[Scan]
initial_time=2016-02-16T00:58:06
final_time=2016-02-16T00:58:26
ip_count=19
run=1030
dataset=4
scan=284
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.17084E-1
ql1_imon=6.73914E-10
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.8491E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=6.50763E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=5.07069E-10
mult1=-9.75243E-9
mult2=-2.68268E-9
rf_tmon=-3.90559E-3
rf_agc=3.30211E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=3.68524E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70633E0
bslens_imon=2.61405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=1.96917E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05323E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53621E1
cs_ef1b_imon=3.04264E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04864E1
cs_ea1_imon=2.19782E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3938E0
lens1_imon=2.74854E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64828E1
os_ef1alow_imon=3.00824E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.56037E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=2.99399E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.87681E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1121E1
os_restr1_imon=2.87757E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15453E1
os_ea1_imon=1.88953E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63896E1
os_ef1bup_imon=3.10589E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24148E0
cs_ionrep_imon=1.26093E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.937E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01757E1
cs_anode1_imon=3.26124E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=7.0132E-10
tplens_vset=1.4E-1
tplens_vmon=1.63789E0
tplens_imon=-2.8473E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.49064E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.52287E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22909E0
ionrepsh_imon=1.99253E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13196E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.67552E-1
os_ea2_imon=-4.33385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70725E1
cs_ef2a_imon=3.17991E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65114E0
os_ef2alow_imon=-2.45295E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82171E-1
os_ef2bup_imon=-5.32003E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10683E1
os_restr2_imon=2.86193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.33078E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01832E1
cs_anode2_imon=2.28295E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72775E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67716E1
iondef4_imon=1.09789E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.92112E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.19214E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.91081E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56463E1
einzel_imon=7.83728E-6
window_vset=0.0E0
window_vmon=1.77141E-1
window_imon=-1.07327E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39341E-4
mask2_vset=0.0E0
mask2_vmon=-1.86385E1
mask2_imon=-7.91778E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.49489E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.86134E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.056E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59749E0
defgridb_imon=6.472E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33955E1
os_fil1_imon=4.91266E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.43222E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66422E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30783E1
cs_fil1_imon=1.00809E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62725E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66478E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06597E-2
os_fil2_imon=-2.33904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.58196E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68758E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-2.35641E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.39285E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22338E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.33924E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.16798E-1	-7.98941E-1	-9.13117E0	-9.14228E0	5.05447E-3	9.30071E-2	2.73352E1	-3.2626E1	-3.2629E1	2.68016E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.97388E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.16917E-1	-7.98464E-1	-9.13124E0	-9.14204E0	5.48363E-3	9.31978E-2	2.72883E1	-3.26663E1	-3.26362E1	2.68352E1	1.73677E-7	2.51709E-3	2.51709E-3	6.31269E-3	1.99394E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-8.16584E-1	-7.98726E-1	-9.13091E0	-9.14214E0	5.4121E-3	9.30786E-2	2.72762E1	-3.26714E1	-3.26012E1	2.68018E1	1.73605E-7	2.5147E-3	2.5147E-3	6.32978E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16751E-1	-7.98869E-1	-9.13117E0	-9.14226E0	5.38826E-3	9.30309E-2	2.72967E1	-3.26855E1	-3.25809E1	2.67896E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.98661E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17037E-1	-7.98559E-1	-9.13095E0	-9.14211E0	5.60284E-3	9.34839E-2	2.72943E1	-3.26699E1	-3.26603E1	2.67944E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.1706E-1	-7.98225E-1	-9.13103E0	-9.14221E0	5.38826E-3	9.30309E-2	2.72937E1	-3.26428E1	-3.26506E1	2.68178E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.1656E-1	-7.98512E-1	-9.13084E0	-9.14192E0	5.53131E-3	9.31263E-2	2.73508E1	-3.27107E1	-3.25966E1	2.68304E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.17084E-1	-7.98178E-1	-9.1311E0	-9.14204E0	5.24521E-3	9.31501E-2	2.73303E1	-3.26945E1	-3.26254E1	2.67644E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.1687E-1	-7.97868E-1	-9.13098E0	-9.14209E0	5.50747E-3	9.30071E-2	2.72744E1	-3.26667E1	-3.2639E1	2.68124E1	1.73679E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.17251E-1	-7.98631E-1	-9.13129E0	-9.14199E0	5.67436E-3	9.34124E-2	2.72961E1	-3.2635E1	-3.2638E1	2.68142E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.17227E-1	-7.98082E-1	-9.1311E0	-9.1419E0	5.57899E-3	9.32455E-2	2.73327E1	-3.26651E1	-3.26188E1	2.6795E1	1.73605E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9968E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.17013E-1	-7.97868E-1	-9.13124E0	-9.14226E0	5.72205E-3	9.29117E-2	2.72925E1	-3.27095E1	-3.26567E1	2.67902E1	1.73681E-7	2.51136E-3	2.51136E-3	6.3074E-3	1.99224E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16774E-1	-7.98345E-1	-9.1311E0	-9.14211E0	5.38826E-3	9.27925E-2	2.72847E1	-3.26795E1	-3.26338E1	2.68022E1	1.73755E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16989E-1	-7.98464E-1	-9.13103E0	-9.14185E0	5.43594E-3	9.28164E-2	2.73173E1	-3.26603E1	-3.26474E1	2.67734E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.00325E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16846E-1	-7.98368E-1	-9.13103E0	-9.14209E0	5.4121E-3	9.26495E-2	2.72898E1	-3.26467E1	-3.26508E1	2.67974E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.17132E-1	-7.98607E-1	-9.13124E0	-9.14202E0	5.126E-3	9.32217E-2	2.73105E1	-3.26885E1	-3.262E1	2.67529E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17299E-1	-7.98225E-1	-9.13126E0	-9.14207E0	5.10216E-3	9.29832E-2	2.73303E1	-3.26506E1	-3.26302E1	2.67848E1	1.7368E-7	2.51662E-3	2.51662E-3	6.34037E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16727E-1	-7.98416E-1	-9.13115E0	-9.14207E0	5.00679E-3	9.29594E-2	2.7312E1	-3.26642E1	-3.26388E1	2.67636E1	1.73679E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.97142E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.17251E-1	-7.97915E-1	-9.13098E0	-9.14211E0	5.19753E-3	9.27687E-2	2.73075E1	-3.2635E1	-3.26921E1	2.67926E1	1.73679E-7	2.51096E-3	2.51096E-3	6.29665E-3	1.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17084E-1	-7.98273E-1	-9.13107E0	-9.14226E0	5.31673E-3	9.31501E-2	2.72775E1	-3.26711E1	-3.26488E1	2.67716E1	1.73679E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9883E-1