[Scan]
initial_time=2016-02-16T00:58:33
final_time=2016-02-16T00:58:52
ip_count=19
run=1030
dataset=4
scan=285
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-8.16751E-1
ql1_imon=6.57439E-10
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=2.87747E-10
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=6.68979E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.07665E-10
mult1=-1.08602E-8
mult2=-2.7246E-9
rf_tmon=-4.27209E-3
rf_agc=3.28229E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=3.75688E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71841E0
bslens_imon=2.73963E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19442E1
lens5a_imon=1.9636E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=3.04217E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02496E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05042E1
cs_ea1_imon=2.18747E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34913E0
lens1_imon=2.48728E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64434E1
os_ef1alow_imon=2.99459E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.62366E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=3.02559E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.78692E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.86557E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1554E1
os_ea1_imon=1.87781E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.10812E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27012E0
cs_ionrep_imon=1.25956E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91828E2
cs_nozzle_imon=1.93269E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=3.24903E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=6.9319E-10
tplens_vset=1.4E-1
tplens_vmon=1.63783E0
tplens_imon=1.00804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26675E1
iondef3_imon=1.46756E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.59157E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03E2
lens6_imon=2.98472E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.23963E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=2.03823E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34299E-1
os_ea2_imon=-3.42605E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00489E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64261E0
os_ef2alow_imon=-2.67356E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.1213E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=2.85368E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.31154E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.29326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72823E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.95276E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=2.52736E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-2.08612E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=1.88511E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86044E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.46212E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.5789E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.3792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29931E0
defgridb_imon=5.96967E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3397E1
os_fil1_imon=4.31972E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77953E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6638E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=1.00884E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62972E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66629E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06081E-2
os_fil2_imon=-2.36564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.19978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55094E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.27767E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98247E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13952E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.17108E-1	-7.98583E-1	-9.13134E0	-9.14202E0	5.14984E-3	9.33886E-2	2.7324E1	-3.26832E1	-3.26065E1	2.67644E1	1.73605E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.00673E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.17251E-1	-7.98416E-1	-9.13146E0	-9.14204E0	5.10216E-3	9.30548E-2	2.73498E1	-3.26676E1	-3.26015E1	2.67962E1	1.73605E-7	2.52599E-3	2.52599E-3	6.35059E-3	2.00705E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.17227E-1	-7.98297E-1	-9.13131E0	-9.14233E0	5.26905E-3	9.31263E-2	2.72854E1	-3.26417E1	-3.2644E1	2.67659E1	1.73681E-7	2.51359E-3	2.51359E-3	6.31299E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09665E0	-8.17037E-1	-7.98392E-1	-9.13124E0	-9.14218E0	5.22137E-3	9.31501E-2	2.72895E1	-3.26609E1	-3.26224E1	2.68016E1	1.73677E-7	2.52236E-3	2.52236E-3	6.33919E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-8.17108E-1	-7.98202E-1	-9.13124E0	-9.14192E0	4.91142E-3	9.29356E-2	2.73151E1	-3.26502E1	-3.26119E1	2.67665E1	1.73605E-7	2.52099E-3	2.52099E-3	6.34588E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.17156E-1	-7.9844E-1	-9.13119E0	-9.14166E0	5.07832E-3	9.29117E-2	2.73039E1	-3.26843E1	-3.26561E1	2.678E1	1.73679E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.17251E-1	-7.98082E-1	-9.13093E0	-9.1418E0	5.38826E-3	9.28164E-2	2.73718E1	-3.26071E1	-3.26537E1	2.68016E1	1.73679E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9883E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.16607E-1	-7.98392E-1	-9.13143E0	-9.14183E0	5.17368E-3	9.29356E-2	2.73247E1	-3.26364E1	-3.2648E1	2.68094E1	1.73681E-7	2.51025E-3	2.51025E-3	6.34099E-3	1.99401E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16894E-1	-7.98535E-1	-9.13131E0	-9.14199E0	5.50747E-3	9.30071E-2	2.72817E1	-3.26338E1	-3.26194E1	2.68827E1	1.73605E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16607E-1	-7.98321E-1	-9.1311E0	-9.14197E0	5.22137E-3	9.2721E-2	2.73486E1	-3.27442E1	-3.25434E1	2.6792E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00847E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17108E-1	-7.97844E-1	-9.13131E0	-9.14192E0	5.31673E-3	9.29832E-2	2.73364E1	-3.26791E1	-3.25924E1	2.67648E1	1.73605E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.17084E-1	-7.98583E-1	-9.13129E0	-9.14192E0	5.60284E-3	9.28402E-2	2.73209E1	-3.26788E1	-3.26322E1	2.67745E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98937E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.16917E-1	-7.98488E-1	-9.13126E0	-9.14197E0	5.43594E-3	9.29594E-2	2.73339E1	-3.265E1	-3.26362E1	2.68406E1	1.73657E-7	2.5146E-3	2.5146E-3	6.31499E-3	1.99523E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16989E-1	-7.98345E-1	-9.13098E0	-9.14221E0	5.36442E-3	9.29356E-2	2.73486E1	-3.26878E1	-3.26132E1	2.68076E1	1.73605E-7	2.51552E-3	2.51552E-3	6.35692E-3	1.9911E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.1706E-1	-7.98488E-1	-9.1311E0	-9.14197E0	5.24521E-3	9.28879E-2	2.72738E1	-3.26868E1	-3.25617E1	2.67955E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98419E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.16917E-1	-7.98392E-1	-9.13095E0	-9.14223E0	5.14984E-3	9.28879E-2	2.72979E1	-3.26705E1	-3.26585E1	2.6786E1	1.73755E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16774E-1	-7.98607E-1	-9.13091E0	-9.14209E0	5.24521E-3	9.2721E-2	2.73476E1	-3.26579E1	-3.25947E1	2.67848E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.16703E-1	-7.98559E-1	-9.13122E0	-9.14226E0	5.07832E-3	9.28164E-2	2.73225E1	-3.26693E1	-3.26098E1	2.68124E1	1.73605E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16894E-1	-7.98225E-1	-9.13115E0	-9.14192E0	5.76973E-3	9.2864E-2	2.73198E1	-3.26573E1	-3.26065E1	2.6796E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16751E-1	-7.98583E-1	-9.13122E0	-9.14199E0	5.24521E-3	9.30309E-2	2.72823E1	-3.26711E1	-3.26675E1	2.68082E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98247E-1