[Scan]
initial_time=2016-02-16T00:57:40
final_time=2016-02-16T00:57:59
ip_count=19
run=1030
dataset=4
scan=283
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=6.83987E-10
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.85685E-10
ql3_vset=
ql3_vmon=-9.13079E0
ql3_imon=6.65474E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.08201E-10
mult1=-1.16428E-8
mult2=-2.94217E-9
rf_tmon=-3.67728E-3
rf_agc=3.35979E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=3.73673E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.63174E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19972E1
lens5a_imon=2.00173E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.04962E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.03964E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04929E1
cs_ea1_imon=2.22719E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39085E0
lens1_imon=3.10956E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.56674E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83992E1
cs_ef1a_imon=3.01658E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=3.94106E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.87566E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=1.89944E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25977E0
cs_ionrep_imon=1.27014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.26273E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.6967E-10
tplens_vset=1.4E-1
tplens_vmon=1.56711E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26554E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.5947E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98657E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.68524E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25446E0
ionrepsh_imon=2.01978E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34248E1
lens5b_imon=2.20135E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74375E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.35698E-1
os_ea2_imon=-6.84683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00722E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7151E1
cs_ef2a_imon=3.19858E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6336E0
os_ef2alow_imon=-2.4357E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4877E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=2.86341E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02175E1
cs_anode2_imon=2.27849E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72733E1
iondef1_imon=1.12608E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71793E1
olens3_imon=1.91996E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=2.44653E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56141E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.16742E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.41348E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.74454E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.68017E0
defgridb_imon=6.35166E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33921E1
os_fil1_imon=4.69814E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.49121E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66381E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30751E1
cs_fil1_imon=1.00876E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62594E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66295E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06597E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.59912E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75971E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22486E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.62005E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.17132E-1	-7.98488E-1	-9.13072E0	-9.14223E0	5.17368E-3	9.27448E-2	2.72439E1	-3.26474E1	-3.26462E1	2.67914E1	1.73605E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.98764E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.17156E-1	-7.98416E-1	-9.13093E0	-9.14209E0	5.126E-3	9.28402E-2	2.73231E1	-3.26801E1	-3.26176E1	2.67782E1	1.73679E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.98661E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.17227E-1	-7.98059E-1	-9.13136E0	-9.14209E0	5.8651E-3	9.2864E-2	2.72989E1	-3.26752E1	-3.26227E1	2.68177E1	1.73605E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16941E-1	-7.98321E-1	-9.131E0	-9.1423E0	5.8651E-3	9.31025E-2	2.72883E1	-3.26428E1	-3.26164E1	2.67872E1	1.73675E-7	2.5165E-3	2.5165E-3	6.32273E-3	2.00631E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17108E-1	-7.98225E-1	-9.13076E0	-9.14216E0	5.6982E-3	9.30786E-2	2.72715E1	-3.26182E1	-3.26554E1	2.67998E1	1.73827E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.17275E-1	-7.98035E-1	-9.13076E0	-9.14216E0	5.24521E-3	9.31501E-2	2.72931E1	-3.26452E1	-3.26272E1	2.68118E1	1.73835E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.00996E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.17084E-1	-7.98345E-1	-9.131E0	-9.14226E0	5.07832E-3	9.32455E-2	2.73523E1	-3.2662E1	-3.26296E1	2.68148E1	1.73679E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.00705E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09711E0	-8.17442E-1	-7.98011E-1	-9.13084E0	-9.1418E0	5.57899E-3	9.27448E-2	2.72684E1	-3.26518E1	-3.26494E1	2.67955E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00673E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.17132E-1	-7.98392E-1	-9.13103E0	-9.14185E0	5.53131E-3	9.29832E-2	2.73057E1	-3.26579E1	-3.25835E1	2.68707E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99977E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.17251E-1	-7.97868E-1	-9.13062E0	-9.14195E0	5.26905E-3	9.3317E-2	2.73369E1	-3.26711E1	-3.26825E1	2.681E1	1.73679E-7	2.52492E-3	2.52492E-3	6.31278E-3	1.9917E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.16894E-1	-7.9844E-1	-9.131E0	-9.14226E0	5.65052E-3	9.31025E-2	2.73159E1	-3.26591E1	-3.26506E1	2.6816E1	1.7368E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.17132E-1	-7.98464E-1	-9.13079E0	-9.14204E0	4.95911E-3	9.33647E-2	2.73207E1	-3.26518E1	-3.2653E1	2.67674E1	1.73605E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.99283E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.1706E-1	-7.98512E-1	-9.13088E0	-9.14202E0	5.10216E-3	9.32455E-2	2.72805E1	-3.26332E1	-3.2647E1	2.68022E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9883E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.17013E-1	-7.98321E-1	-9.13115E0	-9.14218E0	4.86374E-3	9.2864E-2	2.72861E1	-3.26787E1	-3.26229E1	2.6786E1	1.73605E-7	2.5225E-3	2.5225E-3	6.31299E-3	1.98872E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16965E-1	-7.98249E-1	-9.13069E0	-9.14216E0	5.24521E-3	9.31978E-2	2.73281E1	-3.26413E1	-3.2626E1	2.67595E1	1.73605E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16774E-1	-7.98321E-1	-9.13115E0	-9.14202E0	5.81741E-3	9.32932E-2	2.72823E1	-3.26969E1	-3.26573E1	2.68058E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00847E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16894E-1	-7.98059E-1	-9.131E0	-9.14204E0	5.34058E-3	9.32932E-2	2.72815E1	-3.26561E1	-3.26396E1	2.67824E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.17323E-1	-7.98225E-1	-9.1311E0	-9.14202E0	5.43594E-3	9.29356E-2	2.72564E1	-3.26729E1	-3.26104E1	2.67717E1	1.73679E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.9934E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.17108E-1	-7.98559E-1	-9.13091E0	-9.14226E0	5.55515E-3	9.29832E-2	2.73234E1	-3.27062E1	-3.26236E1	2.68328E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.99977E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16798E-1	-7.98416E-1	-9.13079E0	-9.14216E0	5.36442E-3	9.29832E-2	2.72733E1	-3.26717E1	-3.26554E1	2.68046E1	1.73605E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.9968E-1