73753E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9951E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.17275E-1	-7.98559E-1	-9.13105E0	-9.14209E0	5.81741E-3	9.28164E-2	2.72978E1	-3.26364E1	-3.26254E1	2.68076E1	1.73605E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.99456E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.17323E-1	-7.98273E-1	-9.13088E0	-9.14209E0	5.48363E-3	9.27687E-2	2.73261E1	-3.26567E1	-3.26663E1	2.67938E1	1.7368E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.99283E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.1737E-1	-7.9813E-1	-9.13076E0	-9.14216E0	5.67436E-3	9.28164E-2	2.72949E1	-3.26687E1	-3.25954E1	2.67812E1	1.73912E-7	2.51693E-3	2.51693E-3	6.33538E-3	1.99401E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16989E-1	-7.98273E-1	-9.13091E0	-9.14185E0	5.6982E-3	9.28879E-2	2.73116E1	-3.26408E1	-3.2672E1	2.68556E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17108E-1	-7.98583E-1	-9.13129E0	-9.14209E0	5.55515E-3	9.27687E-2	2.72823E1	-3.26873E1	-3.262E1	2.68016E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9934E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17466E-1	-7.98559E-1	-9.13091E0	-9.14197E0	5.60284E-3	9.29594E-2	2.73057E1	-3.2685E1	-3.26213E1	2.67746E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.01547E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.17251E-1	-7.98726E-1	-9.13079E0	-9.14183E0	5.91278E-3	9.27925E-2	2.72644E1	-3.26242E1	-3.26632E1	2.68226E1	1.73679E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.17537E-1	-7.9813E-1	-9.13079E0	-9.14226E0	5.38826E-3	9.32217E-2	2.73358E1	-3.2629E1	-3.26537E1	2.68059E1	1.73605E-7	2.51287E-3	2.51287E-3	6.31269E-3	2.00735E-1